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Micro-electro-mechanical-system two dimensional mirror with articulated suspension structures for high fill factor arrays

  • US 20040212907A1
  • Filed: 04/20/2004
  • Published: 10/28/2004
  • Est. Priority Date: 04/24/2003
  • Status: Active Grant
First Claim
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1. A micro-electro-mechanical-system (MEMS) mirror device, comprising:

  • a mirror having a 2-dimensional rotational articulated hinge at a first end, and having a 1-dimensional rotational articulated hinge at a second end opposite the first end;

    a movable cantilever connected to the mirror through the 1-dimensional rotational articulated hinge;

    a support structure connected to the mirror through the 2-dimensional rotational articulated hinge and connected to the movable cantilever;

    whereby movement of said movable cantilever causes rotation of the mirror in a first axis of rotation, and the mirror is also rotatable about a second torsional axis of rotation perpendicular to said first axis of rotation.

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