Photonic MEMS and structures

• US 20050286113A1
• Filed: 06/10/2005
• Published: 12/29/2005
• Est. Priority Date: 05/01/1995
• Status: Active Grant

• Current Assignee: Snaptrack Incorporated (Qualcomm, Inc.)
• Original Assignee: Iridigm Display Corporation (Qualcomm, Inc.)
• Inventors: Miles, Mark W.
• Granted Patent: US 7,388,706 B2
• Time in Patent Office: Days
• US Class Current: 359/291
• CPC Class Codes: B82Y 20/00 Nanooptics, e.g. quantum optics or photonic crystals
• CPC Class Codes: G01J 3/0256 Compact construction
• CPC Class Codes: G01J 3/26 using multiple reflection, e.g. Fabry-Perot interferometer, variable interference filters
• CPC Class Codes: G01L 5/0047 measuring forces due to residual stresses
• CPC Class Codes: G02B 2006/12104 Mirror; Reflectors or the like
• CPC Class Codes: G02B 2006/12109 Filter
• CPC Class Codes: G02B 2006/12126 Light absorber
• CPC Class Codes: G02B 2006/12159 Interferometer
• CPC Class Codes: G02B 2006/12164 Multiplexing; Demultiplexing
• CPC Class Codes: G02B 26/001 based on interference in an adjustable optical cavity interference filters G02B5/28; devices or arrangements using multiple reflections in spectrometry or monochromators G01J3/26
• CPC Class Codes: G02B 26/02 for controlling the intensity of light G02B26/004 takes precedence
• CPC Class Codes: G02B 26/08 for controlling the direction of light in light guides G02B6/35
• CPC Class Codes: G02B 26/0833 the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD G02B26/0825 takes precedence; micromechanical devices in general B81B
• CPC Class Codes: G02B 26/0841 the reflecting element being moved or deformed by electrostatic means
• CPC Class Codes: G02B 5/02 Diffusing elements; Afocal elements
• CPC Class Codes: G02B 6/12007 forming wavelength selective elements, e.g. multiplexer, demultiplexer
• CPC Class Codes: G02B 6/122 Basic optical elements, e.g. light-guiding paths
• CPC Class Codes: G02B 6/1225 comprising photonic band-gap structures or photonic lattices
• CPC Class Codes: G02B 6/13 Integrated optical circuits characterised by the manufacturing method
• CPC Class Codes: G02B 6/266 the optical element being an attenuator
• CPC Class Codes: G02B 6/3516 : the reflective optical element moving along the beam path, e.g. controllable diffractive effects using multiple micromirrors within the beam
• CPC Class Codes: G02B 6/3522 : the optical element enabling or impairing total internal reflection using evanescent coupling G02B6/3536
• CPC Class Codes: G02B 6/353 : the optical element being a shutter, baffle, beam dump or opaque element absorbers on light guide termination G02B6/243
• CPC Class Codes: G02B 6/3536 : involving evanescent coupling variation, e.g. by a moving element such as a membrane which changes the effective refractive index mode converters G02B6/14; adjustable lateral coupling between waveguides G02B6/283; electro- optical refractive index variations G02F1/0118
• CPC Class Codes: G02B 6/3546 : NxM switch, i.e. a regular array of switches elements of matrix type constellation
• CPC Class Codes: G02B 6/3548 : 1xN switch, i.e. one input and a selectable single output of N possible outputs
• CPC Class Codes: G02B 6/356 : in an optical cross-connect device, e.g. routing and switching aspects of interconnecting different paths propagating different wavelengths to (re)configure the various input and output links switching polarized beams G02B6/3594; power equalizers G02B6/356 and G02B6/3594; path selecting means H04Q11/0001
• CPC Class Codes: G02B 6/357 : Electrostatic force electrostatic forces controlling reflecting elements in general G02B26/0841
• CPC Class Codes: G02B 6/3578 : Piezoelectric force piezoelectric forces controlling reflecting elements in general G02B26/0858; piezo-optic devices G02F1/0131
• CPC Class Codes: G02B 6/3584 : constructional details of an associated actuator having a MEMS construction, i.e. constructed using semiconductor technology such as etching MEMS per se B81B, B81C
• CPC Class Codes: G02B 6/3594 : Characterised by additional functional means, e.g. means for variably attenuating or branching or means for switching differently polarized beams
• CPC Class Codes: G02B 6/3598 : Switching means directly located between an optoelectronic element and waveguides, including direct displacement of either the element or the waveguide, e.g. optical pulse generation based on changing the optical properties of the medium G02F1/00; optical pulse generation in optical transmitters H04B10/508; optical pulse generation by controlling laser operation H01S3/00
• CPC Class Codes: G02B 6/43 : Arrangements comprising a plurality of opto-electronic elements and associated optical interconnections
• CPC Class Codes: G09G 2310/02 : Addressing, scanning or driving the display screen or processing steps related thereto
• CPC Class Codes: G09G 2310/0254 : Control of polarity reversal in general, other than for liquid crystal displays
• CPC Class Codes: G09G 2310/06 : Details of flat display driving waveforms
• CPC Class Codes: G09G 3/3466 : based on interferometric effect

Abstract

An interference modulator (Imod) incorporates anti-reflection coatings and/or micro-fabricated supplemental lighting sources. An efficient drive scheme is provided for matrix addressed arrays of IMods or other micromechanical devices. An improved color scheme provides greater flexibility. Electronic hardware can be field reconfigured to accommodate different display formats and/or application functions. An IMod'"'"'s electromechanical behavior can be decoupled from its optical behavior. An improved actuation means is provided, some one of which may be hidden from view. An IMod or IMod array is fabricated and used in conjunction with a MEMS switch or switch array. An IMod can be used for optical switching and modulation. Some IMods incorporate 2-D and 3-D photonic structures. A variety of applications for the modulation of light are discussed. A MEMS manufacturing and packaging approach is provided based on a continuous web fed process. IMods can be used as test structures for the evaluation of residual stress in deposited materials.

Claims

1. A display device comprising:

a MEMS display portion; and

a plurality of MEMS switches, at least some of which are coupled to the display,

wherein at least some of the plurality of MEMS switches comprise;

first and second terminals;

an electrode, and

a deflecting arm responsive to a voltage across at least a portion of the arm and the electrode, wherein the first and second terminals are selectively connectable.

2. The device of claim 1, wherein the display portion and the plurality of MEMS switches are integrally formed on a single substrate.

3. The device of claim 1, wherein said deflecting arm moves in a direction parallel to the surface of said substrate.

4. The device of claim 1, wherein said deflecting arm comprises first and second portions separated by an insulator.

5. The device of claim 4, wherein said first portion is responsive to said voltage, and said second portion contacts said first and second terminals.

6. The device of claim 1, wherein at least some elements of said MEMS display portion comprise collapsible cavities.

7. A display device comprising:

a MEMS display portion; and

a plurality of MEMS switches for controlling the display, wherein the display portion and the plurality of MEMS switches are integrally formed on a single substrate; and

wherein the plurality of MEMS switches forms in part row or column select circuitry, and wherein at least some of the plurality of MEMS switches comprise first and second terminals, an electrode, and a deflecting arm responsive to a voltage across at least a portion of the arm and the electrode, wherein the first and second terminals are selectively connectable.

8. The device of claim 7, wherein said deflecting arm moves in a direction parallel to the surface of said substrate.

9. The device of claim 7, wherein at least some elements of said MEMS display portion comprise collapsible cavities.

10. A MEMS switch comprising:

first and second terminals;

an electrode,

a deflecting arm responsive to a voltage across at least a portion of the arm and the electrode, wherein the first and second terminals are selectively connectable, and

a substrate supporting said first and second terminals, said electrode, and said deflecting arm.

11. The switch of claim 10, wherein said deflecting arm moves in a direction parallel to the surface of said substrate.

12. The switch of claim 10, wherein said deflecting arm comprises first and second portions separated by an insulator.

13. The switch of claim 12, wherein said first portion is responsive to said voltage, and said second portion contacts said first and second terminals.

14. A display device comprising:

a MEMS display portion; and

a plurality of means for switching electrical circuits, at least some of which are coupled to the display.

15. The device of claim 14, wherein the display portion and the means for switching are integrally formed on a single substrate.

16. The device of claim 14, wherein at least some elements of said MEMS display portion comprise collapsible cavities.

17. The device of claim 16, wherein at least some elements of said MEMS display portion comprise collapsible cavities.

18. The display device of claim 14, wherein said means for switching comprises means for switching row and column driver circuitry.