×

Apparatus and method for depositing material onto multiple independently moving substrates in a chamber

  • US 20040131760A1
  • Filed: 01/02/2003
  • Published: 07/08/2004
  • Est. Priority Date: 01/02/2003
  • Status: Abandoned Application
First Claim
Patent Images

1. A system comprising:

  • a deposition chamber that contains;

    a plurality of pairs of source and take-up reels within the vacuum chamber, including a first source reel and a first take-up reel, and a second source reel and a second take-up reel;

    a deposition station configured to deposit material onto a first strip of substrate running between the first source reel and the first take-up reel, and to deposit material onto a second strip of substrate running between the second source reel and the second take-up reel; and

    a controller operatively coupled to run the first strip of substrate between the first source reel and the first take-up reel at a first independent rate and tension, and to run the second strip of substrate between the second source reel and the second take-up reel at a second independent rate and tension.

View all claims
  • 1 Assignment
Timeline View
Assignment View
    ×
    ×