STRUCTURES AND METHODS FOR MANUFACTURING P-TYPE MOSFET WITHGRADED EMBEDDED SILICON-GERMANIUM SOURCE-DRAIN AND/OR EXTENSION
First Claim
1. A method of forming a PMOSFET comprising the steps of:
- providing an SOI wafer having a buried insulator layer and a SOI layer above said buried insulator layer;
forming a layer of gate insulator over said SOI layer;
forming a transistor gate over said SOI layer having a channel underneath said gate;
forming insulator sidewalls on first and second sides of said gate;
epitaxially forming a doped layer containing a dopant on said SOI layer and adjacent to said insulator sidewalls;
diffusing said dopant into said SOI layer from said doped layer, thereby producing compressive stress in the horizontal direction parallel to an SOI surface and tensile stress in a vertical direction normal to said SOI surface in said channel; and
completing said PMOSFET.
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Accused Products
Abstract
P-type MOSFETs (PMOSFETs) are formed by encapsulating the gate with an insulator and depositing a germanium containing layer outside the sidewalls, then diffusing the germanium into the silicon-on-insulator layer or bulk silicon by annealing or by oxidizing to form graded embedded silicon-germanium source-drain and/or Extension (geSiGe-SDE). For SOI devices, the geSiGe-SDE is allowed to reach the buried insulator to maximize the stress in the channel of SOI devices, which is beneficial for ultra-thin SOI devices. Graded germanium profiles provide a method to optimize stress in order to enhance device performance. The geSiGe-SDE creates a compressive stress in the horizontal direction (parallel to the gate dielectric surface) and tensile stress in the vertical direction (normal to the gate dielectric surface) in the channel of the PMOSFET, therebyforming a structure that enhances PMOSFET performance.
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Citations
25 Claims
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1. A method of forming a PMOSFET comprising the steps of:
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providing an SOI wafer having a buried insulator layer and a SOI layer above said buried insulator layer;
forming a layer of gate insulator over said SOI layer;
forming a transistor gate over said SOI layer having a channel underneath said gate;
forming insulator sidewalls on first and second sides of said gate;
epitaxially forming a doped layer containing a dopant on said SOI layer and adjacent to said insulator sidewalls;
diffusing said dopant into said SOI layer from said doped layer, thereby producing compressive stress in the horizontal direction parallel to an SOI surface and tensile stress in a vertical direction normal to said SOI surface in said channel; and
completing said PMOSFET. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12)
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13. A method of forming a PMOSFET comprising the steps of:
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providing a bulk silicon wafer;
forming a layer of gate insulator over said bulk silicon;
forming a transistor gate over said bulk silicon having a channel underneath said gate;
forming insulator sidewalls on first and second sides of said gate;
epitaxially forming a doped layer containing germanium or impurity on said bulk silicon and adjacent to said insulator sidewalls;
diffusing germanium into said bulk silicon from said germanium doped layer, thereby producing compressive stress in horizontal direction (parallel to SOI surface) and tensile stress in vertical direction (in normal of SOI surface) in said channel; and
completing said PMOSFET. - View Dependent Claims (14, 15, 16, 17, 18, 19, 20)
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21. An integrated circuit containing at least one PMOSFET formed in an SOI wafer having a buried insulator layer and a SOI layer above said buried insulator layer;
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said at least one PMOSFET having a gate insulator over said SOI layer;
a transistor gate over said SOI layer having a channel underneath said gate, said channel having compressive stress in the horizontal direction parallel to an SOI surface and tensile stress in a vertical direction normal to said SOI surface in said channel; and
wherein said SOI layer has a graded concentration of a dopant that generates said compressive stress in said horizontal direction, said concentration of said dopant having a maximum value at an upper surface of said SOI layer. - View Dependent Claims (22, 23, 24, 25)
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Specification