Liquid crystal process defect inspection apparatus and inspection method

  • US 20050041243A1
  • Filed: 04/22/2002
  • Published: 02/24/2005
  • Est. Priority Date: 10/25/2001
  • Status: Active Grant
First Claim
Patent Images

1. A glass substrate test apparatus in an LCD-manufacturing line comprising:

  • a laser unit generating and emitting a laser beam;

    a beam slitter for slitting the laser beam from the laser unit and a parallel beam slitter for parallelizing the laser beam from the beam slitter;

    a photo detector for measuring double refraction intensity of a whole surface of a glass substrate using a slit laser beam from the parallel beam slitter;

    a phase detector for comparing a laser double refraction measured by the photo detector with a standard laser double refraction; and

    a polarizer arranged between the laser unit and the beam slitter or between the beam slitter and the parallel beam slitter for polarizing the laser beam.

View all claims

    Thank you for your feedback