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MICRO-ELECTROMECHANICAL INDUCTIVE SWITCH

  • US 20040164825A1
  • Filed: 02/26/2003
  • Published: 08/26/2004
  • Est. Priority Date: 02/26/2003
  • Status: Active Grant
First Claim
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1. A semiconductor micro-electromechanical (mem) switch comprising:

  • at least one moveable inductor; and

    at least one inductor on a stationary substrate, wherein the relative movement of said at least one moveable inductor with respect to said at least one stationary inductor electrically couples and decouples said at least one moveable inductor to and from said at least one stationary inductor.

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