Micromachined devices with apertures
First Claim
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1. A micromachined device comprising:
- a substrate;
a body suspended over the substrate in a plane parallel to the substrate and movable in the plane relative to the substrate, the body having;
a perimeter portion, a first cross-piece extending from one part of the perimeter portion to another part of the perimeter portion to at least partly define at least first and second apertures in the body in the plane, a first plurality of fingers extending in parallel in the plane and into the first aperture, and a second plurality of fingers extending in parallel in the plane and into the second aperture.
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Abstract
A micromachined device has a body suspended over a substrate and movable in a plane relative to the substrate. The body has a perimeter portion, a first cross-piece portion extending from one part of the perimeter portion to another part of the perimeter portion to define at least first and second apertures, a first plurality of fingers extending along parallel axes from the perimeter portion into the first aperture, and a second plurality of fingers extending along parallel axes from the perimeter portion into the second aperture.
7 Citations
23 Claims
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1. A micromachined device comprising:
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a substrate;
a body suspended over the substrate in a plane parallel to the substrate and movable in the plane relative to the substrate, the body having;
a perimeter portion, a first cross-piece extending from one part of the perimeter portion to another part of the perimeter portion to at least partly define at least first and second apertures in the body in the plane, a first plurality of fingers extending in parallel in the plane and into the first aperture, and a second plurality of fingers extending in parallel in the plane and into the second aperture. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14)
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15. A micromachined device comprising:
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a substrate;
a body suspended over the substrate in a plane parallel to the substrate and movable in the plane relative to the substrate, the body having a generally rectangular shape with a rectangular perimeter and having openings formed in the interior of the body, each of the openings having fingers extending along parallel axes into the opening. - View Dependent Claims (16, 17, 18, 19, 20, 21, 22, 23)
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Specification