Precursor compositions for the deposition of electrically conductive features

• US 20060043346A1
• Filed: 08/12/2005
• Published: 03/02/2006
• Est. Priority Date: 10/05/2001
• Status: Abandoned Application

• Current Assignee: Cabot Corporation
• Original Assignee: Cabot Corporation
• Inventors: Vanheusden, Karel, Kunze, Klaus, Atanassova, Paolina, Hampden-Smith, Mark J., Kodas, Toivo T., Stump, Aaron D., Schult, Allen B., Denham, Hugh
• Application Number:
  US11/203,435
• Publication Number:
  US 20060043346A1
• Time in Patent Office: Days
• US Class Current: 252/514
• CPC Class Codes: C09D 11/30 Inkjet printing inks
• CPC Class Codes: C23C 18/08 characterised by the deposition of metallic material
• CPC Class Codes: H01B 1/026 Alloys based on copper
• CPC Class Codes: H01C 17/06506 Precursor compositions therefor, e.g. pastes, inks, glass frits
• CPC Class Codes: H01C 17/06533 composed of oxides
• CPC Class Codes: H01C 17/06573 characterised by the permanent binder
• CPC Class Codes: H01L 21/288 from a liquid, e.g. electrolytic deposition
• CPC Class Codes: H01L 21/31691 with perovskite structure
• CPC Class Codes: H05K 1/097 Inks comprising nanoparticles and specially adapted for being sintered at low temperature H05K1/095 takes precedence
• CPC Class Codes: H05K 3/105 by conversion of non-conductive material on or in the support into conductive material, e.g. by using an energy beam

Abstract

A precursor composition for the deposition and formation of an electrical feature such as a conductive feature. The precursor composition advantageously has a viscosity of at least about 1000 centipoise and can be deposited by screen printing. The precursor composition also has a low conversion temperature, enabling the deposition and conversion to an electrical feature on low temperature substrates. A particularly preferred precursor composition includes silver and/or copper metal for the formation of highly conductive features.

Claims

1. A metal precursor composition having a viscosity of at least about 1000 centipoise, comprising:

a. a metal precursor compound; and

b. a conversion reaction inducing agent in an amount sufficient to reduce the conversion temperature of said metal precursor composition by at least about 25°

C. as compared to the dry metal precursor compound, wherein said conversion temperature is not greater than about 200°

2. A metal precursor composition as recited in claim 1, wherein said viscosity is at least about 5000 centipoise.

3. A metal precursor composition as recited in claim 1, wherein said viscosity is at least about 10,000 centipoise.

4. A metal precursor composition as recited in claim 1, wherein said metal precursor compound is a metal carboxylate compound.

5. A metal precursor composition as recited in claim 1, wherein said metal precursor compound is a halogenated metal carboxylate compound.

6. A metal precursor composition as recited in claim 1, wherein said metal precursor compound is a metal oxide.

7. A metal precursor composition as recited in claim 1, wherein said metal precursor compound is an inorganic metal compound.

8. A metal precursor composition as recited in claim 1, wherein said metal precursor compound is silver trifluoroacetate.

9. A metal precursor composition as recited in claim 1, further comprising a crystallization inhibitor.

10. A metal precursor composition as recited in claim 1, further comprising a crystallization inhibitor that is lactic acid.

11. A metal precursor composition as recited in claim 1, wherein said conversion reaction inducing agent is a liquid that functions as a vehicle for said metal precursor composition.

12. A metal precursor composition as recited in claim 1, wherein said conversion reaction inducing agent is a liquid that functions as a solvent for said metal precursor compound.

13. A metal precursor composition as recited in claim 1, wherein said conversion reaction inducing agent is selected from the group consisting of alcohols, amines, amides, boranes, borohygrates, borohydrides and organosilanes.

14. A metal precursor composition as recited in claim 1, wherein said conversion reaction inducing agent comprises diethyleneglycol butylether (DEGBE).

15. A metal precursor composition as recited in claim 1, wherein said conversion reaction inducing agent comprises terpineol.

16. A metal precursor composition as recited in claim 1, wherein said conversion reaction inducing agent comprises N,N-dimethyl acetamide (DMAc).

17. A metal precursor composition as recited in claim 1, wherein said conversion reaction inducing agent comprises diethyleneglycol butylether (DEGBE) and N,N-dimethyl acetamide (DMAc).

18. A metal precursor composition as recited in claim 1, wherein said conversion reaction inducing agent comprises N,N-dimethyl acetamide (DMAc) and terpineol.

19. A metal precursor composition as recited in claim 1, wherein said conversion reaction inducing agent comprises a palladium compound.

20. A metal precursor composition as recited in claim 1, wherein said conversion reaction inducing agent is selected from the group consisting of palladium acetate and palladium triflouroacetate.

21. A metal precursor composition as recited in claim 1, wherein said conversion reducing agent comprises diethyleneglycol butylether (DEGBE) and the molar ratio of DEGBE to said metal carboxylate compound is from about 0.75 to about 1.25.

22. A metal precursor composition as recited in claim 1, further comprising a vehicle.

23. A metal precursor composition as recited in claim 1, further comprising a solvent, wherein said metal precursor compound is dissolved in said solvent.

24. A metal precursor composition as recited in claim 1, further comprising water as a solvent.

25. A metal precursor composition as recited in claim 1, further comprising particles.

26. A metal precursor composition as recited in claim 1, further comprising substantially spherical particles.

27. A metal precursor composition as recited in claim 1, further comprising micron size particles having an average particles size of from about 0.1 μ

m to about 10 μ

m.

28. A metal precursor composition as recited in claim 1, further comprising metallic particles.

29. A metal precursor composition as recited in claim 1, further comprising silver metal particles.

30. A metal precursor composition as recited in claim 1, further comprising nanoparticles having a volume median particle size of not greater than 100 nanometers.

31. A metal precursor composition as recited in claim 1, wherein said precursor composition comprises said conversion reaction inducing agent in an amount sufficient to reduce the conversion temperature of said metal precursor compound by at least about 50°

C.

32. A metal precursor composition as recited in claim 1, wherein said precursor composition comprises said conversion reaction inducing agent in an amount sufficient to reduce the conversion temperature of said metal precursor compound by at least about 100°

C.

33-64. -64. (canceled)