SEMICONDUCTOR DEVICE WITH DRAM INSIDE
First Claim
1. A semiconductor device comprising a DRAM region and a high-speed CMOS logic region that are co-resident with each other, wherein a pair of gate electrodes of a N-type sense amplifier transistor and a pair of gate electrodes of a P-type sense amplifier transistor constituting a CMOS sense amplifier of the DRAM are disposed respectively in one active region in parallel to each other in the same direction as that of bit lines, and a pair of adjacent N-type sense amplifier transistors and a pair of adjacent P-type sense amplifier transistors are isolated by shallow trench isolation (STI) regions.
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Accused Products
Abstract
A semiconductor device is provided in which the difference in characteristics between a pair of sense amplifier transistors of a DRAM is suppressed, whereby the sensitivity of a sense amplifier is enhanced. A pair of gate electrodes of a N-type sense amplifier transistor and a pair of gate electrodes of a P-type sense amplifier transistor constituting a CMOS sense amplifier of the DRAM respectively are placed in parallel to each other in one active region in the same direction as that of bit lines. A pair of adjacent N-type sense amplifier transistors and a pair of adjacent P-type sense amplifier transistors are isolated by STI.
27 Citations
9 Claims
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1. A semiconductor device comprising a DRAM region and a high-speed CMOS logic region that are co-resident with each other,
wherein a pair of gate electrodes of a N-type sense amplifier transistor and a pair of gate electrodes of a P-type sense amplifier transistor constituting a CMOS sense amplifier of the DRAM are disposed respectively in one active region in parallel to each other in the same direction as that of bit lines, and a pair of adjacent N-type sense amplifier transistors and a pair of adjacent P-type sense amplifier transistors are isolated by shallow trench isolation (STI) regions.
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4. A semiconductor device comprising a DRAM region and a high-speed CMOS logic region that are co-resident with each other,
wherein a pair of gate electrodes of a N-type sense amplifier transistor and a pair of gate electrodes of a P-type sense amplifier transistor constituting a CMOS sense amplifier of the DRAM are disposed respectively in one active region in parallel to each other in the same direction as that of bit lines, active regions are connected to each other in a pair of adjacent N-type sense amplifier transistors and a pair of adjacent P-type sense amplifier transistors, and on the active regions, field shield electrodes are disposed between the pair of adjacent N-type sense amplifier transistors and between the pair of adjacent P-type sense amplifier transistors so as to be parallel to the pair of gate electrodes of each of the sense amplifier transistors.
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7. A semiconductor device comprising a DRAM region and a high-speed CMOS logic region that are co-resident with each other,
wherein a pair of gate electrodes of a N-type sense amplifier transistor and a pair of gate electrodes of a P-type sense amplifier transistor constituting a CMOS sense amplifier of the DRAM are disposed respectively in one active region in parallel to each other in the same direction as that of bit lines, active regions are connected to each other in a pair of adjacent N-type sense amplifier transistors, on the active regions, a field shield electrode is disposed between the pair of adjacent N-type sense amplifier transistors so as to be parallel to the pair of gate electrodes of the N-type sense amplifier transistor, a pair of adjacent P-type sense amplifier transistors are isolated by shallow trench isolation (STI) regions, and a floating electrode is disposed on the shallow trench isolation region between the pair of P-type sense amplifier transistors so as to be parallel to the pair of gate electrodes of the P-type sense amplifier transistor.
Specification