Integrated set/reset driver and magneto-resistive sensor

• US 20040207400A1
• Filed: 01/08/2004
• Published: 10/21/2004
• Est. Priority Date: 04/15/2003
• Status: Active Grant

• Current Assignee: Honeywell International Inc.
• Original Assignee: Honeywell International Inc.
• Inventors: Amundson, Mark D., Witcraft, William F.
• Granted Patent: US 7,265,543 B2
• Time in Patent Office: Days
• US Class Current: 324/252
• CPC Class Codes: G01R 33/09 Magnetoresistive devices
• CPC Class Codes: G01R 33/096 anisotropic magnetoresistance sensors

Abstract

A magnetic-sensing apparatus and methods of making and using thereof are disclosed. The sensing apparatus may have one or more magneto-resistive-sensing elements, one ore more reorientation elements for adjusting the magneto-resistive-sensing elements, and semiconductor circuitry having driver circuitry for controlling the reorientation elements. The magneto-resistive-sensing elements, reorientation elements and semiconductor circuitry may be disposed in single package and/or monolithically formed on a single chip. Alternatively, some of the semiconductor circuitry may be monolithically formed on a first chip with the magneto-resistive-sensing elements, while a second portion of the semiconductor circuitry may be formed on a second chip. The first and second chips may be placed in close proximity and electrically connected together. Alternatively the chips may have no intentional electrical interaction. Exemplary semiconductor devices that might be implemented include, without limitation, capacitors, inductors, operational amplifiers, set/reset circuitry for the MR sensors, accelerometers, pressure sensors, position-sensing circuitry, compassing circuitry, etc.

Claims

1. A sensing apparatus comprising:

at least one magneto-resistive-sensing element;

at least one reorientation element for adjusting the at least one magneto-resistive-sensing element; and

semiconductor circuitry having driver circuitry for controlling the at least one reorientation element, wherein the at least one magneto-resistive-sensing element, the at least one reorientation element, and the semiconductor circuitry are disposed in a single package.

2. The sensing apparatus of claim 1, wherein the semiconductor circuitry and the at least one magneto-resistive-sensing element are monolithically formed on a single chip.

3. The sensing apparatus of claim 1, wherein the semiconductor circuitry, the at least one reorientation element and the at least one magneto-resistive-sensing element are monolithically formed on a single chip.

4. The sensing apparatus of claim 1, wherein the at least a portion of the semiconductor circuitry is monolithically formed on a first chip with the at least one magneto-resistive-sensing element and the at least one reorientation element.

5. The sensing apparatus of claim 4, wherein at least a portion of the semiconductor circuitry is formed on a second chip.

6. The sensing apparatus of claim 5, wherein the first and second chips are electrically connected together.

7. The sensing apparatus of claim 5, wherein the first chip is placed orthogonal to the second chip.

8. The sensing apparatus of claim 5, wherein the second chip is placed in close proximity to the first chip.

9. The sensing apparatus of claim 7, wherein the first and second chips are electrically connected together.

10. The sensing apparatus of claim 7, wherein the first and second chips have no intentional electrical interaction.

11. The sensing apparatus of claim 2, further comprising a dielectric disposed between the semiconductor circuitry and the at least one magneto-resistive-sensing element.

12. The sensing apparatus of claim 11, wherein the dielectric comprises contact glass.

13. The sensing apparatus of claim 12, wherein the contact glass comprises a material selected from the group consisting of silicon-nitride (Si3N4), borophosilicate glass (BPSG), and silicon-oxide (SiO2).

14. The sensing apparatus of claim 2, wherein the driver circuitry comprises any of functional adjust, signal conditioning, and electro-static-discharge protection circuitry.

15. The sensing apparatus of claim 1, wherein the driver circuitry comprises any of functional adjust, signal conditioning, and electro-static-discharge protection circuitry formed from Complementary Metal-Oxide-Semiconductor(CMOS), bipolar, Gallium-Arsenide, Germanium, bipolarCMOS (BiCMOS), Indium Phosphide (InP), and Silicon-On-Insulator (SOI) technologies.

16. The sensing apparatus of claim 2, wherein the at least one magneto-resistive-sensing element comprises a sensor selected from the group consisting of an anisotropic-magneto sensor, a giant-magneto sensor, and a colossal-magneto sensor.

17. The sensing apparatus of claim 2, further comprising a shield disposed between the semiconductor circuitry and the magneto-resistive-sensing element.

18. The sensing apparatus of claim 17, wherein the shield comprises a material selected from the group consisting of metal, metallic, magnetic, and other isolating materials.

19. The sensing apparatus of claim 11, further comprising a shield disposed in the dielectric.

20. The sensing apparatus of claim 19, wherein the shield prevents the semiconductor circuitry from undesirably affecting an operation of the at least one magneto-resistive-sensing element.

21. The sensing apparatus of claim 19, wherein the shield prevents the at least one magneto-resistive-sensing element from undesirably affecting an operation of the semiconductor circuitry.

22. The sensing apparatus of claim 11, wherein the semiconductor circuitry further comprises position-sensing circuitry.

23. The sensing apparatus of claim 22, wherein in the at least one magneto-resistive-sensing element provides an output signal proportional to a sensed magnetic field, and wherein the position-sensing circuitry comprises at least one amplifier coupled the output signal.

24. The sensing apparatus of claim 23, wherein the at least one amplifier has an adjustable offset.

25. The sensing apparatus of claim 24, wherein the adjustable offset is controlled by external circuitry.

26. The sensing apparatus of claim 23, wherein the at least one amplifier has an adjustable gain.

27. The sensing apparatus of claim 26, wherein the adjustable gain is controlled by external circuitry.

28. The sensing apparatus of claim 23, wherein the semiconductor circuitry further comprises temperature-compensation circuitry.

29. The sensing apparatus of claim 11, wherein the at least one magneto-resistive-sensing element comprises first and second magneto-resistive-sensing elements, wherein the at least one reorientation element comprises first and second reorientation elements for adjusting the first and second magneto-resistive-sensing elements, respectively, and wherein the driver circuitry comprises driver circuitry for controlling the first and second reorientation elements.

30. The sensing apparatus of claim 29, wherein the first and second magneto-resistive-sensing elements detect magnetic fields in orthogonal planes and provide respective first and second output signals proportional to the detected magnetic fields, and wherein the semiconductor circuitry comprises compassing circuitry coupled to the first and second output signals to provide a compassing output responsive to the first and second output signals.

31. The sensing element of claim 30, wherein the compassing circuitry comprises at least two amplifiers, wherein a one of the at least two amplifiers is coupled the first output signal and another of the least two amplifiers is coupled to the second output signal.

32. The sensing apparatus of claim 31, wherein the driver circuitry for controlling the first and second reorientation elements is controlled by external circuitry.

33. The sensing apparatus of claim 31, wherein the compassing circuitry further comprises first and second offset-driver circuitry for adjusting respective offsets of the first and second magneto-resistive-sensing elements.

34. The sensing apparatus of claim 29, further comprising a third magneto-resistive-sensing elements, wherein the at least one reorientation element comprises a third reorientation element for adjusting the third magneto-resistive-sensing elements, and wherein the driver circuitry comprises driver circuitry for controlling the third reorientation element.

35. The sensing apparatus of claim 34, wherein the third magneto-resistive-sensing element and the third reorientation element are formed on a second chip.

36. The sensing apparatus of claim 34, wherein the first, second and third magneto-resistive-sensing elements detect magnetic fields in an orthogonal planes to each other and provide respective first, second and third output signals proportional to the detected magnetic fields, and wherein the semiconductor circuitry comprises compassing circuitry coupled to the first, second and third output signals to provide a compassing output responsive to the first, second and third output signals.

37. The sensing apparatus of claim 36, wherein the third magneto-resistive-sensing element and the third reorientation element are formed on a second chip.

38. The sensing apparatus of claim 37, wherein the driver circuitry for controlling the third reorientation element is formed on the single chip.

39. The sensing apparatus of claim 37, wherein the semiconductor circuitry further comprises temperature-compensation circuitry.

40. The sensing element of claim 36, wherein the compassing circuitry comprises at least three amplifiers, wherein a one of the at least three amplifiers is coupled the first output signal, a second of the least three amplifiers is coupled to the second output signal, and a third of the least three amplifiers is coupled to the third output signal.

41. The sensing apparatus of claim 40, wherein the driver circuitry for controlling the first, second and third reorientation elements is controlled by external circuitry.

42. The sensing apparatus of claim 40, wherein the compassing circuitry further comprises first, second and third offset-driver circuitry for adjusting respective offsets of the first, second and third magneto-resistive-sensing elements.

43. The sensing apparatus of claim 1, wherein the at least one magneto-resistive-sensing element comprises at least two magneto-resistive-sensing elements configured for use in compassing applications.