Patterned, high surface area substrate with hydrophilic/hydrophobic contrast, and method of use

• US 20040213986A1
• Filed: 04/22/2003
• Published: 10/28/2004
• Est. Priority Date: 04/22/2003
• Status: Active Grant

• Current Assignee: International Business Machines Corporation
• Original Assignee: International Business Machines Corporation
• Inventors: Kim, Ho-Cheol, Miller, Robert Dennis
• Granted Patent: US 7,282,241 B2
• Time in Patent Office: Days
• US Class Current: 428/315.7
• CPC Class Codes: B82Y 5/00 Nanobiotechnology or nanomedicine, e.g. protein engineering or drug delivery
• CPC Class Codes: G01N 33/54393 Improving reaction conditions or stability, e.g. by coating or irradiation of surface, by reduction of non-specific binding, by promotion of specific binding
• CPC Class Codes: Y10T 428/249953 Composite having voids in a component [e.g., porous, cellular, etc.]
• CPC Class Codes: Y10T 428/249961 With gradual property change within a component
• CPC Class Codes: Y10T 428/249979 Specified thickness of void-containing component [absolute or relative] or numerical cell dimension

Abstract

Nanoporous structures are constructed that have hydrophilic regions separated by hydrophobic regions. The porous, hydrophilic regions have reaction sites suitable for use in a bioassay application and have a higher density of reaction sites than that of a non-porous (2-D) surface. The structure may be made by depositing a layer of a matrix material (e.g., an organosilicate) and a porogen, and then crosslinking the matrix material to form a nanohybrid composite structure. The porogen is decomposed to form pores within the matrix material, and a reactive gas phase species (e.g., ozone) is patternwise directed onto a surface of the matrix material. Ultraviolet light (directed through a mask) activates the gas phase species to form a reactive species that then reacts with the matrix material to make it hydrophilic. The porogen may be decomposed thermally or by exposing it to an oxidizing atmosphere in the presence of ultraviolet light.

Claims

1. A method of forming discrete hydrophilic regions on a substrate, comprising:

depositing a layer onto a substrate, wherein the layer includes a matrix material and a porogen;

crosslinking the matrix material to form a nanohybrid composite structure out of the matrix material and the porogen;

decomposing the porogen to form pores within the matrix material; and

patternwise directing a reactive gas phase species onto a surface of the matrix material to form therein discrete regions that are more hydrophilic than are other regions in the material that are adjacent to said discrete regions, said discrete regions and said other regions extending from the surface of the material into the material beneath the surface.

2. The method of claim 1, wherein:

the matrix material is an organosilicate material and the nanohybrid structure is formed by crosslinking the organosilicate material; and

said other regions are hydrophobic.

3. The method of claim 2, wherein said crosslinking induces, within the layer, phase separation between the organosilicate material and the porogen.

4. The method of claim 2, wherein the crosslinking of the organosilicate material is templated by the porogen.

5. The method of claim 2, wherein said crosslinking is thermally induced.

6. The method of claim 2, wherein said crosslinking is induced through at least one of the following:

a photochemical process, e-beam irradiation, and the addition of a basic or acidic catalyst to the organosilicate material.

7. The method of claim 2, wherein the gas phase species is directed onto the organosilicate material in a patternwise way, so that said discrete regions form a pattern within the organosilicate material.

8. The method of claim 7, wherein the pattern is formed by a mask in proximity with the layer.

9. The method of claim 8, wherein less hydrophilic regions in the organosilicate material correspond to opaque portions of the mask.

10. The method of claim 2, wherein the gas phase species includes an oxidizing species.

11. The method of claim 2, wherein the gas phase species includes ozone, and ultraviolet radiation is directed towards the organosilicate material, the ultraviolet radiation activating the ozone to form a reactive species.

12. The method of claim 2, wherein said decomposing is thermally induced.

13. The method of claim 2, wherein said discrete regions include a polar oxidation product that imparts hydrophilic functionality to said discrete regions.

14. The method of claim 13, wherein the polar oxidation product is —

OH.

15. The method of claim 2, wherein said decomposing is induced by exposing the porogen to an oxidizing atmosphere in the presence of electromagnetic radiation.

16. The method of claim 15, wherein the radiation includes ultraviolet light.

17. The method of claim 2, wherein dimensions of said discrete regions are selected so that said discrete regions are suitable for use in a biomolecular array.

18. The method of claim 17, the pores being suitable for concentrating reagents and reactants in a bioassay application, thereby enabling the selection of smaller dimensions of said discrete regions than would be possible in the absence of the pores.

19. The method of claim 2, wherein said discrete regions extend less than 10 microns beneath the surface.

20. A method of forming regions of varying hydrophilicity on a substrate, comprising:

depositing a layer onto a substrate, wherein the layer includes a matrix material and a porogen;

crosslinking the matrix material to form a nanohybrid composite structure out of the matrix material and the porogen;

thermally decomposing the porogen to form pores in the layer; and

patternwise oxidizing the matrix material to form regions of varying hydrophilicity within the layer, wherein said regions extend from a surface of the material into the material.

21. The method of claim 20, wherein said patternwise oxidizing includes directing, in the presence of a gas phase species, ultraviolet radiation through a mask that is in proximity with the layer.

22. The method of claim 21, wherein the gas phase species is ozone.

23. The method of claim 20, wherein said patternwise oxidizing includes a reactive ion etching process.

24. The method of claim 20, wherein said patternwise oxidizing includes generating a plasma.

25. The method of claim 20, wherein the matrix material includes an organosilicate.

26. The method of claim 20, comprising applying heat to initiate said crosslinking.

27. The method of claim 20, wherein said regions extend less than 10 microns beneath the surface.

28. The method of claim 20, wherein said regions include hydrophobic regions and hydrophilic regions.

29. A method of forming regions of varying hydrophilicity on a substrate, comprising:

depositing a layer onto a substrate, wherein the layer includes a matrix material and a porogen;

crosslinking the matrix material to form a nanohybrid composite structure out of the matrix material and the porogen;

patternwise directing, in the presence of an oxidizing species, ultraviolet radiation onto selected regions of the matrix material to both decompose the porogen and induce hydrophilicity within said selected regions, wherein said selected regions extend from a surface of the matrix material into the material.

30. The method of claim 29, wherein the matrix material is an organosilicate.

31. The method of claim 29, said crosslinking including thermally crosslinking the matrix material.

32. The method of claim 29, wherein the oxidizing species is ozone.

33. The method of claim 29, wherein said selected regions extend less than 10 microns beneath the surface.

34. The method of claim 29, wherein said selected regions are hydrophilic, the matrix material including hydrophobic regions that are adjacent to the hydrophilic regions.

35. A nanoporous structure having regions of varying hydrophilicity, said regions corresponding to a preselected pattern, the structure including pores having a minimum characteristic dimension of between 2 nm and 75 nm, said pores constituting at least 5% of said structure by volume.

36. The structure of claim 35, wherein said regions of varying hydrophilicity include discrete hydrophilic regions separated from each other by hydrophobic regions.

37. The structure of claim 36, wherein the thickness of said structure is less than 10 microns.

38. The structure of claim 36, wherein the thickness of said structure is between 0.5 and 10 microns.

39. The structure of claim 36, wherein said regions have a characteristic dimension between 2 microns and 1000 microns.

40. The structure of claim 36, said pores constituting at least 30% of said structure by volume.