Corrosion-resistant copper bond pad and integrated device
First Claim
1. An integrated device with a corrosion-resistant capped copper bond pad, comprising:
- at least one copper bond pad on a semiconductor substrate;
an activation layer comprising one of immersion palladium, electroless cobalt, or immersion ruthenium disposed on the copper bond pad;
a first intermediate layer of electroless nickel-boron alloy disposed on the activation layer;
a second intermediate layer comprising one of electroless nickel or electroless palladium disposed on the first intermediate layer; and
an immersion gold layer disposed on the second intermediate layer.
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Accused Products
Abstract
The invention provides an integrated device with corrosion-resistant capped copper bond pads. The capped copper bond pads include at least one copper bond pad on a semiconductor substrate. An activation layer comprising one of immersion palladium, electroless cobalt, or immersion ruthernium is disposed on the copper bond pad. A first intermediate layer of electroless nickel-boron alloy is disposed on the activation layer. A second intermediate layer comprising one of electroless nickel or electroless palladium is disposed on the first intermediate layer, and an immersion gold layer is disposed on the second intermediate layer. A capped copper bond pad and a method of forming the capped copper bond pads are also disclosed.
70 Citations
33 Claims
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1. An integrated device with a corrosion-resistant capped copper bond pad, comprising:
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at least one copper bond pad on a semiconductor substrate;
an activation layer comprising one of immersion palladium, electroless cobalt, or immersion ruthenium disposed on the copper bond pad;
a first intermediate layer of electroless nickel-boron alloy disposed on the activation layer;
a second intermediate layer comprising one of electroless nickel or electroless palladium disposed on the first intermediate layer; and
an immersion gold layer disposed on the second intermediate layer. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12)
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13. A method of forming a corrosion-resistant capped copper bond pad, comprising:
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providing a plurality of copper bond pads on a semiconductor substrate;
plating an activation layer with one of immersion palladium, electroless cobalt, or immersion ruthenium on the copper bond pads;
plating a first intermediate layer with electroless nickel-boron alloy on the activation layer;
plating a second intermediate layer with one of electroless nickel or electroless palladium on the first intermediate layer; and
plating an immersion gold layer on the second intermediate layer. - View Dependent Claims (14, 15, 16, 17, 18, 19, 20, 21, 22, 23)
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24. A semiconductor wafer with a plurality of corrosion-resistant capped copper bond pads, comprising:
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a plurality of copper bond pads on a surface of the semiconductor wafer;
an activation layer comprising one of immersion palladium, electroless cobalt, or immersion ruthenium disposed on the copper bond pads;
a first intermediate layer of electroless nickel-boron alloy disposed on the activation layer;
a second intermediate layer comprising one of electroless nickel or electroless palladium disposed on the first intermediate layer; and
an immersion gold layer disposed on the second intermediate layer. - View Dependent Claims (25, 26, 27, 28, 29)
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30. A capped copper bond pad for a corrosion-resistant integrated device, comprising:
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an activation layer comprising one of immersion palladium, electroless cobalt, or immersion ruthenium disposed on at least one copper bond pad;
a first intermediate layer of electroless nickel-boron alloy disposed on the activation layer;
a second intermediate layer comprising one of electroless nickel or electroless palladium disposed on the first intermediate layer; and
an immersion gold layer disposed on the second intermediate layer. - View Dependent Claims (31, 32, 33)
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Specification