Method of producing silicon nanoparticles from stain-etched silicon powder

  • US 20040166319A1
  • Filed: 02/21/2003
  • Published: 08/26/2004
  • Est. Priority Date: 02/21/2003
  • Status: Active Grant
First Claim
Patent Images

1. A porous silicon powder comprising a plurality of silicon particles wherein the outermost layers of said particles are porous.

View all claims
    ×
    ×

    Thank you for your feedback

    ×
    ×