HIGH THROUGHPUT PLASMA TREATMENT SYSTEM

• US 20040211516A1
• Filed: 04/09/2001
• Published: 10/28/2004
• Est. Priority Date: 12/05/1994
• Status: Active Grant

• Current Assignee: Nordson Corporation
• Original Assignee: Nordson Corporation
• Inventors: Smith, William F. III, Hoffman, David E., Wang, Keda, Rigali, Louis A.
• Granted Patent: US 6,808,592 B1
• Time in Patent Office: Days
• US Class Current: 156/345.31
• CPC Class Codes: H01J 37/32082 Radio frequency generated discharge H01J37/32357, H01J37/32366, H01J37/32394 and H01J37/32403 take precedence
• CPC Class Codes: H01L 21/67069 for drying etching
• CPC Class Codes: H01L 21/67751 vertical transfer of a single workpiece
• CPC Class Codes: H01L 21/67772 involving removal of lid, door, cover
• CPC Class Codes: H01L 21/67778 involving loading and unloading of wafers
• CPC Class Codes: H01L 21/67781 Batch transfer of wafers
• CPC Class Codes: H01L 2224/85013 Plasma cleaning
• CPC Class Codes: H01L 2924/01078 Platinum [Pt]
• CPC Class Codes: Y10S 414/139 including wafer charging or discharging means for vacuum chamber

Abstract

A system and method for the simultaneous plasma treatment of a plurality of parts in a treatment chamber. The system includes a transfer mechanism that is operable to load the plurality of parts at a plurality of treatment positions within the treatment chamber. The operation of the transfer mechanism is controlled by signals from an electronic control system. A guide is provided, either within the treatment chamber or outside the treatment chamber, along which each of the parts may be moved to the plurality of treatment positions. The guides may be arranged in multiple levels so that the treatment positions for the plurality of parts may be likewise arranged in multiple levels.

Claims

1-27. -27. (canceled)

28. A system for the plasma treatment of a plurality of parts at one time, comprising:

a reaction chamber having an open bottom;

a chamber base sealingly engageable with said bottom of said reaction chamber to form a treatment chamber;

a lifting device coupled with said reaction chamber and operable to lift said reaction chamber from said chamber base;

a guide along which each of the plurality of parts may be moved from a position outside of said treatment chamber to a plurality of treatment positions within said treatment chamber;

a transfer mechanism operable to transfer the plurality of parts along said guide from said position outside of said treatment chamber to said plurality of treatment positions within said treatment chamber when said reaction chamber is disengaged from said chamber base;

a plasma-generating device operable to produce a plasma within said treatment chamber for treating the plurality of parts when positioned in said plurality of treatment positions; and

an electronic control system that controls said transfer mechanism for transferring the plurality of parts to said plurality of treatment positions.

29. The system of claim 28, wherein said transfer mechanism comprises:

a vertically-positionable transfer arm capable of selective engagement with each of the plurality of parts; and

a linear drive assembly for moving said transfer arm along the length of the treatment chamber.

30. The system of claim 28, further comprising:

a first position actuator and a second position actuator positioned on opposed ends of said treatment chamber, said first and second position actuators capable of horizontal movement,

an input carrier mounted on said first position actuator, said input carrier including a conveyer capable of conveying each part to a location adjacent said guide; and

an output carrier mounted on said second position actuator, said output carrier comprising a conveyer capable of conveying each part to a location removed from said guide.

31. The system of claim 28, wherein said electronic control system further comprises a plurality of sensors that provide information regarding the position of said transfer mechanism.

32. The system of claim 28, wherein said guide is located within said treatment chamber when said reaction chamber is fitted to said chamber base.

33. The system of claim 32, wherein said plasma generating device includes an electrode and said guide is mounted to said electrode.

34. The system of claim 33, wherein said guide is capable of supporting the plurality of parts when the plurality of parts are positioned in said plurality of treatment positions.

35. The system of claim 32, wherein said guide is capable of supporting the plurality of parts when the plurality of parts are positioned in said plurality of treatment positions.

36. The system of claim 28, wherein said electronic control system comprises a microprocessor interfaced with said transfer mechanism by SMEMA communication.

37. A system for the plasma treatment of a plurality of parts at one time, comprising:

a reaction chamber having an open bottom;

a chamber base sealingly engageable with said bottom of said reaction chamber to form a treatment chamber;

a lifting device coupled with said reaction chamber and operable to lift said reaction chamber from said chamber base;

a plasma-generating device operable to produce a plasma within said treatment chamber for treating the plurality of parts, said plasma-generating device including a plurality of vertically spaced horizontal electrodes;

a plurality of vertically spaced guides forming multiple levels along which the plurality of parts may be moved to a plurality of treatment positions within the treatment chamber, each of said plurality of guides associated with a respective one of said plurality of horizontal electrodes; and

a transfer mechanism operable to transfer the plurality of parts along said plurality of guides to said plurality of treatment positions.

38. The system of claim 37, further comprising an electronic control system that controls said transfer mechanism for transferring the plurality of parts to said treatment positions.

39. The system of claim 37, wherein said plurality of guides comprises a plurality of horizontally spaced guide rail pairs adapted to receive respective ones of the plurality of parts therebetween.

40. The system of claim 37, further comprising:

an input carrier operable to convey each of the plurality of parts adjacent said plurality of guides; and

an output carrier operable to convey each part to a location removed from said plurality of guides,

said input and output carriers each capable of carrying the plurality of parts along said multiple levels.

41. The system of claim 40, wherein each of said input and output carriers is horizontally and vertically movable for positioning said input and output carriers adjacent to said plurality of vertically spaced guides.

42. The system of claim 37, wherein said plurality of guides is located within said treatment chamber when said reaction chamber is fitted to said chamber base.

43. The system of claim 42, wherein each of said plurality of guides is mounted to a respective one of said plurality of horizontal electrodes.

44. The system of claim 43, wherein said plurality of guides are capable of supporting the plurality of parts when the plurality of parts are positioned in said plurality of treatment positions.

45. The system of claim 42, wherein said plurality of guides are capable of supporting the plurality of parts when the plurality of parts are positioned in said plurality of treatment positions.

46-48. -48. (canceled)

49. A system for the plasma treatment of a part, comprising:

a reaction chamber having an open bottom;

a chamber base sealingly engageable with said bottom of said reaction chamber to form a treatment chamber;

a lifting device coupled with said reaction chamber and operable to lift said reaction chamber from said chamber base;

a guide along which the part may be moved;

an input carrier adapted to hold the part adjacent to said guide prior to transfer into the treatment chamber;

an output carrier adapted to receive the part from said guide following plasma treatment;

a transfer mechanism operable to transfer the part along said guide when said reaction chamber is disengaged from said chamber base; and

a plasma-generating device operable to produce a plasma within said treatment chamber for treating the part.

50. The system of claim 49, wherein said transfer mechanism is vertically and horizontally positionable relative to said guide.

51-64. -64. (canceled)