Liquid crystal process defect inspection apparatus and inspection method

  • US 20050041243A1
  • Filed: 04/22/2002
  • Published: 02/24/2005
  • Est. Priority Date: 10/25/2001
  • Status: Active Grant
First Claim
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1. A glass substrate test apparatus in an LCD-manufacturing line comprising:

  • a laser unit generating and emitting a laser beam;

    a beam slitter for slitting the laser beam from the laser unit and a parallel beam slitter for parallelizing the laser beam from the beam slitter;

    a photo detector for measuring double refraction intensity of a whole surface of a glass substrate using a slit laser beam from the parallel beam slitter;

    a phase detector for comparing a laser double refraction measured by the photo detector with a standard laser double refraction; and

    a polarizer arranged between the laser unit and the beam slitter or between the beam slitter and the parallel beam slitter for polarizing the laser beam.

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