3D array of integrated cells for the sampling and detection of air bound chemical and biological species

• US 20030136178A1
• Filed: 01/10/2003
• Published: 07/24/2003
• Est. Priority Date: 06/02/2000
• Status: Active Grant

• Current Assignee: Cleopatra Cabuz
• Original Assignee: Cleopatra Cabuz
• Inventors: Cabuz, Cleopatra
• Granted Patent: US 6,758,107 B2
• Time in Patent Office: Days
• US Class Current: 73/31.02
• CPC Class Codes: F04B 43/043 Micropumps
• CPC Class Codes: F04B 43/14 having plate-like flexible members
• CPC Class Codes: G01N 1/24 Suction devices G01N1/22 - G01N1/2294 take precedence
• CPC Class Codes: G01N 33/0011 Sample conditioning preparing specimens for investigation G01N1/28
• CPC Class Codes: G01N 33/0031 comprising two or more sensors, e.g. a sensor array
• CPC Class Codes: G01N 33/0032 using two or more different physical functioning modes

Abstract

An integrated mesopump-sensor suitable for disposition in two- and three-dimensional arrays having small dimensions is disclosed. One mesopump is formed of an electrostatically attractable flexible diaphragm disposed through cavities or pumping chambers formed between two opposing electrostatically chargeable material layers. Fluid is pumped through the chambers by sequentially moving the diaphragm toward the first chargeable layer, then towards the second chargeable layer, which can pull and push the fluid through a series of chambers, and past the sensor. One group of sensors utilizes multiple and varied chemoresistive sensors which can vary in resistance differently in response to the presence of various analytes. Another group of sensors utilizes chemo-fluorescent sensors that fluoresce in the presence of particular analytes. Some mesopump-sensor systems can be manufactured using MEMS technology and can be coupled to controllers for sequencing the pumps and analyzing sensor outputs using methods including Principle Component Analysis.

Claims

1. A sensor system for detecting agents in a fluid of interest comprising an integrated array of sensors and pumps, wherein each pump drives a sample of the fluid of interest to a corresponding one of the sensors.

2. A sensor system as recited in claim 1, wherein the pumps are mesopumps.

3. A sensor system as recited in claim 1, wherein each of the pumps drives the sample of the fluid of interest to a single corresponding sensor.

4. A sensor system as recited in claim 1, wherein said integrated array of sensors and pumps are a one-dimensional array.

5. A sensor system as recited in claim 1, wherein said integrated array of sensors and pumps are a two-dimensional array.

6. A sensor system as recited in claim 1, wherein said integrated array of sensors and pumps are a three-dimensional array.

7. A sensor system as recited in claim 1, wherein selected sensors include a sensing component for detecting agents, wherein the sensing components of two or more sensors vary in at least one property as a function of the presence of said agents.

8. A sensor system as recited in claim 7, wherein said sensing components include polymers that vary in resistivity in response to exposure to said agents.

9. A sensor system as recited in claim 7, wherein said sensing components include polymers that vary in fluorescence in response to exposure to said agents.

10. A sensor system as recited in claim 7, wherein at least two of the pumps are individually controllable.

11. A sensor system as recited in claim 10, further comprising a controller for controlling said pumps.

12. A sensor system as recited in claim 11, wherein said controller includes programmable means for individually starting and stopping selected pumps.

13. A sensor system as recited in claim 11, wherein said controller includes programmable means for starting selected pumps in response to an event.

14. A sensor system as recited in claim 11, wherein said controller includes programmable means for starting selected pumps in response to an output from a sensor.

15. A sensor as recited in claim 11, wherein said controller includes programmable means for stopping selected pumps in response to an event.

16. A sensor as recited in claim 11, wherein said controller includes programmable means for stopping selected pumps in response to an output from a sensor.

17. A sensor as recited in claim 11, wherein said controller includes means for analyzing the outputs of selected sensors for detecting the presence of said agent.

18. A sensor as recited in claim 11, wherein said controller includes bi-directional controlling means for controlling selected pumps to pump in a first pumping direction and a second pumping direction.

19. A sensor as recited in claim 1, wherein said sensor system includes a filter in fluid communication with selected pumps.

20. A sensor system as recited in claim 19, wherein said filter is an impactor type filter.

21. A sensor system comprising:

a first layer, at least a portion of which is electrically chargeable;

a second layer opposing said first layer, at least a portion of which is electrically chargeable;

said first and second layers forming a cavity therebetween;

an electrostatically moveable diaphragm disposed between said first and second layers and disposed through said cavity for pumping fluid through said cavity;

a flow channel formed into at least one of said first and second layers and in fluid communication with said cavity; and

a sensor disposed in fluid communication with said flow channel, such that the pumped fluid passes said sensor when pumped into or out of said cavity.

22. A sensor system as recited in claim 21, wherein said sensor is a chemoresistive sensor.

23. A sensor system as recited in claim 21, wherein said sensor is a chemo-optical sensor.

24. A sensor system as recited in claim 21, wherein said sensor is a chemo-fluorescent sensor.

25. A sensor system as recited in claim 21, wherein said sensor system includes a controller for controlling the movement of said electrostatically moveable diaphragm.

26. A sensor system as recited in claim 25, wherein said diaphragm is electrostatically attractable to said first layer upon application of electrical potential to said electrically chargeable portion of said first layer.

27. A sensor system as recited in claim 26, wherein said diaphragm is electrostatically attractable to said second layer upon application of electrical potential to said electrically chargeable portion of said second layer.

28. A sensor system as recited in claim 21, further comprises a third layer disposed opposing said second layer and having a second cavity disposed between said second layer and said third layer, and a second diaphragm disposed between said second and said third layers, said second cavity being in fluid communication with said first cavity.

29. A sensor system as recited in claim 28, further comprising a third cavity disposed between said second and third layers and in fluid communication with said second cavity.

30. A sensor system as recited in claim 29, further comprising a fourth cavity disposed between said first and second layers and in fluid communication with said third cavity.

31. An array of integrated cells for the sampling and detection of airborne chemical and biological species, each of the integrated cells having a pump and a sensor.

32. An array of integrated cells as recited in claim 31, wherein selected integrated cells have a first sensor type and selected other integrated cells have a second sensor type, wherein the first sensor type has different sensing characteristics than the second sensor type.

33. An array of integrated cells as recited in claim 32, wherein selected integrated cells have a heater means for directly or indirectly heating said sensors for desorbing an analyte.