RF-actuated MEMS switching element
First Claim
1. An RF-actuated microelectromechanical systems (MEMS) switch module, comprising:
- an antenna for receiving an externally-generated RF control signal, and providing an antenna output signal representative thereof;
a circuit operatively connected to the antenna for receiving the antenna output signal and generating a trigger voltage; and
a MEMS switch configured to actuate in response to the trigger voltage.
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Accused Products
Abstract
An RF-actuated microelectromechanical systems (MEMS) switch for use with switchable RF structures such as antennas and reflectors is disclosed. An antenna within each MEMS switch module is coupled to a circuit that provides a trigger voltage based on an RF control signal received at the antenna. The trigger voltage output of the circuit is used as the control the MEMS switch. This allows arrays of MEMS switch modules to be actuated by remotely generated radio frequency signals thus alleviating the need for running metallic conductors or optical fibers to each MEMS switch. Frequency response characteristics, phasing, reflectivity, and directionality characteristics may be altered in real-time.
81 Citations
20 Claims
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1. An RF-actuated microelectromechanical systems (MEMS) switch module, comprising:
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an antenna for receiving an externally-generated RF control signal, and providing an antenna output signal representative thereof;
a circuit operatively connected to the antenna for receiving the antenna output signal and generating a trigger voltage; and
a MEMS switch configured to actuate in response to the trigger voltage. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 17)
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16. An RF-actuated microelectromechanical systems (MEMS) switch module, comprising:
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an antenna for receiving an externally-generated RF control signal, and providing an antenna output signal representative thereof;
a circuit operatively connected to the antenna for receiving the antenna output signal and generating a trigger voltage; and
a MEMS switch configured to actuate in response to the trigger voltage, so as to connect or disconnect a first reflective element to a second reflective element;
wherein the module and the first and second reflective elements form part of a metamaterial having reflective characteristics that can be altered by applying the RF control signal.
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18. A selectively changeable radio frequency (RF) element device, comprising:
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two RF elements having one or more operating frequencies; and
an RF-actuated MEMS switch module configured to receive an RF control signal different than the one or more operating frequencies, and to selectively connect the two RF elements in response to the RF control signal. - View Dependent Claims (19, 20)
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Specification