Method of effecting heating and cooling in reduced pressure atmosphere

  • US 20050029243A1
  • Filed: 08/06/2004
  • Published: 02/10/2005
  • Est. Priority Date: 08/07/2003
  • Status: Active Grant
First Claim
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1. A heating/cooling method comprising the steps of:

  • heating a plate-like member placed in a reduced pressure atmosphere in a chamber by heating means opposed to the plate-like member; and

    cooling the plate-like member by a cooling plate which is opposed to the plate-like member, with the heating means therebetween, the cooling plate having a heat reflecting function, wherein the cooling plate has a emissivity of not less than 0.50 but not more than 0.80.

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