Surface pressure distribution sensor
First Claim
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1. A surface pressure distribution sensor comprising:
- row lines having a plurality of conductors extending in parallel to each other in a first direction;
column lines having a plurality of conductors extending in parallel to each other in a second direction across the first direction; and
a substrate including the row lines and a substrate including the column lines, wherein at least one of the substrates comprises a flexible film substrate, and a pressure distribution is detected based on an electrostatic capacitance change at intersections of the row lines and the column lines.
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Abstract
A surface pressure distribution sensor includes a row-line portion and a column-line portion that face each other with a certain spacing therebetween by a spacer. The row-line portion includes a glass substrate, multiple row lines formed on the glass substrate so as to extend in parallel to each other in a first direction, and an insulating film that covers the row lines. The column-line portion includes a flexible film and multiple column lines formed on the flexible film so as to extend in parallel to each other in a second direction orthogonal to the first direction.
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7 Claims
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1. A surface pressure distribution sensor comprising:
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row lines having a plurality of conductors extending in parallel to each other in a first direction;
column lines having a plurality of conductors extending in parallel to each other in a second direction across the first direction; and
a substrate including the row lines and a substrate including the column lines, wherein at least one of the substrates comprises a flexible film substrate, and a pressure distribution is detected based on an electrostatic capacitance change at intersections of the row lines and the column lines. - View Dependent Claims (2, 3, 4, 5, 6, 7)
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Specification