Method for processing the surface of a workpiece
First Claim
1. A method for treating a workpiece, comprising the steps of:
- loading the workpiece into a chamber;
supplying steam into the chamber;
allowing at least some of the steam to condense as a liquid on a surface of the workpiece, to form a layer of liquid on the workpiece; and
introducing ozone gas into the chamber.
3 Assignments
0 Petitions
Accused Products
Abstract
An apparatus for supplying a mixture of a treatment liquid and ozone for treatment of a surface of a workpiece, and a corresponding method are set forth. The preferred embodiment of the apparatus comprises a liquid supply line that is used to provide fluid communication between a reservoir containing the treatment liquid and a treatment chamber housing the workpiece. A heater is disposed to heat the workpiece, either directly or indirectly. Preferably, the workpiece is heated by heating the treatment liquid that is supplied to the workpiece. One or more nozzles accept the treatment liquid from the liquid supply line and spray it onto the surface of the workpiece while an ozone generator provides ozone into an environment containing the workpiece.
53 Citations
23 Claims
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1. A method for treating a workpiece, comprising the steps of:
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loading the workpiece into a chamber;
supplying steam into the chamber;
allowing at least some of the steam to condense as a liquid on a surface of the workpiece, to form a layer of liquid on the workpiece; and
introducing ozone gas into the chamber. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12)
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13. A method for treating a workpiece, comprising the steps of:
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placing the workpiece into a chamber;
introducing steam into the chamber;
heating the workpiece with the steam;
allowing steam to condense on a surface of the workpiece to form a heated liquid boundary layer on the surface of the workpiece;
introducing ozone gas into the chamber;
diffusing the ozone gas through the heated liquid boundary layer; and
reacting the ozone at the surface of the workpiece. - View Dependent Claims (14, 15, 16, 17, 18)
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19. A method for processing a workpiece to remove material from a surface of the workpiece, comprising the steps of:
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condensing steam on the workpiece surface that is to be treated to form a liquid boundary layer that allows diffusion of ozone therethrough for reaction with the material at a liquid-solid interface between the liquid boundary layer and the material, with the steam assisting in maintaining the workpiece at an elevated temperature; and
introducing gaseous ozone to the environment around the workpiece under conditions in which the ozone diffuses through the boundary layer and reacts with the material. - View Dependent Claims (20, 21, 22, 23)
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Specification