System and method for acquiring semiconductor process status information

• US 20050021166A1
• Filed: 07/21/2003
• Published: 01/27/2005
• Est. Priority Date: 07/21/2003
• Status: Active Grant

• Current Assignee: Taiwan Semiconductor Manufacturing Company Limited
• Original Assignee: Taiwan Semiconductor Manufacturing Company Limited
• Inventors: Lee, Yuk-Tong, Lin, Chun-Ching
• Granted Patent: US 7,206,655 B2
• Time in Patent Office: Days
• US Class Current: 700/121
• CPC Class Codes: G05B 19/4186 by protocol, e.g. MAP, TOP
• CPC Class Codes: G05B 2219/33184 Rs232c to rs485 converter
• CPC Class Codes: Y02P 90/02 Total factory control, e.g. smart factories, flexible manufacturing systems [FMS] or integrated manufacturing systems [IMS]

Abstract

A system for acquiring semiconductor process status information. An equipment server outputs a start command according to a HSMS protocol to a computer system server, which converts the start command from the HSMS protocol to a RS232 protocol and outputs the converted command to a protocol converter. The protocol converter converts the start command from the RS232 protocol to a RS485 protocol and outputs the converted command to an AD/DA module. The AD/DA module converts the start command from the RS485 command to an analog signal and outputs the converted command to an external sensor, which acquires semiconductor equipment status information as initiated by the start command. The acquired status information is then sent on a reverse path to the start command, undergoing successive conversion and output until reaching the equipment server.

Claims

1. A system for acquiring semiconductor process status information, comprising:

an equipment server for sending a start command according to a first protocol;

a computer system server connected to the equipment server for converting the start command from the first protocol to a second protocol and outputting the converted start command;

a protocol converter connected to the computer system server for converting the start command from the second protocol to a third protocol and outputting the converted command according to the third protocol;

an AD/DA module connected to the protocol converter for converting the start command from the third protocol to an analog signal and outputting the converted command;

an external sensor connected to the AD/DA module for acquiring semiconductor equipment status information as initiated by the start command;

wherein the AD/DA module converts the semiconductor process status information from the analog signal to the third protocol and outputs the converted information to the protocol converter;

the protocol converter converts the semiconductor process status information from the third protocol to the second protocol and outputs the converted information to the computer system server; and

the computer system server outputs the converted information to the equipment server.

2. The system as claimed in claim 1, wherein the status information comprises temperature, pressure, flow rate, consistency, rotational speed, voltage value, or electric current value.

3. The system as claimed in claim 1, wherein standard voltage value input of the semiconductor process status information are ±

15 mV, ±

50 mV, ±

100 mV, ±

150 mV, ±

500 mV, ±

1V, ±

2.5V, ±

5V or ±

10V.

4. The system, as claimed in claim 1, wherein standard current input of the semiconductor equipment status information is 0˜

20 mA or ±

4˜

20 mA.

5. The system as claimed in claim 1, wherein standard direct sensor input of the semiconductor equipment status information is thermocouple (J, K, T, E, R, S, B type) or RTD (Pt, Ni, Balco).

6. The system as claimed in claim 1, wherein standard digital input of the semiconductor equipment status information is high or low (0/1).

7. A system for acquiring semiconductor process status information, comprising:

an equipment server for outputting a start command according to a HSMS protocol;

a computer system server connected to the equipment server for converting the start command from the HSMS protocol to a RS232 protocol and outputting the converted command;

a protocol converter connected to the computer system server for converting the start command from the RS232 protocol to a RS485 protocol and outputting the converted command;

an AD/DA module connected to the protocol converter for converting the start command from the RS485 command to an analog signal and outputting the converted command;

an external sensor connected to the AD/DA module for acquiring semiconductor equipment status information as initiated by the start command;

wherein the AD/DA module converts the semiconductor process status information from the analog signal to the RS485 protocol and outputs the converted information to the protocol converter;

the protocol converter converts the semiconductor process status information from the RS485 protocol to the RS232 protocol and outputs the converted information to the computer system server; and

the computer system server outputs the semiconductor process status information to the equipment server.

8. The system as claimed in claim 7, wherein the status information comprises temperature, pressure, flow rate, consistency, rotational speed, voltage value, or electric current value.

9. The system as claimed in claim 7, wherein standard voltage value input of the status information is ±

15 mV, ±

50 mV, ±

100 mV, ±

150 mV, ±

500 mV, ±

1V, ±

2.5V, ±

5V or ±

10V.

10. The system, as claimed in claim 7, wherein standard current input of the semiconductor equipment status information is ±

0˜

20 mA or ±

4˜

20 mA.

11. The system as claimed in claim 7, wherein standard direct sensor input of the semiconductor equipment status information is thermocouple (J, K, T, E, R, S, B type) or RTD (Pt, Ni, Balco).

12. The system as claimed in claim 7, wherein standard digital input of the semiconductor equipment status information is high or low (0/1).

13. A method for acquiring semiconductor process status information, comprising the steps of:

a tool application program outputting a start command according to a first protocol;

converting the start command from the first protocol to a second protocol and outputting the converted start command;

converting the start command from the second protocol to a third protocol and outputting the converted command according to the third protocol;

converting the start command from the third protocol to an analog signal and outputting the converted command;

activation of an external sensor by the start command;

acquiring semiconductor equipment status information from the external sensor;

converting the semiconductor process status information to the third protocol and outputting the converted information according to the third protocol;

converting the semiconductor process status information from the third protocol to the second protocol and outputting the converted information according to the second protocol;

converting the semiconductor process status information from the second protocol to the first protocol; and

outputting the semiconductor process status information to an equipment server according to the first server.

14. The method as claimed in claim 13, wherein the first protocol is HSMS protocol, the second protocol is RS232 protocol and the third protocol is RS485 protocol.

15. The method as claimed in claim 13, wherein the status information comprises temperature, pressure, flow rate, consistency, rotational speed, voltage value, or electric current value.

16. The method as claimed in claim 13, wherein standard voltage value input of the status information is ±

15 mV, ±

50 mV, ±

100 mV, ±

150 mV, ±

500 mV, ±

1V, ±

2.5V, ±

5V or ±

10V.

17. The method, as claimed in claim 13, wherein standard current input of the semiconductor equipment status information is ±

0˜

20 mA or ±

4˜

20 mA.

18. The method as claimed in claim 13, wherein standard direct sensor input of the semiconductor equipment status information is thermocouple (J, K, T, E, R, S, B type) or RTD (Pt, Ni, Balco).

19. The method as claimed in claim 13, wherein standard digital input of the semiconductor equipment status information is high or low (0/1).