Thermal processing apparatus and thermal processing method

  • US 20030186563A1
  • Filed: 03/21/2003
  • Published: 10/02/2003
  • Est. Priority Date: 03/25/2002
  • Status: Active Grant
First Claim
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1. A thermal processing apparatus capable of heating a substrate with light, comprising:

  • a lamp irradiating said substrate with said light;

    a ring enclosing the outer edge of said substrate and outwardly spreading from said outer edge; and

    an image pickup system capturing images of a plurality of portions of said ring.

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