THERMOMECHANICAL IN-PLANE MICROACTUATOR

  • US 20040074234A1
  • Filed: 12/18/2002
  • Published: 04/22/2004
  • Est. Priority Date: 06/19/2000
  • Status: Active Grant
First Claim
Patent Images

1. A microelectromechanical mechanism comprising:

  • a base member;

    a shuttle; and

    a substantially straight expansion member attached to the base member and the shuttle, such that the base member, the shuttle, and the expansion member substantially form an “

    I”

    shape, wherein the expansion member is configured to elongate in an elongation direction to drive a shuttle in a direction substantially different from the elongation direction.

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