Multiple internal seal ring micro-electro-mechanical system vacuum package

  • US 20050017329A1
  • Filed: 06/10/2004
  • Published: 01/27/2005
  • Est. Priority Date: 06/10/2003
  • Status: Active Grant
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First Claim
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1. A device package, comprising:

  • a capping plate including at least one periphery seal ring and at least one internal seal ring bonded to a base plate including at least one periphery seal ring and at least one internal seal ring;

    wherein the periphery seal rings of the capping plate and base plate create a metal-to-metal seal surrounding the periphery of the package when the capping plate and base plate are bonded together, the internal seal rings of the capping plate electrically connect to a plurality of via holes extending through to an external surface of the capping plate, the internal seal rings of the base plate provide an independent electrical path from a cavity in the capping plate outward towards a periphery of the base plate, and the internal seal rings of the capping plate and base plate create a metal-to-metal seal within the periphery of the package when the base plate and the capping plate are bonded together.

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