Cylindrical magnetron magnetic array mid span support

• US 20040129561A1
• Filed: 01/07/2003
• Published: 07/08/2004
• Est. Priority Date: 01/07/2003
• Status: Abandoned Application

• Current Assignee: Applied Films Corp. (Applied Materials Incorporated)
• Original Assignee: Von Ardenne Anlagentechnik GmbH
• Inventors: Barrett, Richard Lowe, Greene, Philip A.
• Application Number:
  US10/338,190
• Publication Number:
  US 20040129561A1
• Time in Patent Office: Days
• US Class Current: 204/298.21
• CPC Class Codes: H01J 37/3405 Magnetron sputtering
• CPC Class Codes: H01J 37/3455 Movable magnets

Abstract

A support assembly for the magnetic array in a cylindrical magnetron that greatly reduces the stress placed on the assembly and on the end blocks of the magnetron. The support assembly and method also reduce the time necessary for properly positioning the magnetic array in relation to the target tube, and result in uniform positioning of the magnetic array along the length of the target tube. A cylindrical magnetron incorporating such an assembly produces uniform coatings and requires less adjustment and maintenance.

Claims

1. A method for positioning a magnetic array having a span within the target tube of a cylindrical magnetron, the method comprising:

affixing the magnetic array to a supporting member along the span of the magnetic array;

attaching a roller structure to the supporting member at about the middle of the span;

adjusting a distance between the roller structure and the support member in order to position the magnetic array relative to an inner surface of the target tube; and

inserting the roller structure, support member, and magnetic array into the target tube such that the roller structure is at about the middle of the target tube.

2. The method of claim 1 wherein adjusting the distance comprises turning a set screw.

3. The method of claim 1 wherein adjusting the distance comprises inserting one or more pieces of material between the roller structure and the support member.

4. A magnetic support assembly in a cylindrical magnetron having a target tube, the magnetic support assembly comprising:

a U-shaped member;

rollers attached to the U-shaped member, the rollers in contact with an inner diameter of the target tube; and

an elongated support structure attached to a magnetic array, the support structure and magnetic array positioned between the rollers of the U-shaped member,

the elongated support structure having a length approximately equal to that of the target tube, the magnetic support assembly positioned at approximately the middle of the target tube and supporting the weight of the magnetic array and support structure from the approximate middle of the target tube.

5. The magnetic support assembly of claim 4 further comprising an adjustment mechanism that changes the distance of the magnetic array in relation to an inner surface of the target tube.

6. The support assembly of claim 4 further comprising a lubrication reservoir that provides continual lubrication to the rollers during operation of the magnetron.

7. The support assembly of claim 4 wherein the rollers comprise nylon.

8. The support assembly of claim 7 wherein the rollers further comprise molybdenum disulphide and a lubricant.

9. A method for positioning a magnetic array having a span within the target tube of a cylindrical magnetron, the method comprising:

affixing the magnetic array to a support member along the span of the array;

supporting the magnetic array and supporting member at the middle of the magnetic support member with a cradle that contacts the inner circumference of the target tube with rollers (wheels) and can be used to adjust the distance of the magnet from the inner circumference of the target tube; and

inserting the roller structure, support member, and magnetic array into the target tube such that the roller structure is at about the middle of the target tube.

10. A method of supporting and positioning a magnetic array within a cylindrical target tube of a magnetron, the target tube having a length and an inner circumference, the magnetic array spanning the target tube, the method comprising:

attaching a support member spanning the length of the target tube to the magnetic array;

supporting the support member at three positions, at least one of the positions at the mid-span of the support member.

11. The method of claim 10 further comprising:

adjusting the distance of the magnet from the inner circumference at the mid-span of the support member.

12. The method of claim 11 wherein adjusting the distance comprises varying the distance between an upper and a lower portion of a support frame, one of the portions operable to move freely relative to the other portion.

13. The method of claim 12 wherein adjusting the distance comprises adjusting one or more screws including at least one set-screw.

14. The method of claim 12 wherein adjusting the distance comprises inserting shims between the upper and lower portions of the support frame.

15. The method of claim 10 wherein supporting comprises bearing a load and distributing the load, the load at the middle of the span supported by the target tube through one or more rotating elements.

16. A cylindrical magnetron comprising:

a target tube having sputtering material;

a magnet within the target tube;

a support member within the target tube, the support member coupled to the magnet and having a principle axis parallel to principle axes of the target tube and magnet; and

a centrally located support structure coupled to the support member,

the support structure having an adjustment mechanism that changes the position of the magnet relative to the sputtering material of target tube,

the position of the magnet adjusted with the adjustment mechanism relative to the target tube prior to insertion of the magnet and support structure into the target tube.

17. The magnetron of claim 16 wherein the support structure adjustment mechanism comprises one or more set screws that adjust the position of the support member and magnet relative to an inner surface of the target tube.

18. The magnetron of claim 16 wherein the support structure adjustment mechanism comprises shims that adjust the position of the support member and magnet relative to an inner surface of the target tube.

19. The magnetron of claim 16 wherein the magnet is affixed to the support member, and wherein the support member is moveable relative to the support structure.

20. In a cylindrical magnetron comprising a target tube and a magnetic array, a magnetic array support structure comprising:

means for supporting and positioning a magnetic array at the center of gravity of the magnetic array, so as to eliminate sagging of the array at the center of gravity.