Method and apparatus for monitoring and verifying equipment status
First Claim
1. An equipment status monitoring system, said equipment status monitoring system comprising:
- at least one multi-modal resonator, a power source coupled to said at least one multi-modal resonator, said power source being configured to produce an excitation signal corresponding to at least one mode of said multi-modal resonator;
a detector coupled to said at least one multi-modal resonator, said detector being configured to measure said excitation signal; and
a control system connected to said detector and configured to provide a comparison of at least one measured excitation signal with a normal excitation signal corresponding to a normal status, wherein said comparison determines an equipment status.
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Abstract
An equipment status monitoring system and method of operating thereof. The equipment status monitoring system includes first and second microwave mirrors in a plasma processing chamber (20) each forming a multi-modal resonator (35). A power source (60) is coupled to the first mirror (40) and configured to produce an excitation signal. A detector (70) is coupled to at least one of the first mirror (40) and the second mirror (50) and configured to measure an excitation signal. A control system (80) is connected to the detector (70) that compares a measured excitation signal to a normal excitation signal in order to determine a status of the material processing equipment (10).
13 Citations
31 Claims
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1. An equipment status monitoring system, said equipment status monitoring system comprising:
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at least one multi-modal resonator, a power source coupled to said at least one multi-modal resonator, said power source being configured to produce an excitation signal corresponding to at least one mode of said multi-modal resonator;
a detector coupled to said at least one multi-modal resonator, said detector being configured to measure said excitation signal; and
a control system connected to said detector and configured to provide a comparison of at least one measured excitation signal with a normal excitation signal corresponding to a normal status, wherein said comparison determines an equipment status. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15)
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16. A method of monitoring a status of a material processing system, said material processing system including a chamber, at least one multi-modal resonator positioned in relation to said chamber, a power source coupled to said multi-modal resonator, and a detector coupled to said multi-modal resonator, said method comprising the steps of:
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sweeping an output frequency of said power source to produce said excitation signal;
recording said excitation signal from said multi-mode resonator;
comparing said excitation signal with a normal excitation signal, wherein said normal excitation signal corresponds to a normal status of said material processing system; and
determining said status of said material processing system from said comparing. - View Dependent Claims (17, 18, 19, 20, 21, 22, 23, 24, 25, 26, 27, 28, 29, 30, 31)
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Specification