Method for interaction with status and control apparatus
First Claim
1. An Advanced Process Control (APC) System, for managing a semiconductor processing system, comprising Graphical User Interface (GUI) screens, the GUI screens comprising:
- web-based logon GUI screen for providing a secure entry point;
a plurality of GUI status screens for viewing current status of the semiconductor processing system, wherein at least one GUI status screen is accessible from the logon screen;
a plurality of GUI configuration screens for configuring the semiconductor processing system; and
a plurality of data manager GUI screens for managing historical and real-time data for the semiconductor processing system.
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Accused Products
Abstract
A GUI is presented for managing a semiconductor processing system that is comprehensible and standardized in format. The graphical display is organized so that all significant parameters are clearly and logically displayed so that the user is able to perform the desired data collection, monitoring, modeling, and troubleshooting tasks with as little input as possible. The GUI is web-based and is viewable by a user using a web browser. The GUI allows a user to display real-time tool and process module statuses based upon process module events and alarm messages, historical data numerically and/or graphically, SPC charts, APC system logs, and Alarm logs. In addition, the GUI allows a user to print graphs and reports, to save data to files, to export data, to import data, and set up or modify the system.
58 Citations
40 Claims
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1. An Advanced Process Control (APC) System, for managing a semiconductor processing system, comprising Graphical User Interface (GUI) screens, the GUI screens comprising:
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web-based logon GUI screen for providing a secure entry point;
a plurality of GUI status screens for viewing current status of the semiconductor processing system, wherein at least one GUI status screen is accessible from the logon screen;
a plurality of GUI configuration screens for configuring the semiconductor processing system; and
a plurality of data manager GUI screens for managing historical and real-time data for the semiconductor processing system. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22, 23, 24, 25, 26, 27, 28, 29, 30, 31, 32, 33)
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34. A method for managing a semiconductor processing system using an Advanced Process Control (APC) System comprising Graphical User Interface (GUI) screens, the method comprising:
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providing a secure entry point using a web-based logon screen;
providing a plurality of GUI status screens for viewing current status of the semiconductor processing system, wherein at least one GUI status screen is accessible from the logon screen;
providing a plurality of GUI configuration screens for configuring the semiconductor processing system; and
providing a plurality of data manager GUI screens for managing historical and real-time data for the semiconductor processing system. - View Dependent Claims (35, 36, 37, 38, 39, 40)
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Specification