Processing method and apparatus

• US 20050186887A1
• Filed: 03/31/2005
• Published: 08/25/2005
• Est. Priority Date: 03/31/2003
• Status: Active Grant

• Current Assignee: Fujitsu Limited
• Original Assignee: Fujitsu Limited
• Inventors: Nomura, Michinao, Sudo, Koji, Sone, Shunsuke, Yanagida, Yoshiaki
• Granted Patent: US 7,534,159 B2
• Time in Patent Office: Days
• US Class Current: 451/5
• CPC Class Codes: B24B 1/00 Processes of grinding or polishing; Use of auxiliary equipment in connection with such processes
• CPC Class Codes: B24B 13/00 Machines or devices designed for grinding or polishing optical surfaces on lenses or surfaces of similar shape on other work; Accessories therefor edging optical work, e.g. lenses, prisms B24B9/14
• CPC Class Codes: B24B 37/00 Lapping machines or devices; Accessories B24B3/00 takes precedence
• CPC Class Codes: B24B 37/30 for single side lapping of plane surfaces
• CPC Class Codes: B24B 49/02 according to the instantaneous size and required size of the workpiece acted upon, the measuring or gauging being continuous or intermittent B24B49/12 takes precedence

Abstract

A processing method includes the steps of elastically deforming a jig together with a work, the jig having been mounted on a work, compressing the work against a polishing surface, and moving the work and the polishing surface relative to each other.

Claims

1. A processing method comprising the steps of:

elastically deforming a jig together with a work, the jig having been mounted on a work;

compressing the work against a polishing surface; and

moving the work and the polishing surface relative to each other.

2. A processing method according to claim 1, wherein said elastically deforming step includes the step of controlling a load applied to the jig at a predetermined position for an elastic deformation, by assuming that there is a linear relationship between the load and a deformation amount of the work associated with the load.

3. A processing method according to claim 2, wherein the load controlling step includes the steps of:

calculating a necessary polishing amount distribution based on a difference between a current shape of the work and a target shape of the work;

calculating positional information of the work and a relative speed distribution between the work and the polishing surface; and

calculating the load based on the polishing amount distribution and the relative speed distribution.

4. A processing method according to claim 1, wherein said elastically deforming step includes the step of controlling a load applied to the jig at a predetermined position for an elastic deformation, by approximating with an arc a deformation amount of the work associated with the load.

5. A processing apparatus that polishes a work into a predetermined shape by compressing the work against a polishing surface, and by moving the work and the polishing surface relative to each other, said processing apparatus comprising an actuator that applies a load to a predetermined position of a jig that has been mounted on a work, and elastically deforms the jig together with the work.

6. A processing apparatus according to claim 5, further comprising a controller that controls a load applied to the jig at a predetermined position for an elastic deformation, by assuming that there is a linear relationship between the load and a deformation amount of the work associated with the load.

7. A processing apparatus according to claim 6, further comprising a measuring part that measures a current shape of the work,

wherein said controller includes:

a first polishing amount operating unit that calculates a necessary polishing amount distribution based on a difference between a current shape of the work and a target shape of the work;

a second operating unit that calculates a relative speed distribution based on positional information of the work and a rotating speed of the polishing speed;

a third operating unit that calculates a contact pressure distribution of the work against the polishing surface based on the necessary polishing amount distribution and the relative speed distribution; and

a fourth operating unit that calculates the load necessary for the contact pressure distribution.

8. A processing apparatus according to claim 5, further comprising a controller that controls a load applied to the jig at a predetermined position for an elastic deformation, by approximating with an arc a deformation amount of the work associated with the load.

9. A processing apparatus according to claim 8, further comprising a measuring part that measures a current shape of the work,

wherein said controller includes:

a first polishing amount operating unit that calculates a necessary polishing amount distribution based on a difference between a current shape of the work and a target shape of the work;

a second operating unit that calculates a relative speed distribution based on positional information of the work and a rotating speed of the polishing speed;

a third operating unit that calculates a contact pressure distribution of the work against the polishing surface based on the necessary polishing amount distribution and the relative speed distribution; and

a fourth operating unit that calculates the load necessary for the contact pressure distribution.

10. A jig used for a processing apparatus that polishes a work into a predetermined shape by compressing a work against the polishing surface, and by moving the work and the polishing surface relative to each other, said jig comprising:

a guide mechanism that provides an elastic deformation with the work; and

a load applied portion to which the processing apparatus applies a load for an elastic deformation.

11. A jig used for a processing apparatus that polishes a work into a predetermined shape by compressing a work against the polishing surface, and by moving the work and the polishing surface relative to each other, said jig comprising:

a mounting part that mounts the work and forms an arbitrarily curved surface;

a rotating lever part that rotates around a rotating center when an external load is applied, and elastically deforms said mounting part; and

a fixing part that does not deform even when the external load is applied to said rotating lever.

13. A processing apparatus according to claim 11, further comprising:

a processing head that mounts the jig and has the actuator;

a processing base that supports said processing head; and

a positioning mechanism for positioning the work on the polishing surface,

wherein the positioning mechanism includes;

plural shafts provided to one of said processing head and said processing base, and

a linear bush, provided to the other of said processing head and said processing base, which allows a movement along a longitudinal direction of the shaft.

14. A processing apparatus according to claim 13, further comprising a measuring system that measures a processing amount of the work,

wherein said measuring system includes:

a measuring part that measures a processing amount of an object to be measured, which is provided on the processing head; and

a reference measuring part that outputs a reference value to be compared with a measurement result measured by the measuring part.

15. A processing apparatus according to claim 11, further comprising:

a processing head that mounts the jig and has the actuator;

a processing base that supports said processing head; and

a positioning mechanism for positioning the work on the polishing surface,

wherein the positioning mechanism includes a pivot provided to one of said processing head and said processing base, and the other of said processing head and said processing base contacts the pivot at one point.

16. A processing apparatus according to claim 15, further comprising a measuring system that measures a processing amount of the work,

wherein said measuring system includes:

a measuring part that measures a processing amount of an object to be measured, which is provided on the processing head; and

a reference measuring part that outputs a reference value to be compared with a measurement result measured by the measuring part.

12. A processing apparatus that polishes a work into a predetermined shape by compressing the work against a polishing surface, and by moving the work and the polishing surface relative to each other, said processing apparatus comprising an actuator that applies a load to a predetermined position of a jig that has been mounted on a work, and elastically deforms the jig together with the work,

wherein the jig includes:

a mounting part that mounts the work and forms an arbitrarily curved surface;

a rotating lever part that rotates around a rotating center when an external load is applied, and elastically deforms said mounting part; and

a fixing part that does not deform even when the external load is applied to said rotating lever.