Cleaning method and solution for cleaning a wafer in a single wafer process
First Claim
Patent Images
1. A cleaning solution formed from a mixture comprising:
- NH4OH;
H2O2;
H2O;
a chelating agent; and
a surfactant.
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Abstract
The present invention is a novel cleaning method and a solution for use in a single wafer cleaning process. According to the present invention the cleaning solution comprises ammonium hydroxide (NH4OH), hydrogen peroxide (H2O2), water (H2O) and a chelating agent. In an embodiment of the present invention the cleaning solution also contains a surfactant. And still yet another embodiment of the present invention the cleaning solution also comprises a dissolved gas such as H2. In a particular embodiment of the present invention, this solution is used by spraying or dispensing it on a spinning wafer.
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Citations
19 Claims
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1. A cleaning solution formed from a mixture comprising:
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NH4OH;
H2O2;
H2O;
a chelating agent; and
a surfactant.
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2. The cleaning solution of claim 24 wherein said NH4OH, H2O2, and H2O have a mixing ratio of between 5/1/1 and 1000/1/1.
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3. The cleaning solution of claim 24 wherein said NH4OH is from a solution of between 28-29% w/w of NH3 to water.
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4. The cleaning solution of claim 24 wherein said H2O2 is from a solution of between 31-32% w/w of H2O2 to water.
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5. The cleaning solution of claim 24 wherein said chelating agent has an equilibrium constant (K) greater than 1015 for aluminum.
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6. The cleaning solution of claim 24 wherein said chelating agent has an equilibrium constant (K) greater than 1020 for aluminum.
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7. The cleaning solution of claim 24 wherein said chelating agent is chosen from the group N,N′
- -Bis(2-hydroxyphenyl)ethylenediiminodiacetic acid (HPED), triethylenetetranitrilohexaacettic acid (TTHA), desferriferrioxamin B, N,N′
,N″
-Tris[2-(N-hydroxycarbomyl)ethyl]-1,3,5-benzenetricarboxamide (BAMTH), molybdic acid.
- -Bis(2-hydroxyphenyl)ethylenediiminodiacetic acid (HPED), triethylenetetranitrilohexaacettic acid (TTHA), desferriferrioxamin B, N,N′
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8. The cleaning solution of claim 24 wherein said chelating agent has a concentration in said solution between 0.001 mg/l and 300 mg/l.
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9. The cleaning solution of claim 24 wherein said chelating agent has a concentration in said solution of between 0.01 mg/l and 3 mg/l.
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10. The cleaning solution of claim 24 wherein said chelating agent has a concentration in said solution of between 1-400 ppm.
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11. The cleaning solution of claim 24 wherein said surfactant is non-ionic.
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12. The cleaning solution of claim 24 wherein said surfactant is anionic.
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13. The cleaning solution of claim 35 wherein said surfactant is MCX-SD2000 manufactured by Mitsubishi Corporation.
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14. The cleaning solution of claim 36 wherein said MCX-SD2000 is 0.05% of said solution.
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15. A cleaning solution comprising:
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NH4OH; and
N,N′
-Bis(2-hydroxyphenyl)ethylenediiminodiacetic acid (HPED).
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16. A cleaning solution comprising:
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NH4OH; and
triethylenetetranitrilohexaacettic acid (TTHA).
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17. A cleaning solution comprising:
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NH4OH; and
desferriferrioxamin B.
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18. A cleaning solution comprising:
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NH4OH; and
N,N′
,N″
-Tris [2-(N-hydroxycarbomyl)ethyl]-1,3,5-benzenetricarboxamide (BAMTH).
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19. A cleaning solution comprising:
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NH4OH; and
molybdic acid.
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Specification