Method of room temperature covalent bonding

  • US 20040235266A1
  • Filed: 05/19/2003
  • Published: 11/25/2004
  • Est. Priority Date: 05/19/2003
  • Status: Active Grant
First Claim
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1. A bonding method, comprising:

  • forming first and second bonding layers on respective first and second elements, at least one of said bonding layers comprising a fluorinated oxide layer;

    bringing into contact said first and second bonding layers in ambient at room temperature; and

    forming a bond between said first and second layers at room temperature.

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