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Heat exchanger for high purity fluid handling systems

  • US 20040258403A1
  • Filed: 07/20/2004
  • Published: 12/23/2004
  • Est. Priority Date: 04/03/2002
  • Status: Active Grant
First Claim
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1. A heat exchanger, comprising:

  • a thermal reservoir;

    a fluid tube in thermal contact with said thermal reservoir; and

    a plurality of thermoelectric devices in thermal contact with said thermal reservoir.

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