Tunable MEMS resonator and method for tuning
First Claim
1. A microelectromechanical resonator comprising:
- a microelectromechanical resonant structure characterized by a mass;
a vaporizable material for altering the mass of the resonant structure.
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Accused Products
Abstract
MEMS resonators (100, 400, 500) include a source of material that is capable of sublimation (128, 130, 406, 408, 502, 504). Conductive pathways (132, 134, 402, 404, 502, 504) to the material are used to supply current of ohmically heat the material in order to cause the material to sublimate. The material may be located either on or in close proximity to a resonant member (114) of the resonator. By sublimating the material, the mass of the resonant member is either increased or decreased thereby altering the resonant frequency of the resonant member. The resonant member is preferably located in a recess that is capped by a cap (202) forming a vacuum enclosure, and the material capable of sublimation preferably comprises a material that serves to getter any residual gases in the vacuum enclosure.
82 Citations
21 Claims
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1. A microelectromechanical resonator comprising:
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a microelectromechanical resonant structure characterized by a mass;
a vaporizable material for altering the mass of the resonant structure. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20)
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21. A method of tuning a microelectromechanical resonator that includes a microelectromechanical resonant structure, a vaporizable material, and a first conductive pathway for ohmically heating the vaporizable material, the method including the steps of:
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driving the micromechanical resonator with a swept frequency signal;
monitoring a first current coupled to the microelectromechanical resonator to detect a resonant frequency;
supplying a second current to ohmically heat the vaporizable material to evaporate the vaporizable material and thereby alter the mass of the microelectromechanical resonant structure, and the resonant frequency;
stopping the second current when the resonant frequency is about equal to a predetermined value.
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Specification