Interferometric modulation of radiation

• US 20050286114A1
• Filed: 06/10/2005
• Published: 12/29/2005
• Est. Priority Date: 12/19/1996
• Status: Active Grant

• Current Assignee: Snaptrack Incorporated (Qualcomm, Inc.)
• Original Assignee: Iridigm Display Corporation (Qualcomm, Inc.)
• Inventors: Miles, Mark W.
• Granted Patent: US 7,471,444 B2
• Time in Patent Office: Days
• US Class Current: 359/291
• CPC Class Codes: B82Y 20/00 Nanooptics, e.g. quantum optics or photonic crystals
• CPC Class Codes: G01J 3/26 using multiple reflection, e.g. Fabry-Perot interferometer, variable interference filters
• CPC Class Codes: G02B 2006/12104 Mirror; Reflectors or the like
• CPC Class Codes: G02B 26/001 based on interference in an adjustable optical cavity interference filters G02B5/28; devices or arrangements using multiple reflections in spectrometry or monochromators G01J3/26
• CPC Class Codes: G02B 26/02 for controlling the intensity of light G02B26/004 takes precedence
• CPC Class Codes: G02B 26/0833 the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD G02B26/0825 takes precedence; micromechanical devices in general B81B
• CPC Class Codes: G02B 26/0841 the reflecting element being moved or deformed by electrostatic means
• CPC Class Codes: G02B 26/085 the reflecting means being moved or deformed by electromagnetic means
• CPC Class Codes: G02B 26/0858 the reflecting means being moved or deformed by piezoelectric means
• CPC Class Codes: G02B 27/017 Head mounted
• CPC Class Codes: G02B 6/12 of the integrated circuit kind electric integrated circuits H01L27/00
• CPC Class Codes: G02F 1/13725 based on guest-host interaction G02F1/13762, G02F1/13737, take precedence
• CPC Class Codes: G02F 1/216 using liquid crystals, e.g. liquid crystal Fabry-Perot filters
• CPC Class Codes: G02F 2203/03 scattering
• CPC Class Codes: G09G 2300/0452 Details of colour pixel setup, e.g. pixel composed of a red, a blue and two green components
• CPC Class Codes: G09G 3/2074 using sub-pixels
• CPC Class Codes: G09G 3/3466 based on interferometric effect

Abstract

An Interferometric Modulator (IMod) is a microelectromechanical device for modulating light using interference. The colors of these devices may be determined in a spatial fashion, and their inherent color shift may be compensated for using several optical compensation mechanisms. Brightness, addressing, and driving of IMods may be accomplished in a variety of ways with appropriate packaging, and peripheral electronics which can be attached and/or fabricated using one of many techniques. The devices may be used in both embedded and directly perceived applications, the latter providing multiple viewing modes as well as a multitude of product concepts ranging in size from microscopic to architectural in scope.

Claims

1. A display device comprising:

a MEMS display portion; and

a plurality of MEMS switches, at least some of which are coupled to the display.

2. The device of claim 1, wherein the display portion and the plurality of MEMS switches are integrally formed on a single substrate.

3. The device of claim 1, wherein at least some elements of said MEMS display portion comprise collapsible cavities.

4. The device of claim 2, wherein at least some elements of said MEMS display portion comprise collapsible cavities.

5. The device of claim 1, wherein said substrate comprises electronically inactive medium.

6. The device of claim 1, wherein said substrate comprises glass.

7. A display device comprising:

a MEMS display portion; and

a plurality of MEMS switches for controlling the display, wherein the display portion and the plurality of MEMS switches are integrally formed on a single substrate; and

wherein the plurality of MEMS switches forms in part row or column driver circuitry.

8. The device of claim 7, wherein at least some elements of said MEMS display portion comprise collapsible cavities.

9. A method of making a MEMS display device, the method comprising:

forming a display portion on a substrate; and

forming a plurality of MEMS switches at least some of which are coupled to the display, wherein the MEMS switches are formed integrally with the display portion on the substrate using at least some common process steps.

10. An electronic circuit comprising a plurality of MEMS switches, wherein said MEMS switches comprise layers of deposited material on an electrically inactive substrate.

11. The circuit of claim 10, wherein said electronic circuit additionally comprises display elements.

12. The circuit of claim 11, wherein at least some of said display elements comprise MEMS devices.

13. The circuit of claim 12, wherein said MEMS devices comprise collapsible cavities.

14. The circuit of claim 11, wherein said display elements and said MEMS switches are fabricated on said electrically inactive substrate using at least some common processing steps.