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RF-actuated MEMS switching element

  • US 20050107125A1
  • Filed: 12/09/2004
  • Published: 05/19/2005
  • Est. Priority Date: 05/02/2000
  • Status: Active Grant
First Claim
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1. An RF-actuated microelectromechanical systems (MEMS) switch module, comprising:

  • an antenna for receiving an externally-generated RF control signal, and providing an antenna output signal representative thereof;

    a circuit operatively connected to the antenna for receiving the antenna output signal and generating a trigger voltage; and

    a MEMS switch configured to actuate in response to the trigger voltage.

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