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MEMS SWITCH WITH SET AND LATCH ELECTRODES

  • US 20060066937A1
  • Filed: 09/23/2005
  • Published: 03/30/2006
  • Est. Priority Date: 09/27/2004
  • Status: Active Grant
First Claim
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1. A MEMS device comprising:

  • a substrate;

    at least two support posts supported by said substrate;

    at least two electrically isolated electrodes supported by said substrate and positioned between said support posts;

    a moveable electrode supported above said substrate by said support posts; and

    at least two switch terminals that are selectably connectable depending on the position of the moveable electrode.

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