Multiple stage, stage assembly having independent stage bases

• US 20040233412A1
• Filed: 02/27/2001
• Published: 11/25/2004
• Est. Priority Date: 02/27/2001
• Status: Active Grant

• Current Assignee: Nikon Corporation
• Original Assignee: Nikon Corporation
• Inventors: Watson, Douglas C., Ono, Kazuya, Hazelton, Andrew
• Granted Patent: US 6,927,838 B2
• Time in Patent Office: Days
• US Class Current: 355/72
• CPC Class Codes: G03F 7/70716 Stages
• CPC Class Codes: G03F 7/70725 control
• CPC Class Codes: G03F 7/70733 Handling masks and workpieces, e.g. exchange of workpiece or mask, transport of workpiece or mask

Abstract

A stage assembly (10) for independently moving and positioning a first device (26A) and a second device (26A) in an operation area (25) is provided herein. The stage assembly (10) includes a stage base (12), a first stage (14), a first mover assembly (15), a second stage (16), and a second mover assembly (18). The first mover assembly (15) moves the first stage (14) and the first device (26A) into the operational area (25) and the second mover assembly (18) moves the second stage (16) and the second device (26B) into the operational area (25). The present stage assembly (10) reduces and minimizes the amount of reaction forces and disturbances that are transferred between the stages (14), (16). This improves the positioning performance of the stage assembly (10). Further, for an exposure apparatus (30), this allows for more accurate positioning of two semiconductor wafers (28) relative to a reticle (32) or some other reference.

Claims

1-13. -13. (Canceled)

14. A stage assembly comprising:

a first stage that retains a first device;

a second stage that retains a second device;

a mover assembly that moves the first stage and the second stage independently of each other, the first stage and the second stage being movable over a common operational area in each movement range;

a first support assembly that supports the first stage independently from the second stage; and

a second support assembly that supports the second stage independently from the first stage.

15. The stage assembly of claim 14 wherein the mover assembly includes a first mover assembly that moves the first stage into the operational area and a second mover assembly that moves the second stage into the operational area.

16. The stage assembly of claim 14 wherein (i) the first support assembly includes a first base section and (ii) the second support assembly includes a second base section.

17. The stage assembly of claim 16 further comprising a first base flexible support that secures the first base section to a mounting base.

18. The stage assembly of claim 17 further comprising a second base flexible support that secures the second base section to the mounting base.

19. An exposure apparatus including the stage assembly of claim 14.

33. The stage assembly of claim 15 wherein the first mover assembly is substantially uncoupled from the second mover assembly.

34. The stage assembly of claim 17 wherein the first base flexible support at least partly isolates the movement of the first base section relative to the second base section.

35. The stage assembly of claim 18 wherein the second base flexible support at least partly isolates the movement of the second base section relative to the first base section.

20-32. -32. (Canceled)

36. A stage assembly that independently moves a first device and a second device into an operational area, the stage assembly comprising:

a first stage that retains the first device;

a second stage that retains the second device;

a mover assembly that moves the first stage and the second stage into the operational area;

a first base section that supports the first stage, wherein the first base section includes a first base bottom, a left first base guide and a right first base guide; and

a second base section that supports the second stage, wherein the second base section includes a second base bottom, a left second base guide and a right second base guide, wherein a portion of at least one of the first base guides extends over the second base section.

37. The stage assembly of claim 36 wherein a portion of at least one of the second base guides extends over the first base section.

38. The stage assembly of claim 37 wherein the base guides are positioned substantially parallel to each other.

39. The stage assembly of claim 36 wherein the first base section is independent of the second base section.

40. The stage assembly of claim 36 wherein the left first base guide and the right first base guide are independent of the left second base guide and the right second base guide.

41. The stage assembly of claim 36 wherein the mover assembly includes a first mover assembly that moves the first stage into the operational area and a second mover assembly that moves the second stage into the operational area.

42. The stage assembly of claim 41 wherein the first mover assembly is substantially uncoupled from the second mover assembly.

43. An exposure apparatus including the stage assembly of claim 36.

44-45. -45. (Canceled)

46. A stage assembly that independently moves a first device and a second device into an operational area, the stage assembly comprising:

a first stage that retains the first device;

a second stage that retains the second device;

a mover assembly that moves the first stage and the second stage into the operational area;

a first base section that supports the first stage, wherein the first base section includes a first base bottom, a left first base guide and a right first base guide; and

a second base section that supports the second stage, wherein the second base section includes a second base bottom, a left second base guide and a right second base guide, wherein one of the first base guides is positioned between the second base guides.

47. The stage assembly of claim 46 wherein one of the second base guides is positioned between the first base guides.

48. The stage assembly of claim 47 wherein the base guides are positioned substantially parallel to each other.

49. The stage assembly of claim 46 wherein the first base section is independent of the second base section.

50. The stage assembly of claim 46 wherein the left first base guide and the right first base guide are independent of the left second base guide and the right second base guide.

51. The stage assembly of claim 46 wherein the mover assembly includes a first mover assembly that moves the first stage into the operational area and a second mover assembly that moves the second stage into the operational area.

52. The stage assembly of claim 51 wherein the first mover assembly is substantially uncoupled from the second mover assembly.

53. An exposure apparatus including the stage assembly of claim 46.

54-55. -55. (Canceled)

56. A stage assembly comprising:

a first stage that retains a first device;

a second stage that retains a second device;

a mover assembly that moves the first stage and the second stage independently of each other, the first stage and the second stage being movable over a common operational area in each movement range;

a first base section that supports the first stage;

a second base section that supports the second stage; and

a first base flexible support that secures the first base section to the a mounting base, the first base section being supported independently from the second base section.

57. The stage assembly of claim 56 wherein the first base flexible support at least partly isolates the movement of the first base section relative to the second base section.

58. The stage assembly of claim 56 further comprising a second base flexible support that secures the second base section to the mounting base.

59. The stage assembly of claim 58 wherein the second base flexible support at least partly isolates the movement of the second base section relative to the first base section.

60. An exposure apparatus including the stage assembly of claim 56.

61-62. -62. (Canceled)

63. A method for making a stage assembly comprising the steps of:

providing a first stage that retains a first device;

providing a second stage that retains a second device;

connecting a first mover assembly to the first stage, the first mover assembly moving the first stage and the second stage independently of each other, the first stage and the second stage being movable over a common operational area in each movement range;

supporting the first stage with a first base section; and

supporting the second stage with a second base section that is different from the first base section.

65. The method of claim 63 wherein the first base section is independent of the second base section.

66. A method for making an exposure apparatus that forms an image on a wafer, the method comprising the steps of:

providing an irradiation apparatus that irradiates the wafer with radiation to form the image on the wafer; and

providing the stage assembly made by the method of claim 63.

64. (Canceled)

67-68. -68. (Canceled)

69. A method for making a stage assembly that independently moves a first device and a second device into an operational area, the method comprising the steps of:

providing a first stage that retains the first device;

providing a second stage that retains the second device;

connecting a mover assembly to the first stage and the second stage, the mover assembly moving the first stage and the first device into the operational area and the second stage and the second device into the operational area;

supporting the first stage with a first base section that includes a first base bottom, a left first base guide and a right first base guide; and

supporting the second stage with a second base section that includes a second base bottom, a left second base guide and a right second base guide.

70. The method of claim 69 including the step of positioning a portion of at least one of the first base guides over the second base bottom.

71. The method of claim 69 including the step of positioning a portion of at least one of the second base guides over the first base bottom.

72. The method of claim 69 including the step of positioning one of the first base guides between the second base guides and the step of positioning one of the second base guides between the first base guides.

73. The method of claim 69 wherein the left first base guide and the right first base guide are independent of the left second base guide and the right second base guide.

74. A method for making an exposure apparatus that forms an image on a wafer, the method comprising the steps of:

providing an irradiation apparatus that irradiates the wafer with radiation to form the image on the wafer; and

providing the stage assembly made by the method of claim 69.

75-76. -76. (Canceled)

77. A method for making a stage assembly that independently moves a first device and a second device into an operational area, the method comprising the steps of:

providing a first stage that retains the first device;

providing a second stage that retains the second device;

connecting a mover assembly to the first stage and the second stage, the mover assembly moving the first stage and the first device into the operational area and the second stage and the second device into the operational area;

supporting the first stage with a first base section;

supporting the second stage with a second base section; and

securing the first base section to a mounting base with a first base flexible support.

78. The method of claim 77 wherein the step of securing the first base section includes the step of at least partly isolating the movement of the first base section relative to the second base section.

79. The method of claim 77 further comprising the step of securing the second base section to the mounting base with a second base flexible support.

80. The method of claim 79 wherein the step of securing the second base section includes the step of at least partly isolating the movement of the second base section relative to the first base section.

81. A method for making an exposure apparatus that forms an image on a wafer, the method comprising the steps of:

providing an irradiation apparatus that irradiates the wafer with radiation to form the image on the wafer; and

providing the stage assembly made by the method of claim 77.

82-83. -83. (Canceled)

84. A stage assembly that independently moves a first device and a second device into an operational area, the stage assembly comprising:

a first stage that retains the first device;

a second stage that retains the second device;

a mover assembly that moves the first stage and the second stage into the operational area;

a first support assembly that supports the first stage independently from the second stage, the first support assembly including a first base section; and

a second support assembly that supports the second stage independently from the first stage, the second support assembly including a second base section.

85. The stage assembly of claim 84 further comprising a first base flexible support that secures the first base section to a mounting base.

86. The stage assembly of claim 85 wherein the first base flexible support at least partly isolates the movement of the first base section relative to the second base section.

87. The stage assembly of claim 85 further comprising a second base flexible support that secures the second base section to the mounting base.

88. The stage assembly of claim 87 wherein the second base flexible support at least partly isolates the movement of the second base section relative to the first base section.

89. The stage assembly of claim 84 wherein the mover assembly includes a first mover assembly that moves the first stage into the operational area and a second mover assembly that moves the second stage into the operational area.

90. The stage assembly of claim 89 wherein the first mover assembly is substantially uncoupled from the second mover assembly.

91. An exposure apparatus including the stage assembly of claim 84.

92-93. -93. (Canceled)

94. A stage assembly that independently moves a first device and a second device into an operational area, the stage assembly comprising:

a first stage that retains the first device;

a second stage that retains the second device;

a mover assembly that moves the first stage and the second stage into the operational area;

a first base section that supports the first stage;

a second base section that supports the second stage;

a first base flexible support that secures the first base section to the a mounting base; and

a second base flexible support that secures the second base section to the mounting base.