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Method for interaction with status and control apparatus

  • US 20050047645A1
  • Filed: 09/28/2004
  • Published: 03/03/2005
  • Est. Priority Date: 03/29/2002
  • Status: Abandoned Application
First Claim
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1. An Advanced Process Control (APC) System, for managing a semiconductor processing system, comprising Graphical User Interface (GUI) screens, the GUI screens comprising:

  • web-based logon GUI screen for providing a secure entry point;

    a plurality of GUI status screens for viewing current status of the semiconductor processing system, wherein at least one GUI status screen is accessible from the logon screen;

    a plurality of GUI configuration screens for configuring the semiconductor processing system; and

    a plurality of data manager GUI screens for managing historical and real-time data for the semiconductor processing system.

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