Exposure apparatus with laser device
First Claim
1. A laser apparatus comprising:
- a laser light generation section that includes a single wavelength oscillatory laser and which generates pulsed light having a single wavelength within a wavelength range ranging from about 1.51 μ
m to about 1.59 μ
m;
an optical amplification section that includes an optical fiber amplifier and is optically connected to the laser light generation section to amplify the pulsed light;
a wavelength conversion section that includes a nonlinear optical crystal and is optically connected to the optical amplification section to perform wavelength conversion of the amplified pulsed light into ultraviolet light; and
a suppressing section that suppresses expansion of a wavelength width of light originated in a nonlinear effect of an optical element between the single wavelength oscillatory laser and the wavelength conversion section.
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Abstract
A laser apparatus that includes a laser light generation section, an optical amplification section, a wavelength conversion section and a suppressing section is provided. The laser light generation section includes a single wavelength oscillatory laser and generates pulsed light having a single wavelength within a wavelength range ranging from about 1.51 to 1.59 μm. The optical amplification section includes an optical fiber amplifier and is optically connected to the laser light generation section to amplify the pulsed light. The wavelength conversion section includes a nonlinear optical crystal and is optically connected to the optical amplification section to perform wavelength conversion of the amplified pulsed light into ultraviolet light. The suppressing section suppresses expansion of a wavelength width of light originated in a nonlinear effect of an optical element between the single wavelength oscillatory laser and the wavelength conversion section.
26 Citations
38 Claims
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1. A laser apparatus comprising:
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a laser light generation section that includes a single wavelength oscillatory laser and which generates pulsed light having a single wavelength within a wavelength range ranging from about 1.51 μ
m to about 1.59 μ
m;
an optical amplification section that includes an optical fiber amplifier and is optically connected to the laser light generation section to amplify the pulsed light;
a wavelength conversion section that includes a nonlinear optical crystal and is optically connected to the optical amplification section to perform wavelength conversion of the amplified pulsed light into ultraviolet light; and
a suppressing section that suppresses expansion of a wavelength width of light originated in a nonlinear effect of an optical element between the single wavelength oscillatory laser and the wavelength conversion section. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22, 23, 24, 25, 26, 27, 28)
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29. A method for irradiating an object with ultraviolet light, comprising:
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generating pulsed light having a single wavelength within a wavelength range ranging from about 1.51 μ
m to about 1.59 μ
m from a laser light generation section including a single wavelength oscillatory laser;
amplifying the pulsed light a plurality of times by a plurality of optical fiber amplifiers;
performing wavelength conversion of the amplified pulsed light into ultraviolet light by a plurality of nonlinear optical crystals; and
suppressing expansion of a wavelength width of light originated in a nonlinear effect of an optical element between the single wavelength oscillatory laser and the plurality of the nonlinear optical crystals. - View Dependent Claims (30, 31, 32, 33, 34, 35, 36, 37, 38)
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Specification