Cylindrical AC/DC magnetron with compliant drive system and improved electrical and thermal isolation

• US 20050006233A1
• Filed: 05/07/2004
• Published: 01/13/2005
• Est. Priority Date: 01/18/2002
• Status: Abandoned Application

• Current Assignee: Richard L. Barrett
• Original Assignee: Richard L. Barrett
• Inventors: Barrett, Richard L.
• Application Number:
  US10/840,993
• Publication Number:
  US 20050006233A1
• Time in Patent Office: Days
• US Class Current: 204/298.230
• CPC Class Codes: H01J 37/3405 Magnetron sputtering
• CPC Class Codes: H01J 37/3435 Target holders (includes backing plates and endblocks)

Abstract

An AC/DC cylindrical magnetron with a drive system that absorbs large ons in the rotation of the target tube, an efficient high capacity electrical transfer and improved electrical isolation.

Claims

1. A cylindrical magnetron comprising:

a target tube;

a first endblock comprising;

a motor;

a gearbox; and

a drive assembly between the gearbox and the target tube with one or more axially compliant interfaces between gears of the drive assembly such that the assembly accommodates imperfect rotation of the target tube.

2. The magnetron of claim 1 further comprising:

a second endblock comprising;

an inner housing comprising;

a water cooled spindle

an electrical transfer system including brush blocks contacting the surface of the spindle.

an outer housing;

compliant seal rings between the inner and outer housing whereby the inner housing can move within the outer housing to absorb imperfect rotation of the target tube.

3. The magnetron of claim 1 further comprising:

an inner housing within the first endblock, the gearbox and drive assembly within the inner housing;

an outer housing; and

compliant seal rings between the inner and outer housing whereby the inner housing can move within the outer housing to absorb imperfect rotation of the target tube.

4. The magnetron of claim 3 wherein the imperfect rotation of the target tube includes eccentric rotation about the axis of rotation of the target tube or movement of the target tube along the axis of rotation.

5. The magnetron of claim 1 wherein the drive assembly comprises first, second and third gears, the rotating motion from the gearbox transferred from the gearbox to the first gear, the rotating motion from the first gear transferred to the second gear, and the rotating motion from the second gear transferred to the third gear.

6. The magnetron of claim 5 wherein the second gear is located between the first and third gear and is electrically insulating.

7. The magnetron of claim 5 wherein an axially compliant interface of the one or more axially compliant interfaces is between the first and second gear.

8. The magnetron of claim 5 wherein an axially compliant interface of the one or more axially compliant interfaces is between the second and third gear.

9. The magnetron of claim 5 wherein the third gear is coupled to the target tube.

10. The magnetron of claim 5 wherein the first gear has one or more slots, and wherein one or more protrusions of the gearbox rotate freely within the slots until encountering the end of the slot and thereafter rotate the entire third component.

11. The magnetron of claim 10 wherein the one or more protrusions are aligned nywhere within the one or more slots during assembly of the magnetron.

12. A sputtering device having a rotating target tube suspended between first and second endblocks, the first endblock having a suspension and drive system comprising:

a primary housing;

a secondary housing held within the primary housing by insulative and pliable components such that the secondary housing can move within the primary housing, the secondary housing comprising a system of interlocking male and female components rotating about an axis and coupling the gearbox to the target tube.

13. The sputtering device of claim 12 wherein the first endblock further comprises a gearbox held within the primary housing by insulative and pliable components such that the gearbox can move within the primary housing.

14. The sputtering device of claim 12 wherein the interlocking male and female male and female components are free to move with six degrees of freedom about the axis of rotation.

15. A device for plasma coating a substrate having a target tube that rotates about an axis of rotation, the device comprising:

a motor;

a gearbox;

a driveline linking the gearbox and the target tube, the driveline able to pivot

about the axis of rotation.

16. The device of claim 15 wherein the driveline comprises one or more male and one or more female interconnecting components

17. The device of claim 16 wherein one of the male or female interconnecting components is made of an insulating material thereby insulating the motor and gearbox from the target tube.

18. The device of claim 15 wherein the driveline is further able to move along the axis of rotation to absorb imperfect rotation of the target tube.

19. The sputtering device of claim 15 further comprising a rotating shaft that transfers power to the target tube.

20. The sputtering device of claim of claim 19 further comprising one or more brush blocks that transfer power to the rotating shaft.

21-59. -59. (Cancelled)