Large field of view 2X magnification projection optical system for FPD manufacture

• US 20050237505A1
• Filed: 08/19/2004
• Published: 10/27/2005
• Est. Priority Date: 06/30/2003
• Status: Active Grant

• Current Assignee: ASML Holding NV
• Original Assignee: ASML Holding NV
• Inventors: Gui, Cheng-Qun, Harned, Robert D., de Jager, Patrick, Sakin, Lev, Harned, Noreen, Pozhinskaya, Irina
• Granted Patent: US 7,405,802 B2
• Time in Patent Office: Days
• US Class Current: 355/55
• CPC Class Codes: G02B 17/061 on-axis systems with at least one of the mirrors having a central aperture
• CPC Class Codes: G03B 27/52 Details
• CPC Class Codes: G03F 7/70233 Optical aspects of catoptric systems, i.e. comprising only reflective elements, e.g. extreme ultraviolet [EUV] projection systems
• CPC Class Codes: G03F 7/70308 Optical correction elements, filters or phase plates for manipulating imaging light, e.g. intensity, wavelength, polarisation, phase or image shift
• CPC Class Codes: G03F 7/706 Aberration measurement
• CPC Class Codes: G03F 7/70791 Large workpieces, e.g. glass substrates for flat panel displays or solar panels

Abstract

An exposure system for manufacturing flat panel displays (FPDs) includes a reticle stage and a substrate stage. A magnification ringfield reflective optical system images the reticle onto the substrate. The system may be a 2× magnification system, or another magnification that is compatible with currently available mask sizes. By writing reticles with circuit pattern dimensions that are one-half the desired size for an FPD, a 2× optical system can be used to expose FPDs. The designs for the 1.5× and larger magnification optical systems all typically have at least three powered mirrors. A corrector, positioned either near the reticle or near the substrate, can be added to the three mirror design to improve the systems optical performance. The corrector may be a reflective, or a refractive design. The corrector can have an aspheric surface, and optionally a powered surface. The corrector may be a flat glass plate, or a lens having concave-convex, concave-concave or convex-convex surfaces.

Claims

1. An exposure system for manufacturing flat panel displays (FPDS) comprising:

a reticle stage adapted to hold a reticle;

a substrate stage adapted to hold a substrate;

a magnification ringfield reflective optical system that images the reticle onto the substrate, the reflective optical system comprising four powered mirrors; and

a corrector near one of the reticle and the substrate.

2. The exposure system of claim 1, wherein the corrector comprises a refractive corrector.

3. The exposure system of claim 1, wherein the corrector comprises a lens having one concave surface and one convex surface.

4. The exposure system of claim 3, wherein the concave surface is aspheric.

5. The exposure system of claim 3, wherein the convex surface is aspheric.

6. The exposure system of claim 1, wherein the corrector comprises a lens having two convex surfaces.

7. The exposure system of claim 6, wherein at least one of the convex surfaces is aspheric.

8. The exposure system of claim 1, wherein the corrector comprises a flat plate.

9. The exposure system of claim 1, wherein the corrector comprises a glass plate with at least one aspheric surface.

10. The exposure system of claim 1, wherein the corrector comprises a reflective corrector.

11. The exposure system of claim 10, wherein the reflective corrector comprises an aspheric mirror.

12. The exposure system of claim 10, wherein the reflective corrector comprises two aspheric mirrors.

13. The exposure system of claim 10, wherein the reflective corrector comprises at least one powered mirror.

14. The exposure system of claim 10, wherein the reflective corrector comprises at least one mirror with a surface described by both spherical and aspheric terms.

15. The exposure system of claim 1, wherein the exposure system has a magnification of between 1.5×

and 9×

.

16. The exposure system of claim 1, wherein at least one of the four powered mirrors is convex.

17. The exposure system of claim 1, wherein at least one of the four powered mirrors is concave.

18. The exposure system of claim 1, wherein the four powered mirrors are a combination of convex and concave mirrors.

19. The exposure system of claim 1, wherein at least one of the four powered mirrors has an aspheric surface.

20. The exposure system of claim 1, wherein the exposure system is adapted for 42 inch FPD manufacture.

21. The exposure system of claim 1, wherein the exposure system is adapted for 54 inch FPD manufacture.

22. The exposure system of claim 1, wherein the exposure system is adapted for 60 inch FPD manufacture.

23. The exposure system of claim 1, wherein the four powered mirrors are not symmetric about their optical axes.

24. The exposure system of claim 1, wherein the exposure system has no obscuration.

25. The exposure system of claim 1, wherein curvatures of the four powered mirrors do not sum to zero.

26. An exposure system for manufacturing flat panel displays (FPDs) comprising:

a reticle stage adapted to hold a reticle;

a substrate stage adapted to hold a substrate;

a magnification ringfield reflective optical system that images the reticle onto the substrate, the reflective optical system comprising at least two powered mirrors.

27. The exposure system of claim 26, further including a corrector near one of the reticle and the substrate.

28. The exposure system of claim 27, wherein the corrector comprises a refractive corrector.

29. The exposure system of claim 27, wherein the corrector comprises a lens having one concave surface and one convex surface.

30. The exposure system of claim 27, wherein the corrector comprises a flat plate.

31. The exposure system of claim 27, wherein the corrector comprises a glass plate with an aspheric surface.

32. The exposure system of claim 27, wherein the corrector comprises a reflective corrector.

33. The exposure system of claim 32, wherein the reflective corrector comprises an aspheric mirror.

34. The exposure system of claim 32, wherein the reflective corrector comprises two aspheric mirrors.

35. The exposure system of claim 32, wherein the reflective corrector comprises at least one powered mirror.

36. The exposure system of claim 32, wherein the reflective corrector comprises at least one mirror with a surface described by both spherical and aspheric terms.

37. The exposure system of claim 27, wherein the corrector comprises a refractive corrector.

38. The exposure system of claim 27, wherein the corrector comprises a lens having one concave surface and one convex surface.

39. The exposure system of claim 27, wherein the corrector comprises a flat plate.

40. The exposure system of claim 27, wherein the corrector comprises a glass plate with an aspheric surface.

41. The exposure system of claim 27, wherein the corrector comprises a reflective corrector.

42. The exposure system of claim 41, wherein the reflective corrector comprises an aspheric mirror.

43. The exposure system of claim 41, wherein the reflective corrector comprises two aspheric mirrors.

44. The exposure system of claim 41, wherein the reflective corrector comprises at least one powered mirror.

45. The exposure system of claim 41, wherein the reflective corrector comprises at least one mirror with a surface described by both spherical and aspheric terms.

46. The exposure system of claim 26, wherein at least one of the two powered mirrors has an aspheric surface.

47. The exposure system of claim 26, wherein the two powered mirrors are not symmetric about their optical axes.

48. The exposure system of claim 26, wherein the exposure system has no obscuration.

49. The exposure system of claim 26, wherein curvatures of the two powered mirrors do not sum to zero.

50. The exposure system of claim 26, wherein any of the two powered mirrors is convex.

51. The exposure system of claim 26, wherein any of the two powered mirrors is concave.

52. The exposure system of claim 26, wherein at least one of the two powered mirrors has an aspheric surface.

53. The exposure system of claim 26, wherein the two powered mirrors are not symmetric about their optical axes.

54. The exposure system of claim 26, wherein the exposure system has no obscuration.

55. An exposure system for manufacturing flat panel displays (FPDs) comprising:

a reticle stage adapted to hold a reticle;

a substrate stage adapted to hold a substrate;

a magnification reflective optical system that images the reticle onto the substrate, the reflective optical system comprising a plurality of powered mirrors that are non-symmetric relative to their center axes; and

a corrector near one of the reticle and the substrate.

56. The exposure system of claim 55, wherein the corrector comprises a lens having one concave surface and one convex surface.

57. The exposure system of claim 55, wherein the corrector comprises a flat plate.

58. The exposure system of claim 55, wherein the corrector comprises a glass plate with an aspheric surface.

59. The exposure system of claim 55, wherein the corrector comprises a reflective corrector.

60. The exposure system of claim 59, wherein the reflective corrector comprises an aspheric mirror.

61. The exposure system of claim 59, wherein the reflective corrector comprises two aspheric mirrors.

62. The exposure system of claim 59, wherein the reflective corrector comprises at least one powered mirror.

63. The exposure system of claim 59, wherein the reflective corrector comprises at least one mirror with a surface described by both spherical and aspheric terms.

64. The exposure system of claim 55, wherein the four powered mirrors are a combination of convex and concave mirrors.

65. The exposure system of claim 55, wherein at least one of the four powered mirrors has an aspheric surface.

66. The exposure system of claim 55, wherein the exposure system has no obscuration.

67. The exposure system of claim 55, wherein curvatures of the four powered mirrors do not sum to zero.