Coated object

• US 20040258947A1
• Filed: 04/21/2004
• Published: 12/23/2004
• Est. Priority Date: 09/14/2002
• Status: Active Grant

• Current Assignee: Schott AG (Carl-Zeiss-Stiftung)
• Original Assignee: SCHOTT Glass
• Inventors: Dzick, Jurgen, Moelle, Christoph, Bewig, Lars, Bauer, Stefan, Kupper, Thomas, Koppe, Frank, Geisler, Stefan
• Granted Patent: US 7,381,469 B2
• Time in Patent Office: Days
• US Class Current: 428/627
• CPC Class Codes: C03C 17/3417 all coatings being oxide coatings
• CPC Class Codes: C03C 2217/734 comprising an alternation of high and low refractive indexes
• CPC Class Codes: C03C 2218/156 by magnetron sputtering
• CPC Class Codes: C03C 2218/322 Oxidation
• CPC Class Codes: C23C 14/0078 by moving the substrates between spatially separate sputtering and reaction stations
• CPC Class Codes: C23C 14/022 by means of bombardment with energetic particles or radiation
• CPC Class Codes: C23C 14/34 Sputtering
• CPC Class Codes: C23C 14/56 Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
• CPC Class Codes: C23C 28/042 including a refractory ceramic layer, e.g. refractory metal oxides, ZrO2, rare earth oxides
• CPC Class Codes: C23C 28/42 characterized by the composition of the alternating layers
• CPC Class Codes: G02B 1/105 Protective coatings
• CPC Class Codes: G02B 1/14 Protective coatings, e.g. hard coatings
• CPC Class Codes: G02B 5/285 comprising deposited thin solid films G02B5/281 - G02B5/289 take precedence; multilayered film filters for fibre optic multiplexing G02B6/29361
• CPC Class Codes: Y10T 428/12576 Boride, carbide or nitride component
• CPC Class Codes: Y10T 428/12611 Oxide-containing component

Abstract

The invention relates to a coated object in which coatings remain of a constant and unchanged high quality despite operating temperatures of more than 350° C. This is achieved with interlayers which deliberately interrupt and thereby stabilize the morphology of the coating.

Claims

1. A coated object, comprising:

a substrate having at least one functional layer; and

at least one interlayer being arranged in said at least one functional layer, said at least one interlayer having a layer thickness of less than or equal to 10 nm, interrupting the morphology of said at least one functional layer, and dividing said at least one functional layer in a plurality of partial layers.

2. The coated object as claimed in claim 1, wherein said at least one interlayer interrupts the morphology of said at least one functional layer at least once so that said plurality of partial layers are formed and a layer thickness of said plurality of partial layers remains below a predetermined layer thickness at which a phase transformation of said at least one functional layer no longer occurs.

3. The coated object as claimed in claim 1, wherein said at least one functional layer is a predominantly crystalline layer, and said at least one interlayer interrupts the morphology of said at least one functional layer at least once, so that said plurality of partial layers are formed and said at least one functional layer has dense columns that are laterally tightly cohesive, grow perpendicular to a surface of said substrate and have substantially no tendency to widen out.

4. The coated object as claimed in claim 1, wherein said at least one functional layer comprises an element selected from the group consisting of oxides, nitrides, carbides, fluorides, chlorides, selenides, tellurides, and sulfides.

5. The coated object as claimed in claim 1, wherein said at least one functional layer comprises a plurality of elements selected from the group consisting of oxides, nitrides, carbides, fluorides, chlorides, selenides, tellurides, and sulfides.

6. The coated object as claimed in claim 1, wherein said at least one functional layer comprises an element selected from the group consisting of Li, Be, Na, Mg, Al, Si, Ca, Sc, Ti, Cr, Zn, Ge, Sr, Y, Zr, Nb, Cd, In, Sn, Sb, Te, La, Ce, Pr, Nd, Sm, Gd, Yb, Lu, Hf, Ta, Tl, Pb, Bi, and Th.

7. The coated object as claimed in claim 1, wherein said at least one functional layer comprises a plurality of elements selected from the group consisting of Li, Be, Na, Mg, Al, Si, Ca, Sc, Ti, Cr, Zn, Ge, Sr, Y, Zr, Nb, Cd, In, Sn, Sb, Te, La, Ce, Pr, Nd, Sm, Gd, Yb, Lu, Hf, Ta, Tl, Pb, Bi, and Th.

8. The coated object as claimed in claim 1, wherein said at least one functional layer comprises a plurality of mixed systems each having one element selected from a first group consisting of oxides, nitrides, carbides, fluorides, chlorides, selenides, tellurides, and sulfides, said first group being compounded with at least one element selected from a second group consisting of Li, Be, Na, Mg, Al, Si, Ca, Sc, Ti, Cr, Zn, Ge, Sr, Y, Zr, Nb, Cd, In, Sn, Sb, Te, La, Ce, Pr, Nd, Sm, Gd, Yb, Lu, Hf, Ta, Tl, Pb, Bi, and Th.

9. The coated object as claimed in claim 8, wherein said plurality of mixed systems have one element selected from the group consisting of metal oxides, metal nitrides, and metal carbides.

10. The coated object as claimed in claim 9, wherein said plurality of mixed systems comprise at least two metallic components.

11. The coated object as claimed in claim 1, wherein said at least one functional layer comprises a plurality of mixed systems having a plurality of elements selected from a first group consisting of oxides, nitrides, carbides, fluorides, chlorides, selenides, tellurides, and sulfides, which are compound said first group being compounded with at least one element selected from a second group consisting of Li, Be, Na, Mg, Al, Si, Ca, Sc, Ti, Cr, Zn, Ge, Sr, Y, Zr, Nb, Cd, In, Sn, Sb, Te, La, Ce, Pr, Nd, Sm, Gd, Yb, Lu, Hf, Ta, Tl, Pb, Bi, and Th.

12. The coated object as claimed in claim 11, wherein said plurality of mixed systems comprise one element selected from the group consisting of metal oxynitrides, metal carbonitrides, and metal oxycarbonitrides.

13. The coated object as claimed in claim 12, wherein said plurality of mixed systems comprise at least two metallic components.

14. The coated object as claimed in claim 1, further comprising a plurality of different functional layers applied to said substrate.

15. The coated object as claimed in claim 1, wherein said at least one interlayer has a different chemical composition than said at least one functional layer.

16. The coated object as claimed in claim 1, wherein said at least one interlayer comprises one element selected from the group consisting of oxides, nitrides, carbides, fluorides, chlorides, selenides, tellurides, and sulfides.

17. The coated object as claimed in claim 1, wherein said at least one interlayer comprises a plurality of elements selected from the group consisting of oxides, nitrides, carbides, fluorides, chlorides, selenides, tellurides, and sulfides.

18. The coated object as claimed in claim 1, wherein said at least one interlayer comprises one element selected from the group consisting of Li, Be, Na, Mg, Al, Si, Ca, Sc, Ti, Cr, Zn, Ge, Sr, Y, Zr, Nb, Cd, In, Sn, Sb, Te, La, Ce, Pr, Nd, Sm, Gd, Yb, Lu, Hf, Ta, Tl, Pb, Bi, and Th.

19. The coated object as claimed in claim 1, wherein said at least one interlayer comprises a plurality of elements selected from the group consisting of Li, Be, Na, Mg, Al, Si, Ca, Sc, Ti, Cr, Zn, Ge, Sr, Y, Zr, Nb, Cd, In, Sn, Sb, Te, La, Ce, Pr, Nd, Sm, Gd, Yb, Lu, Hf, Ta, Tl, Pb, Bi, and Th.

20. The coated object as claimed in claim 1, wherein said interlayer comprises a plurality of mixed systems having one element selected from a first group consisting of oxides, nitrides, carbides, fluorides, chlorides, selenides, tellurides, and sulfides, said first group being compounded with at least one element selected from a secound group consisting of Li, Be, Na, Mg, Al, Si, Ca, Sc, Ti, Cr, Zn, Ge, Sr, Y, Zr, Nb, Cd, In, Sn, Sb, Te, La, Ce, Pr, Nd, Sm, Gd, Yb, Lu, Hf, Ta, Tl, Pb, Bi, and Th.

21. The coated object as claimed in claim 20, wherein said plurality of mixed systems comprise one element selected from the group consisting of metal oxides, metal nitrides, and metal carbides.

22. The coated object as claimed in claim 21, wherein said plurality of mixed systems comprise at least two metallic components.

23. The coated object as claimed in claim 1, wherein said at least one interlayer comprises a plurality of mixed systems, said plurality of mixed systems having a plurality of elements selected from a first group consisting of oxides, nitrides, carbides, fluorides, chlorides, selenides, tellurides, and sulfides, said first group being with at least one element selected from a second group consisting of Li, Be, Na, Mg, Al, Si, Ca, Sc, Ti, Cr, Zn, Ge, Sr, Y, Zr, Nb, Cd, In, Sn, Sb, Te, La, Ce, Pr, Nd, Sm, Gd, Yb, Lu, Hf, Ta, Tl, Pb, Bi, and Th.

24. The coated object as claimed in claim 23, wherein said plurality of group consisting of metal oxynitrides, metal carbonitrides, and metal oxycarbonitrides.

25. The coated object as claimed in claim 24, wherein said plurality of mixed systems comprise at least two metallic components.

26. The coated object as claimed in claim 1, wherein said at least one functional layer is an optical functional layer and said at least one interlayer interrupts the morphology of the optical functional layer and divides the optical functional layer in said plurality of partial layers.

27. The coated object as claimed in claim 26, wherein said optical function layer has a layer thickness in the range from 10 to 1000 nm.

28. The coated object as claimed in claim 26, wherein said optical function layer has a layer thickness in the range from 30 to 500 nm.

29. The coated object as claimed in claim 26, wherein said plurality of partial layers have a layer thickness in the range from 10 to 70 nm.

30. The coated object as claimed in claim 26, wherein said plurality of partial layers have a layer thickness in the range from 20 to 45 nm.

31. The coated object as claimed in claim 26, wherein said layer thickness of the said at least one interlayer is in the range from 0.3 to 10 nm.

32. The coated object as claimed in claim 26, wherein said layer thickness of the said at least one interlayer is in the range from 1 to 3 nm.

33. The coated object as claimed in claim 26, wherein said layer thickness of the said at least one interlayer is in the range from 1.5 to 2.5 nm.

34. The coated object as claimed in claim 1, wherein said at least one functional layer comprises a plurality of functional layers defining an alternating optical layer system, said alternating optical layer system having a high refractive index layer and a low refractive index layer.

35. The coated object as claimed in claim 34, wherein said high refractive index layer is interrupted by a plurality of interlayers with a low refractive index.

36. The coated object as claimed in claim 34, e wherein said low refractive index layer is interrupted by a plurality of interlayers with a high refractive index.

37. The coated object as claimed in claim 34, wherein said high refractive index layer comprises one element selected from the group consisting of titanium oxide, titanium aluminum oxide, and zirconium oxide.

38. The coated object as claimed in claim 36, wherein said high refractive index layer comprises one element selected from the group consisting of titanium oxide, titanium aluminum oxide, and zirconium oxide.

39. The coated object as claimed in claim 34, wherein said low refractive index layer comprises silicon oxide.

40. The coated object as claimed in claim 35, wherein said plurality of interlayers with a low refractive index comprise silicon oxide.

41. The coated object as claimed in claim 26, wherein said substrate comprises one element selected from the group consisting of metal, glass, glass-ceramic, composite, and plastic.

42. The coated object as claimed in claim 26, wherein the coated object is useable as an optical element, selected from the group consisting of a reflector for digital projection, a lens for digital projection, a mirror for digital projection, an illumination means for digital projection, a reflector for stage, a lens for stage, an illumination means for stage, a reflector for architectural lighting, a lens for architectural lighting, an illumination means for architectural lighting, a prism for the UV wavelength region, a lens for the UV wavelength region, a mirror for the UV wavelength region, a reflector for the UV wavelength region, a filter for the UV wavelength region, an illumination means for the UV wavelength region, a prism for the IR wavelength region, a lens for the IR wavelength region, a mirror for the IR wavelength region, a reflector for the IR wavelength region, a filter for the IR wavelength region, an illumination means for the IR wavelength region, a display for monitors, and a display unite.

43. The coated object as claimed in claim 1, wherein said at least one functional layer is made from a metal, and wherein said at least one interlayer, is made from a metal oxide.

44. The coated object as claimed in claim 43, wherein said at least one functional layer comprises chromium, and wherein said at least one interlayer comprises chromium oxide.

46. The coated object as claimed in claim 1, wherein said at least one functional layer is a protective layer, and wherein said at least one interlayer interrupts the morphology of said protective layer and divides said protective layer in said plurality of partial layers.

47. The coated object as claimed in claim 46, wherein said protective layer has a layer thickness in the range from 100 to 20,000 nm.

48. The coated object as claimed in claim 46, wherein said protective layer s has a layer thickness in the range from 500 to 10,000 nm.

49. The coated object as claimed in claim 46, wherein said protective layer has a layer thickness in the range from 1500 to 5000 nm.

50. The coated object as claimed in claim 46, wherein said plurality of partial layers have a layer thickness in the range from 30 to 500 nm.

51. The coated object as claimed in claim 46, wherein said plurality of partial layers have a layer thickness in the range from 100 to 250 nm.

52. The coated object as claimed in claim 46, wherein said at least one interlayer s has a layer thickness in the range from 0.3 to 10 nm.

53. The coated object as claimed in claim 46, wherein said at least one interlayer D has a layer thickness in the range from 1 to 5 nm.

54. The coated object as claimed in claim 46, wherein said protective layer has a morphology with a plurality of columns which, on average, have a lateral extent of less than 1 μ

m.

55. The coated object as claimed in claim 46, wherein said protective layer has a morphology with a plurality of columns which, on average, have a lateral extent of less than 200 nm.

56. The coated object as claimed in claim 46, wherein said protective layer comprises silicon nitride.

57. The coated object as claimed in claim 46, wherein said protective layer comprises zirconium oxide in a thermally stable crystal phase.

58. The coated object as claimed in claim 46, wherein said at least one interlayer comprises one element selected from the group consisting of zirconium nitride, silicon oxide, and titanium aluminum oxide.

59. The coated object as claimed in claim 46, wherein said substrate comprises one element selected from the group consisting of glass, glass-ceramic, and nonmetallic crystalline materials.

60. The coated object as claimed in claim 46, wherein the coated objected is useable as a cooking plate for a cooking hob.

45. The coated object as claimed in 43, wherein the coating object is useable as a carrier element for lithographic processes.

61. A coated object, comprising:

a substrate having at least one functional layer; and

at least one interlayer, which is different than said at least one functional layer, being arranged in said at least one functional layer, said at least one interlayer having the same refractive index as said at least one functional layer and said at least one interlayer forming a layer that interrupts the morphology of said at least one functional layer.

62. The coated object as claimed in claim 61, wherein said at least one functional layer comprises a metal oxide, wherein said at least one interlayer comprises a metal oxide having at least two metallic components, and wherein said at least one interlayer has a refractive index that can be varied by adjusting a quantitative ratio of said at least two metallic components.

63. The coated object as claimed in claim 61, wherein said at least one functional layer comprises zirconium oxide, wherein said at least one interlayer comprises titanium aluminum oxide, and wherein said at least one interlayer has a refractive index that can be varied by adjusting a quantitative ratio of titanium and aluminum in said titanium aluminum oxide.

64. The coated object as claimed in claim 61, wherein said at least one interlayer comprises a metal oxide, wherein said at least one functional layer comprises a metal oxide having at least two metallic components, and wherein said at least one functional layer has a refractive index that can be varied by adjusting a quantitative ratio of said at least two metallic components.

65. The coated object as claimed in claim 61, wherein said at least one interlayer comprises zirconium oxide, wherein said at least one functional layer comprises titanium aluminum oxide, and wherein said at least one functional layer has a refractive index that can be varied by adjusting a quantitative ratio of titanium and aluminum in said titanium aluminum oxide.

66. A coated object, comprising:

a substrate having at least one optical functional layer, said at least one optical functional layer having a layer thickness between 20 and 1,000 nm, having a predominantly amorphous layer, and having at least one interlayer arranged therein, said at least one interlayer having a different morphology than said at least one optical functional layer, having a layer thickness less than or equal to 10 nm, and dividing said at least one optical functional layer in a plurality of partial layers so that said plurality of partial layers have a layer thickness between 10 and 50 nm.

67. A coated object, comprising:

a substrate having at least one optical functional layer, said at least one optical functional layer having a layer thickness between 20 and 1,000 nm, having a predominantly crystalline layer in a thermally instable crystal phase, and having at least one interlayer arranged therein, said at least one interlayer having a different morphology than said at least one optical functional layer, having a layer thickness less than or equal to 10 nm, and dividing said at least one optical functional layer in a plurality of partial layers so that said plurality of partial layers have a layer thickness between 10 and 50 nm.

68. A coated object, comprising:

a substrate having at least one protective functional layer, said at least one protective functional layer having a layer thickness between 100 and 20,000 nm, having a predominantly crystalline layer in a thermally stable crystal phase, and having at least one interlayer arranged therein, said at least one interlayer having a different morphology than said at least one protective functional layer, having a layer thickness less than or equal to 10 nm, and dividing said at least one protective functional layer in a plurality of partial layers so that said plurality of partial layers have a layer thickness between 30 and 500 nm.

69. A diffusion-inhibiting container, comprising:

a substrate;

a functional layer disposed on said substrate; and

an interlayer arranged in said functional layer, wherein said interlayer has a layer thickness of less than or equal to 10 nm, interrupts the morphology of said functional layer, and divides said functional layer in a plurality of partial layers.

70. A process for producing a coated object, comprising:

using a CVD or PVD process to apply a coating to a substrate, said coating having at least one functional layer and at least one interlayer arranged in said at least one functional layer, said at least one interlayer having a layer thickness of less than or equal to 10 nm, interrupting the morphology of said at least one functional layer, and dividing said at least one functional layer in a plurality of partial layers.

71. The process for producing a coated object as claimed in claim 70, wherein said CVD or PVD process is a reactive CVD process, selected from the group group consisting of, plasma impulse chemical vapor deposition, plasma-enhanced chemical vapor deposition, plasma-assisted chemical vapor deposition, thermal chemical vapor deposition.

72. The process for producing a coated object as claimed in claim 71, wherein said coating is applied discontinuously in the form of pulse cycles so that the thickness of a respective functional layer and interlayer is set by the number of cycles.

73. The process for producing a coated object as claimed in claim 71, wherein said at least one functional layer and said at least one interlayer are applied so that a lowest layer thickness is 0.1 to 0.3 nm.

74. The process for producing a coated object as claimed in claim 70, wherein said CVD or PVD process is a reactive PVD process.

75. The process for producing a coated object as claimed in claim 70, wherein said CVD or PVD process is a reactive ion beam-assisted PVD process.