Reduced size, low loss MEMS torsional hinges and MEMS resonators employing such hinges
First Claim
1. A Micro ElectroMechanical system comprising:
- a first torsional hinge that includes;
a first end;
a second end; and
a first corrugated side edge.
4 Assignments
0 Petitions
Accused Products
Abstract
Torsional hinge support beams (104, 106, 108, 110, 400, 500, 600, 700, 800, 900, 1000, 1100, 1200, 1300, 1400, 1500) that are corrugated, perforated and/or have non-uniform width are provided. The support beams are useful in flexural beam resonators (100, 1600), in which they serve to support the main flexural mode-vibrating beam (102, 1602). The support beams have phase lengths equal to an odd multiple of π/2, preferably the phase lengths are about equal to π/2 at the operating frequency of the resonators. Owing to the corrugations, the lengths of the support beams are shorter than comparable solid straight edge support beams. The short lengths of the support beams reduce the overall area occupied by the resonators and allow higher bias voltage to be employed in order to obtain greater electromechanical coupling.
55 Citations
36 Claims
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1. A Micro ElectroMechanical system comprising:
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a first torsional hinge that includes;
a first end;
a second end; and
a first corrugated side edge. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22, 23, 24, 25)
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26. A Micro ElectroMechanical system comprising:
a torsional hinge including a first torsional hinge that includes;
a first end;
a second end; and
is characterized by;
a length dimension measured between the first end and the second end; and
a width that is measured perpendicular to the length dimension and varies as a function of position along the length. - View Dependent Claims (27, 28, 29, 30, 31, 32, 33)
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34. A Micro ElectroMechanical system comprising:
a torsional hinge that includes;
a first end;
a second end; and
a plurality of holes through the torsional hinge. - View Dependent Claims (35, 36)
Specification