Capacitor with conducting nanostructure
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Abstract
The present invention discloses a method including providing a substrate; forming a lower conductor over the substrate; forming a conducting nanostructure over the lower conductor; forming a thin dielectric over the conducting nanostructure; and forming an upper conductor over the thin dielectric. The present invention further discloses a device including a substrate; a lower conductor located over the substrate; a conducting nanostructure located over the lower conductor; a thin dielectric located over the conducting nanostructure; and an upper conductor located over the thin dielectric.
32 Citations
13 Claims
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1-6. -6. (canceled)
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7. A device comprising:
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a substrate;
a lower insulator disposed over said substrate;
a lower conductor disposed over said lower insulator;
a conducting nanostructure disposed over said lower conductor, said conducting nanostructure being discontinuous;
a thin dielectric disposed over said conducting nanostructure, said thin dielectric being conformal over said conducting nanostructure and said lower conductor;
an upper conductor disposed over said thin dielectric; and
an upper insulator disposed over said upper conductor. - View Dependent Claims (8, 9, 10, 11, 12)
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13-21. -21. (canceled)
Specification