Multiple internal seal ring micro-electro-mechanical system vacuum package
First Claim
1. A device package, comprising:
- a capping plate including at least one periphery seal ring and at least one internal seal ring bonded to a base plate including at least one periphery seal ring and at least one internal seal ring;
wherein the periphery seal rings of the capping plate and base plate create a metal-to-metal seal surrounding the periphery of the package when the capping plate and base plate are bonded together, the internal seal rings of the capping plate electrically connect to a plurality of via holes extending through to an external surface of the capping plate, the internal seal rings of the base plate provide an independent electrical path from a cavity in the capping plate outward towards a periphery of the base plate, and the internal seal rings of the capping plate and base plate create a metal-to-metal seal within the periphery of the package when the base plate and the capping plate are bonded together.
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Accused Products
Abstract
A Multiple Internal Seal Ring (MISR) Micro-Electro-Mechanical System (MEMS) vacuum package that hermetically seals MEMS devices using MISR. The method bonds a capping plate having metal seal rings to a base plate having metal seal rings by wafer bonding the capping plate wafer to the base plate wafer. Bulk electrodes may be used to provide conductive paths between the seal rings on the base plate and the capping plate. All seals are made using only metal-to-metal seal rings deposited on the polished surfaces of the base plate and capping plate wafers. However, multiple electrical feed-through metal traces are provided by fabricating via holes through the capping plate for electrical connection from the outside of the package through the via-holes to the inside of the package. Each metal seal ring serves the dual purposes of hermetic sealing and providing the electrical feed-through metal trace.
55 Citations
30 Claims
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1. A device package, comprising:
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a capping plate including at least one periphery seal ring and at least one internal seal ring bonded to a base plate including at least one periphery seal ring and at least one internal seal ring;
wherein the periphery seal rings of the capping plate and base plate create a metal-to-metal seal surrounding the periphery of the package when the capping plate and base plate are bonded together, the internal seal rings of the capping plate electrically connect to a plurality of via holes extending through to an external surface of the capping plate, the internal seal rings of the base plate provide an independent electrical path from a cavity in the capping plate outward towards a periphery of the base plate, and the internal seal rings of the capping plate and base plate create a metal-to-metal seal within the periphery of the package when the base plate and the capping plate are bonded together. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11)
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12. A method of fabricating a device package, comprising:
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(a) metal patterning of at least one seal ring on a base plate;
(b) etching of via holes in a capping plate;
(c) metal patterning of at least one seal ring on a bottom surface of the capping plate;
(d) aligning of the base plate and capping plate;
(e) bonding of the base plate and capping plate;
(f) electro-less plating of a thin metal layer on a top surface of the capping plate, including inside the via holes;
(g) electroplating of a thicker metal layer on top of the thin metal layer; and
(h) masking and etching of electrical trace patterns on the top surface of the capping plate. - View Dependent Claims (13, 14, 15, 16, 17, 18)
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19. A method of fabricating a device package, comprising:
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(a) metal patterning of at least one seal ring on a base plate;
(b) aligning of the base plate and a resonator plate;
(c) bonding of the base plate and resonator plate using heat and pressure in an evacuated chamber;
(d) etching of bulk electrodes on the resonator plate, wherein the doped silicon or a metalization of the resonator plate provides a conductive path for the electrodes;
(e) etching of at least one via hole in a capping plate;
(f) metal patterning of at least one seal ring on a bottom surface of the capping plate;
(g) aligning of the resonator plate and capping plate, and more specifically, the aligning of the bulk electrodes of the resonator plate with the seal rings of the capping plate;
(h) bonding of the of the resonator plate and capping plate using heat and pressure in an evacuated chamber. (i) electro-less plating of a thin metal layer on a top surface of the capping plate including inside the via holes;
(j) electroplating of a thicker metal layer on the thin metal layer;
(k) masking and etching of an electrical trace pattern on the top surface of the capping plate. - View Dependent Claims (20, 21, 22, 23, 24, 25, 26, 27, 28, 29, 30)
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Specification