Plasma processing apparatus
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Abstract
On one side of a microwave entrance window that is exposed to the atmosphere, a slot plate having slots and a resonant unit are provided. The slot plate and the resonant unit are integrally placed to be slidable by linear guides with respect to a process chamber. In this way, a plasma processing apparatus can be provided that performs a highly uniform plasma process and is excellent in terms of plasma generation property.
23 Citations
11 Claims
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1-5. -5 (cancel)
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6. A plasma processing apparatus comprising:
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a process chamber for processing by means of plasma;
microwave supply means having a resonant unit oscillating microwave, for supplying the oscillated microwave into said process chamber;
a first slot plate provided between said resonant unit and said process chamber and having a plurality of first openings for passing the oscillated microwave to said process chamber;
a second slot plate having a plurality of second openings provided at respective positions corresponding to respective positions of said first openings;
slot plate drive means for sliding said second slot plate with respect to said first slot plate according to a plasma state within said process chamber; and
slide means for sliding said resonant unit and said first slot plate all together with respect to said process chamber. - View Dependent Claims (7, 8, 9, 10, 11)
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Specification