Processing method and apparatus

  • US 20050186887A1
  • Filed: 03/31/2005
  • Published: 08/25/2005
  • Est. Priority Date: 03/31/2003
  • Status: Active Grant
First Claim
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1. A processing method comprising the steps of:

  • elastically deforming a jig together with a work, the jig having been mounted on a work;

    compressing the work against a polishing surface; and

    moving the work and the polishing surface relative to each other.

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