Vibration-attenuation devices and methods using pressurized bellows exhibiting substantially zero lateral stiffness

• US 20040135979A1
• Filed: 01/13/2003
• Published: 07/15/2004
• Est. Priority Date: 01/13/2003
• Status: Active Grant

• Current Assignee: Nikon Corporation
• Original Assignee: Nikon Corporation
• Inventors: Hazelton, Andrew J.
• Granted Patent: US 6,870,600 B2
• Time in Patent Office: Days
• US Class Current: 355/51
• CPC Class Codes: G03B 27/48 with original in the form of a film strip moving continuously and compensation for consequent image movement
• CPC Class Codes: G03F 7/70716 Stages
• CPC Class Codes: G03F 7/709 Vibration, e.g. vibration detection, compensation, suppression or isolation

Abstract

Vibration-attenuation devices and methods are disclosed that utilize a bellows situated between a first and second mass and pressurized with a fluid to an internal fluid pressure substantially equal to a zero-stiffness pressure such that the bellows exhibits a substantially zero lateral stiffness. The devices may include various components configured to measure, regulate, and control the internal pressure of the bellows in order to maintain a desired pressure. The devices may include an active support, such as a secondary bellows or linear actuator, that provides a secondary support force. The active support may be connected to various components configured to measure and control the secondary support force. The vibration-attenuation devices disclosed may be used in a lithography exposure apparatus to attenuate vibrations between: (1) a support frame and a support surface; (2) a base and a stage-supporting platform; and (3) a supporting stage and a wafer stage.

Claims

1. A device for placement between a first mass and a second mass for attenuating transmission of lateral vibration from one of the masses to the other of the masses, the device comprising at least one bellows situated along a respective support axis between the first and second masses and configured to be pressurized with a fluid, the bellows defining an interior volume that is pressurized to an internal fluid pressure substantially equal to a zero-stiffness pressure such that the bellows exhibits a substantially zero lateral stiffness.

2. The device of claim 1, wherein the interior volume of the bellows is pressurized to an internal fluid pressure greater than the zero-stiffness pressure.

3. The device of claim 1, wherein the interior volume of the bellows is pressurized to an internal fluid pressure less than the zero-stiffness pressure.

4. The device of claim 1, wherein the interior volume of the bellows is connected to a fluid source configured to supply the internal fluid pressure to the bellows.

5. The device of claim 4, further comprising:

a pressure sensor in fluid communication with the interior volume of the bellows and configured for producing pressure data corresponding to the internal pressure of the bellows; and

a pressure regulator fluidly connected to the bellows and to the fluid source, the pressure regulator being configured to adjust the pressure, supplied by the fluid source to the interior volume, in response to the pressure data.

6. The device of claim 5, further comprising a controller connected to the pressure sensor and to the pressure regulator, the controller being configured to change the internal fluid pressure in the bellows in response to the pressure data.

7. The device of claim 4, further comprising:

a pressure sensor in fluid communication with the interior volume of the bellows and configured for producing pressure data corresponding to the internal pressure of the bellows; and

a controller connected to the pressure sensor and configured for changing an amount of fluid delivered by the fluid source to the interior volume in response to the pressure data.

8. The device of claim 4, further comprising a controller situated and configured for changing an amount of fluid delivered by the fluid source to the interior volume so as to establish the internal fluid pressure.

9. The device of claim 8, wherein the second mass is supported by the device and has a variable center of gravity, the device further comprising a center-of-gravity sensor connected to the controller and configured to detect changes in the center of gravity of the second mass, the controller being further configured to change the internal fluid pressure in the bellows in response to the changes in the center of gravity.

10. The device of claim 9, wherein the center-of-gravity sensor comprises at least one laser interferometer.

11. The device of claim 1, wherein the bellows provides a primary support force along the support axis, the support axis being a primary support axis, the apparatus further comprising at least one active support situated relative to the bellows on a respective secondary support axis and configured to provide a secondary support force to at least one of the masses along the secondary support axis.

12. The device of claim 11, comprising multiple bellows situated between the first and second masses, each bellows having associated therewith a respective active support.

13. The device of claim 11, wherein the active support is further configured to measure the secondary support force applied by the active support.

14. The device of claim 13, further comprising a controller connected to the active support and configured to change the secondary support force, in response to the measured secondary support force, to a predetermined value of the secondary support force.

15. The device of claim 14, wherein the controller is further configured to control the secondary support force to maintain the internal fluid pressure of the bellows at the pressure substantially equal to the zero-stiffness pressure such that the bellows maintains a substantially zero lateral stiffness accompanying changes in the secondary support force.

16. The device of claim 13, wherein the second mass is supported by the device and has a variable center of gravity, the device further comprising a center-of-gravity sensor situated and configured to detect changes in the center of gravity of the second mass.

17. The device of claim 16, further comprising a controller connected to the center-of-gravity sensor, the controller being configured to change the secondary support force in response to changes in the center of gravity of the second mass.

18. The device of claim 17, wherein:

the second mass is supported in a plane; and

the controller changes the secondary support force of the active support so as to maintain the second mass in the plane.

19. The device of claim 16, wherein the center-of-gravity sensor comprises at least one laser interferometer.

20. The device of claim 11, wherein the active support comprises an air mount.

21. The device of claim 20, wherein:

the bellows providing the primary support force is a primary bellows; and

the air mount comprises a secondary bellows having an interior volume less than the interior volume of the primary bellows.

22. The device of claim 20, wherein the air mount comprises a respective compliant chamber.

23. The device of claim 11, wherein the active support comprises an electromagnetic actuator configured to generate the secondary support force.

24. The device of claim 23, wherein the electromagnetic actuator comprises a voice coil motor, a variable reluctance actuator, or an El-core.

25. A lithographic exposure apparatus, comprising:

a support frame for supporting the lithographic exposure apparatus relative to a support surface; and

at least one vibration-attenuation device situated between the support frame and the support surface, the vibration-attenuation device comprising a bellows defining an interior volume configured to be pressurized with a fluid, the bellows being situated along a respective support axis of the support frame and positioned between the support frame and the support surface, wherein the interior volume of the bellows is pressurized to an internal fluid pressure substantially equal to a zero-stiffness pressure such that the bellows exhibits a substantially zero lateral stiffness.

26. The apparatus of claim 25, wherein the interior volume of the bellows is pressurized to an internal fluid pressure greater than the zero-stiffness pressure.

27. The apparatus of claim 25, wherein the interior volume of the bellows is pressurized to an internal fluid pressure less than the zero-stiffness pressure.

28. The apparatus of claim 25, wherein the interior volume of the bellows is connected to a fluid source configured to supply the internal fluid pressure to the bellows.

29. The apparatus of claim 28, wherein the vibration-attenuation device further comprises:

a pressure sensor in fluid communication with the interior volume of the bellows and configured for producing pressure data corresponding to the internal pressure of the bellows; and

a pressure regulator fluidly connected to the bellows and to the fluid source, the pressure regulator being configured to adjust the pressure, supplied by the fluid source to the interior volume, in response to the pressure data.

30. The apparatus of claim 29, wherein the vibration-attenuation device further comprises a controller connected to the pressure sensor and to the pressure regulator, the controller being configured to change the internal fluid pressure in the bellows in response to the pressure data.

31. The apparatus of claim 28, wherein the vibration-attenuation device further comprises:

a pressure sensor in fluid communication with the interior volume of the bellows and configured for producing pressure data corresponding to the internal pressure of the bellows; and

a controller connected to the pressure sensor and configured for changing an amount of fluid delivered by the fluid source to the interior volume in response to the pressure data.

32. The apparatus of claim 28, wherein the vibration-attenuation device further comprises a controller situated and configured for changing an amount of fluid delivered by the fluid source to the interior volume so as to establish the internal fluid pressure.

33. The apparatus of claim 32, wherein the support frame has a variable center of gravity, the vibration-attenuation device further comprising a center-of-gravity sensor connected to the controller and configured to detect changes in the center of gravity of the support frame, the controller being further configured to change the internal fluid pressure in the bellows in response to the changes in the center of gravity.

34. The device of claim 33, wherein the center-of-gravity sensor comprises at least one laser interferometer.

35. The apparatus of claim 25, wherein the bellows provides a primary support force along the support axis, the support axis being a primary support axis, the vibration-attenuation device further comprising at least one active support situated relative to the bellows on a respective secondary support axis and configured to provide a secondary support force to the support frame along the secondary support axis.

36. The apparatus of claim 35, wherein the vibration-attenuation device comprises multiple bellows situated between the support surface and the support frame, each bellows having associated therewith a respective active support.

37. The apparatus of claim 35, wherein the active support is further configured to measure the secondary support force applied by the active support.

38. The apparatus of claim 37, further comprising a controller connected to the active support and configured to change the secondary support force, in response to the measured secondary support force, to a predetermined value of the secondary support force.

39. The apparatus of claim 38, wherein the controller is further configured to control the secondary support force to maintain the internal fluid pressure of the bellows at the pressure substantially equal to the zero-stiffness pressure such that the bellows maintains a substantially zero lateral stiffness accompanying changes in the secondary support force.

40. The apparatus of claim 37, wherein:

the support frame has a variable center of gravity; and

the vibration-attenuation device further comprises a center-of-gravity sensor situated and configured to detect changes in the center of gravity of the support frame.

41. The apparatus of claim 40, wherein:

the vibration-attenuation device further comprises a controller connected to the center-of-gravity sensor; and

the controller is configured to change the secondary support force in response to changes in the center of gravity of the support frame.

42. The apparatus of claim 41, wherein:

the support frame is supported in a plane; and

the controller changes the secondary support force of the active support so as to maintain the support frame in the plane.

43. The apparatus of claim 40, wherein the center-of-gravity sensor comprises at least one laser interferometer.

44. The apparatus of claim 35, wherein the active support comprises an air mount.

45. The apparatus of claim 44, wherein:

the bellows providing the primary support force is a primary bellows; and

the air mount comprises a secondary bellows having an interior volume less than the interior volume of the primary bellows.

46. The apparatus of claim 44, wherein the air mount comprises a respective compliant chamber.

47. The apparatus of claim 35, wherein the active support comprises an electromagnetic actuator configured to generate the secondary support force.

48. The apparatus of claim 47, wherein the electromagnetic actuator comprises a voice coil motor, a variable reluctance actuator, or an El-core.

108. An object manufactured using the apparatus of claim 25.

49. An apparatus for supporting a stage in a lithography system comprising:

a base;

a platform on which a movable stage is configured to operate; and

at least one vibration-attenuation device situated between the platform and the base, the vibration-attenuation device comprising a bellows defining an interior volume configured to be pressurized with a fluid, the bellows being situated along a respective support axis of the platform and positioned between the platform and the base, wherein the interior volume of the bellows is pressurized to an internal fluid pressure substantially equal to a zero-stiffness pressure such that the bellows exhibits a substantially zero lateral stiffness.

50. The apparatus of claim 49, wherein the interior volume of the bellows is pressurized to an internal fluid pressure greater than the zero-stiffness pressure.

51. The apparatus of claim 49, wherein the interior volume of the bellows is pressurized to an internal fluid pressure less than the zero-stiffness pressure.

52. The apparatus of claim 49, wherein the interior volume of the bellows is connected to a fluid source configured to supply the internal fluid pressure to the bellows.

53. The apparatus of claim 52, wherein the vibration-attenuation device further comprises:

a pressure sensor in fluid communication with the interior volume of the bellows and configured for producing pressure data corresponding to the internal pressure of the bellows; and

a pressure regulator fluidly connected to the bellows and to the fluid source, the pressure regulator being configured to adjust the pressure, supplied by the fluid source to the interior volume, in response to the pressure data.

54. The apparatus of claim 53, wherein the vibration-attenuation device further comprises a controller connected to the pressure sensor and to the pressure regulator, the controller being configured to change the internal fluid pressure in the bellows in response to the pressure data.

55. The apparatus of claim 52, wherein the vibration-attenuation device further comprises:

a pressure sensor in fluid communication with the interior volume of the bellows and configured for producing pressure data corresponding to the internal pressure of the bellows; and

a controller connected to the pressure sensor and configured for changing an amount of fluid delivered by the fluid source to the interior volume in response to the pressure data.

56. The apparatus of claim 52, wherein the vibration-attenuation device further comprises a controller situated and configured for changing an amount of fluid delivered by the fluid source to the interior volume so as to establish the internal fluid pressure.

57. The apparatus of claim 56, wherein the platform has a variable center of gravity, the vibration-attenuation device further comprising a center-of-gravity sensor connected to the controller and configured to detect changes in the center of gravity of the platform, the controller being further configured to change the internal fluid pressure in the bellows in response to the changes in the center of gravity.

58. The device of claim 57, wherein the center-of-gravity sensor comprises at least one laser interferometer.

59. The apparatus of claim 49, wherein the bellows provides a primary support force along the support axis, the support axis being a primary support axis, the vibration-attenuation device further comprising at least one active support situated relative to the bellows on a respective secondary support axis and configured to provide a secondary support force to the platform along the secondary support axis.

60. The apparatus of claim 59, wherein the vibration-attenuation device comprises multiple bellows situated between the support surface and the platform, each bellows having associated therewith a respective active support.

61. The apparatus of claim 59, wherein the active support is configured to move the wafer stage in at least one degree of freedom relative to the supporting stage.

62. The apparatus of claim 59, wherein the active support is configured to move the wafer stage in three degrees of freedom relative to the supporting stage.

63. The apparatus of claim 61, wherein the active support is further configured to measure the secondary support force applied by the active support.

64. The apparatus of claim 63, further comprising a controller connected to the active support and configured to change the secondary support force, in response to the measured secondary support force, to a predetermined value of the secondary support force.

65. The apparatus of claim 64, wherein the controller is further configured to control the secondary support force to maintain the internal fluid pressure of the bellows at the pressure substantially equal to the zero-stiffness pressure such that the bellows maintains a substantially zero lateral stiffness accompanying changes in the secondary support force.

66. The apparatus of claim 63, wherein:

the platform has a variable center of gravity; and

the vibration-attenuation device further comprises a center-of-gravity sensor situated and configured to detect changes in the center of gravity of the platform.

67. The apparatus of claim 66, wherein:

the vibration-attenuation device further comprises a controller connected to the center-of-gravity sensor; and

the controller is configured to change the secondary support force in response to changes in the center of gravity of the platform.

68. The apparatus of claim 67, wherein:

the platform is supported in a plane; and

the controller changes the secondary support force of the active support so as to maintain the platform in the plane.

69. The apparatus of claim 66, wherein the center-of-gravity sensor comprises at least one laser interferometer.

70. The apparatus of claim 61, wherein the active support comprises an air mount.

71. The apparatus of claim 70, wherein:

the bellows providing the primary support force is a primary bellows; and

the air mount comprises a secondary bellows having an interior volume less than the interior volume of the primary bellows.

72. The apparatus of claim 70, wherein the air mount comprises a respective compliant chamber.

73. The apparatus of claim 61, wherein the active support comprises an electromagnetic actuator configured to generate the secondary support force.

74. The apparatus of claim 73, wherein the electromagnetic actuator comprises a voice coil motor, a variable reluctance actuator, or an EI-core.

109. An object manufactured using the apparatus of claim 49.

75. A lithography system, comprising an apparatus for attenuating transmission of a vibration to and from a wafer stage in the lithography system, the apparatus comprising:

a frame;

a wafer stage;

a supporting stage mounted to the frame; and

a vibration-attenuation device situated between the wafer stage and the supporting stage, the vibration-attenuation device comprising a bellows defining an interior volume configured to be pressurized with a fluid, the bellows being situated along a respective support axis of the wafer stage and positioned between the wafer stage and the supporting stage, wherein the interior volume of the bellows is pressurized to an internal fluid pressure substantially equal to a zero-stiffness pressure such that the bellows exhibits a substantially zero lateral stiffness.

76. The apparatus of claim 75, wherein the interior volume of the bellows is pressurized to an internal fluid pressure greater than the zero-stiffness pressure.

77. The apparatus of claim 75, wherein the interior volume of the bellows is pressurized to an internal fluid pressure less than the zero-stiffness pressure.

78. The apparatus of claim 75, wherein the interior volume of the bellows is connected to a fluid source configured to supply the internal fluid pressure to the bellows.

79. The apparatus of claim 78, wherein the vibration-attenuation device further comprises:

a pressure sensor in fluid communication with the interior volume of the bellows and configured for producing pressure data corresponding to the internal pressure of the bellows; and

a pressure regulator fluidly connected to the bellows and to the fluid source, the pressure regulator being configured to adjust the pressure, supplied by the fluid source to the interior volume, in response to the pressure data.

80. The apparatus of claim 79, wherein the vibration-attenuation device further comprises a controller connected to the pressure sensor and to the pressure regulator, the controller being configured to change the internal fluid pressure in the bellows in response to the pressure data.

81. The apparatus of claim 78, wherein the vibration-attenuation device further comprises:

a pressure sensor in fluid communication with the interior volume of the bellows and configured for producing pressure data corresponding to the internal pressure of the bellows; and

a controller connected to the pressure sensor and configured for changing an amount of fluid delivered by the fluid source to the interior volume in response to the pressure data.

82. The apparatus of claim 78, wherein the vibration-attenuation device further comprises a controller situated and configured for changing an amount of fluid delivered by the fluid source to the interior volume so as to establish the internal fluid pressure.

83. The apparatus of claim 82, wherein the wafer stage has a variable center of gravity, the vibration-attenuation device further comprising a center-of-gravity sensor connected to the controller and configured to detect changes in the center of gravity of the wafer stage, the controller being further configured to change the internal fluid pressure in the bellows in response to the changes in the center of gravity.

84. The device of claim 83, wherein the center-of-gravity sensor comprises at least one laser interferometer.

85. The apparatus of claim 75, wherein the bellows provides a primary support force along the support axis, the vibration-attenuation device further comprising at least one active support situated relative to the bellows on a respective secondary support axis and configured to provide a secondary support force to the wafer stage along the secondary support axis.

86. The apparatus of claim 85, wherein the vibration-attenuation device comprises multiple bellows situated between the supporting stage and the wafer stage, each bellows having associated therewith a respective active support.

87. The apparatus of claim 85, wherein the vibration-attenuation device comprises bellows extending between respective locations on the supporting stage and the wafer stage, and at least three active supports, wherein each bellows has associated therewith a respective active support.

88. The apparatus of claim 85, wherein the active support is configured to move the wafer stage in at least one degree of freedom relative to the supporting stage.

89. The apparatus of claim 85, wherein the active support is configured to move the wafer stage in three degrees of freedom relative to the supporting stage.

90. The apparatus of claim 85, wherein the active support is further configured to measure the secondary support force applied by the active support.

91. The apparatus of claim 90, further comprising a controller connected to the active support and configured to change the secondary support force, in response to the measured secondary support force, to a predetermined value of the secondary support force.

92. The apparatus of claim 91, wherein the controller is further configured to control the secondary support force to maintain the internal fluid pressure of the bellows at the pressure substantially equal to the zero-stiffness pressure such that the bellows maintains a substantially zero lateral stiffness accompanying changes in the secondary support force.

93. The apparatus of claim 90, wherein:

the wafer stage has a variable center of gravity; and

the vibration-attenuation device further comprises a center-of-gravity sensor situated and configured to detect changes in the center of gravity of the wafer stage.

94. The apparatus of claim 93, wherein:

the vibration-attenuation device further comprises a controller connected to the center-of-gravity sensor; and

the controller is configured to change the secondary support force in response to changes in the center of gravity of the wafer stage.

95. The apparatus of claim 94, wherein:

the wafer stage is supported in a plane; and

the controller changes the secondary support force of the active support so as to maintain the wafer stage in the plane.

96. The apparatus of claim 93, wherein the center-of-gravity sensor comprises at least one laser interferometer.

97. The apparatus of claim 85, wherein the active support comprises an air mount.

98. The apparatus of claim 97, wherein:

the bellows providing the primary support force is a primary bellows; and

the air mount comprises a secondary bellows having an interior volume less than the interior volume of the primary bellows.

99. The apparatus of claim 97, wherein the air mount comprises a respective compliant chamber.

100. The apparatus of claim 85, wherein the active support comprises an electromagnetic actuator configured to generate the secondary support force.

101. The apparatus of claim 100, wherein the electromagnetic actuator comprises a voice coil motor, a variable reluctance actuator, or an El-core.

110. An object manufactured using the apparatus of claim 75.

102. A method for attenuating vibration between a first mass and a second mass, comprising:

extending a bellows having an interior volume configured to be pressurized with a fluid between the first and second mass such that the second mass is supported, at least partially, by the bellows;

pressurizing the interior volume to a pressure substantially equal to a zero-stiffness pressure such that the bellows exhibits a substantially zero lateral stiffness.

103. The method of claim 102, wherein the pressure substantially equal to a zero-stiffness pressure is greater than the zero-stiffness pressure.

104. The method of claim 102, wherein the pressure substantially equal to a zero-stiffness pressure is less than the zero-stiffness pressure.

105. The method of claim 102, wherein the bellows provides a primary support force along the support axis, the method further comprising placing at least one active support between the first and second mass on a secondary support axis relative to the bellows, the active support being configured to provide a secondary support force to at least one of the masses along the secondary support axis.

106. The method of claim 105, wherein the second mass has a variable center of gravity, the method further comprising:

providing a center-of-gravity sensor situated and configured to detect changes in the center of gravity of the second mass;

providing a controller connected to the center-of-gravity sensor, the controller being configured to change the secondary support force in response to changes in the center of gravity of the second mass.

107. The method of claim 102 wherein the second mass is supported in a plane, the method further comprising providing a controller that is configured to change the secondary support force of the active support so as to maintain the second mass in the plane.

111. An object manufactured by the method of claim 102.