Post-release capacitance enhancement in micromachined devices and a method of performing the same

• US 20060054983A1
• Filed: 09/15/2004
• Published: 03/16/2006
• Est. Priority Date: 09/15/2004
• Status: Active Grant

• Current Assignee: Regents of the University of California (University of California)
• Original Assignee: Regents of the University of California (University of California)
• Inventors: Acar, Cenk, Shkel, Andrei M.
• Granted Patent: US 7,279,761 B2
• Time in Patent Office: Days
• US Class Current: 257/415
• CPC Class Codes: B81B 2201/033 Comb drives
• CPC Class Codes: B81B 2203/051 Translation according to an axis parallel to the substrate
• CPC Class Codes: B81B 3/0056 Adjusting the distance between two elements, at least one of them being movable, e.g. air-gap tuning
• CPC Class Codes: G01C 19/5719 using planar vibrating masses driven in a translation vibration along an axis
• CPC Class Codes: G01P 15/0802 Details
• CPC Class Codes: G01P 15/125 by capacitive pick-up
• CPC Class Codes: H02N 1/008 Laterally driven motors, e.g. of the comb-drive type

Abstract

A MEMS device which utilizes a capacitive sensor or actuator is enhancement by initially fabricating the capacitive assembly which comprises the sensor or actuator as two sets of interdigitated fingers in a noninterdigitated configuration. One of the two sets of fingers is coupled to a movable stage. The stage is moved from an initial position to a post-release position in which the two sets of interdigitated fingers are interdigitated with each other. The stage is carried by two pairs flexures which maintain the stability of motion of the stage and when in the post-release position provide stiffness which prevents deflection of the set of fingers coupled to the stage. The stage and hence the assembled sets of fingers are then locked into the post-release position.

Claims

1. An improvement in a MEMS device for capacitive enhancement comprising:

a capacitive assembly having two sets of interdigitated fingers fabricated initially in a noninterdigitated configuration;

a movable stage to which one of the two sets of interdigitated fingers are coupled;

an actuator for selectively moving the stage from an initial position to a post-release position in which the two sets of interdigitated fingers are interdigitated with each other; and

a lock for maintaining the stage in the post-release position.

2. The improvement of claim 1 where the noninterdigitated configuration is characterized by a minimum, fabricated gap size between adjacent fingers in each of the two sets, so that when in the post-release position the fingers in the two sets are spaced from each by less than the minimum, fabricated gap size.

3. The improvement of claim 1 where the capacitive assembly having two sets of interdigitated fingers comprises a capacitive sensor assembly.

4. The improvement of claim 1 where the capacitive assembly having two sets of interdigitated fingers comprises an electrostatic actuator assembly.

5. The improvement of claim 1 where the lock comprises a ratchet lock mechanism.

6. The improvement of claim 1 where the lock comprises a bistable lock mechanism.

7. The improvement of claim 1 where the actuator comprises a thermal actuator.

8. The improvement of claim 1 where the MEMS device comprises a gyroscope or accelerometer.

9. The improvement of claim 1 where the device is fabricated in or on a substrate and where the stage comprises a stage body to which the one set of fingers are coupled, and two pairs of flexures coupling the stage body to the substrate, the two pairs of flexures functioning as a four-bar linkage to restrict movement of the stage body in a stable linear direction.

10. The improvement of claim 9 where two pairs of flexures are arranged and configured to provide high stiffness when the stage is locked into the post-release position so that the one set of fingers coupled to the stage body is substantially prevented from deflecting.

11. An improvement in a method of assembling a MEMS device to provide capacitive enhancement comprising:

initially fabricating a capacitive assembly having two sets of interdigitated fingers in a noninterdigitated configuration;

moving a stage to which one of the two sets of interdigitated fingers are coupled from an initial position to a post-release position in which the two sets of interdigitated fingers are interdigitated with each other; and

locking the stage in the post-release position.

12. The improvement of claim 11 where initially fabricating the capacitive assembly in the noninterdigitated configuration comprises fabricating the assembly with a minimum, fabricated gap size between adjacent fingers in each of the two sets, and where moving the stage into the post-release position configures the fingers in the two sets so that the fingers are spaced from each by less than the minimum, fabricated gap size.

13. The improvement of claim 11 where the method of assembly is performed to assemble a capacitive sensor assembly.

14. The improvement of claim 11 where the method of assembly is performed to assemble an electrostatic actuator assembly.

15. The improvement of claim 11 where locking the stage comprises locking the stage with a ratchet lock mechanism.

16. The improvement of claim 11 where locking the stage comprises locking the stage with a bistable lock mechanism.

17. The improvement of claim 11 where moving the stage comprises operating a thermal actuator coupled to the stage.

18. The improvement of claim 11 where the method of assembling a MEMS device comprises assembling a gyroscope or accelerometer.

19. The improvement of claim 11 where moving the stage comprises moving a stage body to which the one set of fingers are coupled by flexing two pairs of flexures which couple the stage body to the substrate as a four-bar linkage to restrict movement of the stage body in a stable linear direction.

20. The improvement of claim 19 where moving the stage comprises coupling high stiffness to the stage from the flexures when the stage body is locked into the post-release position so that the one set of fingers coupled to the stage body is substantially prevented from deflecting.