System and method for using first-principles simulation to characterize a semiconductor manufacturing process
First Claim
1. A method of facilitating a process performed by a semiconductor processing tool, comprising:
- inputting data relating to a process performed by the semiconductor processing tool;
inputting a first principles physical model relating to the semiconductor processing tool;
performing first principles simulation using the input data and the physical model to provide a simulation result for the process performed by the semiconductor processing tool; and
using the simulation result as part of a data set that characterizes the process performed by the semiconductor processing tool.
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Abstract
A method, system and computer readable medium for facilitating a process performed by a semiconductor processing tool. The method includes inputting data relating to a process performed by the semiconductor processing tool, and inputting a first principles physical model relating to the semiconductor processing tool. First principles simulation is then performed using the input data and the physical model to provide a simulation result for the process performed by the semiconductor processing tool, and the simulation result is used as part of a data set that characterizes the process performed by the semiconductor processing tool.
94 Citations
48 Claims
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1. A method of facilitating a process performed by a semiconductor processing tool, comprising:
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inputting data relating to a process performed by the semiconductor processing tool;
inputting a first principles physical model relating to the semiconductor processing tool;
performing first principles simulation using the input data and the physical model to provide a simulation result for the process performed by the semiconductor processing tool; and
using the simulation result as part of a data set that characterizes the process performed by the semiconductor processing tool. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22)
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23. A system comprising:
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a semiconductor processing tool configured to perform a process;
an input device configured to input data relating to the process performed by the semiconductor processing tool; and
a first principles simulation processor configured to;
input a first principles physical model relating to the semiconductor processing tool, and perform first principles simulation using the input data and the physical model to provide a first principles simulation result for the process performed by the semiconductor processing tool, wherein the simulation result is used as part of a data set that characterizes the process performed by the semiconductor processing tool. - View Dependent Claims (24, 25, 26, 27, 28, 29, 30, 31, 32, 33, 34, 35, 36, 37, 38, 39, 40, 41, 42, 43, 44, 46, 47)
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45. A system for facilitating a process performed by a semiconductor processing tool, comprising:
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means for inputting data relating to a process performed by the semiconductor processing tool;
means for inputting a first principles physical model relating to the semiconductor processing tool;
means for performing first principles simulation using the input data and the physical model to provide a simulation result for the process performed by the semiconductor processing tool; and
means for using the simulation result as part of a data set that characterizes the process performed by the semiconductor processing tool.
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48. A computer readable medium containing program instructions for execution on a processor, which when executed by the computer system, cause the processor to perform the steps of:
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inputting data relating to a process performed by the semiconductor processing tool;
inputting a first principles physical model relating to the semiconductor processing tool;
performing first principles simulation using the input data and the physical model to provide a simulation result for the process performed by the semiconductor processing tool; and
using the simulation result as part of a data set that characterizes the process performed by the semiconductor processing tool.
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Specification