Drive device
First Claim
1. A drive device comprising:
- a channel forming portion for forming a channel, the channel accommodating an incompressible operation fluid and a movable body made of a substance different from that of the operation fluid, and being substantially divided into two operation chambers by means of the movable body;
a pair of pumps each including a pump chamber communicating with the corresponding operation chamber and being filled with the operation fluid, an actuator provided for the pump chamber, and a diaphragm deformed by the actuator, the operation fluid within the pump chamber being pressurized or depressurized through deformation of the diaphragm;
an internal-pressure-buffering-chamber-forming portion for forming an internal-pressure buffering chamber which accommodates the operation fluid and a compressible fluid for pressure buffering; and
a micro flow passage for connecting the channel of the channel forming portion and the internal-pressure buffering chamber of the internal-pressure-buffering-chamber-forming portion, the micro flow passage exhibiting a high passage resistance against abrupt pressure change of the operation fluid within the channel, to thereby substantially prohibit passage of the operation fluid through the micro flow passage and exhibiting a low passage resistance against slow pressure change of the operation fluid within the channel, to thereby substantially permit passage of the operation fluid through the micro flow passage.
1 Assignment
0 Petitions
Accused Products
Abstract
A drive device which does not cause breakage of a pump chamber or a seal due to thermal expansion of operation fluid is provided.
A drive device 10 includes ceramic pumps 18a and 18b, which alternately pressurize and depressurize operation fluid 100 within a fluid chamber 13a on opposite sides of a movable body 110, to thereby move the movable body 110 within the flow chamber 13a. The flow chamber 13a is connected via micro flow passages 16a1 and 16b1 to an internal-pressure buffering chamber 15a, which accommodates a compressible gas. When the pressure of the operation fluid 100 is increased and decreased at high speed by the ceramic pumps, the micro flow passages exhibit a high passage resistance, so that the pressure within the channel does not escape to the internal-pressure buffering chamber 15a, and the movable body 110 moves without fail. When the pressure of the operation fluid 100 increases slowly due to expansion of the operation fluid 100, the micro flow passages exhibit a low passage resistance, so that the operation fluid 100 is led to the internal-pressure buffering chamber 15a, and the pressure increase of the operation fluid 100 is suppressed.
10 Citations
3 Claims
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1. A drive device comprising:
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a channel forming portion for forming a channel, the channel accommodating an incompressible operation fluid and a movable body made of a substance different from that of the operation fluid, and being substantially divided into two operation chambers by means of the movable body;
a pair of pumps each including a pump chamber communicating with the corresponding operation chamber and being filled with the operation fluid, an actuator provided for the pump chamber, and a diaphragm deformed by the actuator, the operation fluid within the pump chamber being pressurized or depressurized through deformation of the diaphragm;
an internal-pressure-buffering-chamber-forming portion for forming an internal-pressure buffering chamber which accommodates the operation fluid and a compressible fluid for pressure buffering; and
a micro flow passage for connecting the channel of the channel forming portion and the internal-pressure buffering chamber of the internal-pressure-buffering-chamber-forming portion, the micro flow passage exhibiting a high passage resistance against abrupt pressure change of the operation fluid within the channel, to thereby substantially prohibit passage of the operation fluid through the micro flow passage and exhibiting a low passage resistance against slow pressure change of the operation fluid within the channel, to thereby substantially permit passage of the operation fluid through the micro flow passage. - View Dependent Claims (2, 3)
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Specification