Secure reader system

• US 20040172160A1
• Filed: 12/19/2003
• Published: 09/02/2004
• Est. Priority Date: 06/13/2001
• Status: Active Grant

• Current Assignee: Entegris Incorporated
• Original Assignee: Advanced Technology Materials, Inc. (Entegris Incorporated)
• Inventors: OʼDougherty, Kevin T., Andrews, Robert E., Jayaraman, Tripunithura V., Baye-Wallace, Christopher A., Menning, Joseph P.
• Granted Patent: US 7,702,418 B2
• Time in Patent Office: Days
• US Class Current: 700/231
• CPC Class Codes: B67D 7/0283 specially adapted for transferring liquids of high purity
• CPC Class Codes: B67D 7/348 by interrogating an information transmitter, e.g. a transponder B67D7/145 takes precedence
• CPC Class Codes: G06K 19/07758 arrangements for adhering the record carrier to further objects or living beings, functioning as an identification tag
• CPC Class Codes: G06K 19/07762 the adhering arrangement making the record carrier wearable, e.g. having the form of a ring, watch, glove or bracelet record carriers for insertion in the human body for medical purposes A61B90/00; record carriers adapted for attachment to animals A01K11/00
• CPC Class Codes: H01L 21/6715 Apparatus for applying a liquid, a resin, an ink or the like H01L21/67126 takes precedence
• CPC Class Codes: H01L 21/67294 using identification means, e.g. labels on substrates or labels on containers

Abstract

A secure reader system (SRS) for containers housing material to be employed in an application. A container is provided having an information storing mechanism. A connector of the SRS having a reader is provided to physically couple to the container for periodically reading information there from. The connector is configured to physically couple to the container and may draw material from the container simultaneous with the reading.

Claims

1. A container assembly comprising:

a container body having an interior for containing a material; and

an information storing mechanism coupled to a portion of said container body and for storing information about the material, the portion configured to couple to a connector for physically providing a single pathway of access to the interior and the information.

2. The container assembly of claim 1 wherein the portion is a cap for sealing said container body.

3. The container assembly of claim 1 wherein the information is about one of the material'"'"'s properties, date of manufacture, conditions of manufacture, and amount.

4. The container assembly of claim 1 wherein the material is one of an i-line, deep ultraviolet and a 193 nm photoresist.

5. The container assembly of claim 1 wherein the connector is simultaneously coupled to a process assembly to employ the material in an application and a control unit to direct the application.

6. A cap comprising an information storing mechanism for storing information about a material, said cap for coupling to a container having an interior for containing the material and for coupling to a connector for physically providing a single pathway for access to the interior and the information.

7. The cap of claim 6 wherein the information storing mechanism is an information tag in the form of one of a bar code, a magnetic strip, and a radio frequency identification device.

8. The cap of claim 6 further comprising a rupturable membrane to seal the interior and for rupturing to allow the connector to access the interior.

9. An apparatus comprising:

a probe to access a material at an interior of a container; and

an antenna assembly to read information in an exclusive manner from an information storing mechanism coupled to a portion of the container, the apparatus to physically couple to the portion to ensure the exclusive manner.

10. The apparatus of claim 9 for simultaneously coupling to a process assembly to receive the material and to a controller to receive the information.

11. The apparatus of claim 9 wherein a clearance is provided between said antenna assembly and the information storing mechanism.

12. A system comprising:

a process assembly to employ a material in an application;

a control unit to direct the application based on information about the material; and

a connector coupled to said process assembly and said control unit, said connector to provide said process assembly with access to the material and said control unit with access to the information.

13. The system of claim 12 wherein said process assembly includes a tool for one of spin-on coating, meniscus coating, and stencil printing of the material onto a semiconductor substrate.

14. The system of claim 12 further comprising:

a container assembly having an interior for containing the material; and

an information storing mechanism for storing the information.

15. The system of claim 14 further comprising a material cabinet for housing said container.

16. The system of claim 14 wherein said connector is coupled to said container assembly at a cap having a membrane for rupturing to allow said connector to provide said process assembly with the access to the material.

17. The system of claim 16 further comprising a verification tool coupled to the control unit and to confirm the information prior to the rupturing.

18. A control unit for coupling to a process assembly, the process assembly to employ a material in an application, said control unit for directing the application based on information about the material from a connector, the connector to provide the process assembly with access to the material.

19. The control unit of claim 18 further comprising a controller having central processing capacity for the directing.

20. A method comprising:

filling the interior of a container with a material; and

sealing the container with a cap having an information storing mechanism for storing information about the material, the cap for coupling to a connector for physically providing a single pathway for access to the interior and the information.

21. The method of claim 20 wherein the material is one of a dielectric, photoresist, gas, blood, and a pharmaceutical.

22. A method comprising:

providing a container filled with a material;

coupling a connector to the container;

reading information about the material from the container and through the connector; and

withdrawing the material from the container and through the connector.

23. The method of claim 22 further comprising verifying the information prior to said coupling.

24. The method of claim 22 further comprising reusing the container following the withdrawing.

25. The method of claim 22 further comprising updating the information following the withdrawing.

26. The method of claim 22 further comprising running an application based on the information.

27. The method of claim 26 wherein said reading is ongoing in intervals less than about one of an estimated duration of the application, an estimated container change-out time, and five seconds.

28. The method of claim 26 wherein parameters of the application are established based on a time of said running.

29. The method of claim 26 further comprising:

identifying inaccuracy of the information; and

adjusting parameters of the application due to the inaccuracy.

30. The method of claim 29 wherein said adjusting comprises entering a result of the inaccuracy at a controller for directing the application, the controller to provide said adjusting in an automated manner based on said entering.