Piezoelectric element and method of manufacturing the same
First Claim
1. A piezoelectric element comprising:
- a multilayered structure in which a plurality of piezoelectric material layers and a plurality of internal electrode layers are alternately stacked, said plurality of internal electrode layers including a first group of internal electrode layers and a second group of internal electrode layers;
first insulating films formed by using an aerosol deposition method, for covering said first group of internal electrode layers at a first surface of said multilayered structure;
second insulating films formed by using the aerosol deposition method, for covering said second group of internal electrode layers at a second surface of said multilayered structure;
a first external electrode electrically connected to said second group of internal electrode layers and insulated from said first group of internal electrode layers by said first insulating films at the first surface of said multilayered structure; and
a second external electrode electrically connected to said first group of internal electrode layers and insulated from said second group of internal electrode layers by said second insulating films at the second surface of said multilayered structure.
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Accused Products
Abstract
An array of piezoelectric elements is easily manufactured by making insulating portions at side surfaces smaller. The piezoelectric element includes: a multilayered structure in which piezoelectric material layers and internal electrode layers are alternately stacked; first insulating films formed by using an AD method, for covering a first group of internal electrode layers at a first surface of the multilayered structure; second insulating films formed by using the AD method, for covering a second group of internal electrode layers at a second surface of the multilayered structure; a first external electrode connected to the second group of internal electrode layers and insulated from the first group of internal electrode layers at the first surface; and a second external electrode connected to the first group of internal electrode layers and insulated from the second group of internal electrode layers at the second surface.
8 Citations
10 Claims
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1. A piezoelectric element comprising:
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a multilayered structure in which a plurality of piezoelectric material layers and a plurality of internal electrode layers are alternately stacked, said plurality of internal electrode layers including a first group of internal electrode layers and a second group of internal electrode layers;
first insulating films formed by using an aerosol deposition method, for covering said first group of internal electrode layers at a first surface of said multilayered structure;
second insulating films formed by using the aerosol deposition method, for covering said second group of internal electrode layers at a second surface of said multilayered structure;
a first external electrode electrically connected to said second group of internal electrode layers and insulated from said first group of internal electrode layers by said first insulating films at the first surface of said multilayered structure; and
a second external electrode electrically connected to said first group of internal electrode layers and insulated from said second group of internal electrode layers by said second insulating films at the second surface of said multilayered structure. - View Dependent Claims (2, 3, 4)
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5. A method of manufacturing a piezoelectric element having a multilayered structure, said method comprising the steps of:
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(a) fabricating a multilayered structure in which a plurality of piezoelectric material layers and a plurality of internal electrode layers are alternately stacked, said plurality of internal electrode layers including a first group of internal electrode layers and a second group of internal electrode layers;
(b) forming first insulating films for covering said first group of internal electrode layers at a first surface of said multilayered structure by using an aerosol deposition method;
(c) forming second insulating films for covering said second group of internal electrode layers at a second surface of said multilayered structure by using the aerosol deposition method;
(d) forming a first external electrode electrically connected to said second group of internal electrode layers and insulated from said first group of internal electrode layers by said first insulating films at the first surface of said multilayered structure; and
(e) forming a second external electrode electrically connected to said first group of internal electrode layers and insulated from said second group of internal electrode layers by said second insulating films at the second surface of said multilayered structure. - View Dependent Claims (6, 7, 8, 9, 10)
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Specification