MEMS device integrated chip package, and method of making same
First Claim
1. A micro electromechanical (MEMS) package comprising:
- a semiconductor device;
a first MEMS disposed in a first structure, and wherein the first MEMS is disposed over the semiconductor device;
an embedded MEMS in a conveyance that is disposed over the semiconductor device, wherein first MEMS is accommodated in a via in the conveyance.
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Accused Products
Abstract
The present invention relates to a chip package that includes a semiconductor device and at least one micro electromechanical structure (MEMS) such that the semiconductor device and the MEMS form an integrated package. One embodiment of the present invention includes a semiconductor device, a first MEMS device disposed in a conveyance such as a film, and a second MEMS device disposed upon the semiconductor device through a via in the conveyance.
The present invention also relates to a process of forming a chip package that includes providing a conveyance such as a tape automated bonding (TAB) structure, that may hold at least one MEMS device. The method is further carried out by disposing the conveyance over the active surface of the device in a manner that causes the at least one MEMS to communicate electrically to the active surface. Where appropriate, a sealing structure such as a solder ring may be used to protect the MEMS.
57 Citations
30 Claims
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1. A micro electromechanical (MEMS) package comprising:
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a semiconductor device;
a first MEMS disposed in a first structure, and wherein the first MEMS is disposed over the semiconductor device;
an embedded MEMS in a conveyance that is disposed over the semiconductor device, wherein first MEMS is accommodated in a via in the conveyance. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13)
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14. A process of forming a micro electromechanical (MEMS) package comprising:
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providing a semiconductor device;
providing a conveyance with at least one embedded MEMS device disposed therein; and
disposing the conveyance over the semiconductor device, wherein the at least one embedded MEMS device communicates electrically to the semiconductor device. - View Dependent Claims (15, 16, 17, 18, 19, 20, 21, 22)
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23. A process comprising:
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providing a semiconductor device;
accommodating a detached micro electromechanical structure (MEMS) device upon the semiconductor device;
providing a conveyance over the semiconductor device and around the detached MEMS device; and
contacting encapsulation material with at least one of the semiconductor device, the detached MEMS device, and the conveyance to form an integrated MEMS package. - View Dependent Claims (24, 25)
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26. A micro electromechanical structure (MEMS) package comprising:
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a semiconductor device;
a sealing structure disposed over the semiconductor device;
at least one detached MEMS in a first structure disposed over the sealing structure, wherein the at least one detached MEMS is selected from a capacitor, a switch, an oscillator, an inductor, a power supply, and combinations thereof;
at least one embedded MEMS in a conveyance, wherein the at least one embedded MEMS is selected from a capacitor, a switch, an oscillator, an inductor, a power supply, and combinations thereof; and
encapsulation material disposed over at least one of the conveyance and at least one of the at least one detached MEMS, and the semiconductor device. - View Dependent Claims (27, 28, 29, 30)
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Specification