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Three-dimensional magnetic direction sensor, and magneto-impedance sensor element

  • US 20050242805A1
  • Filed: 07/13/2004
  • Published: 11/03/2005
  • Est. Priority Date: 07/18/2003
  • Status: Active Grant
First Claim
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1. A three-dimensional magnetic bearing sensor including a first sensor, a second sensor, and a third sensor each constituted by a magneto-impedance sensor element comprising a magnetic sensitive member having a characteristic changed responsive to an external magnetic field, an insulator formed to allow penetration of said magnetic sensitive member therethrough, and an electromagnetic coil made up of foil-like conductive patterns arranged in adjacent relation on an outer surface of said insulator, wherein said first sensor, said second sensor, and said third sensor are disposed such that directions in which said magnetic sensitive members in respective sensors have maximum magnetic field detection sensitivities are substantially orthogonal to each other:

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