MEMS SWITCH WITH SET AND LATCH ELECTRODES
First Claim
Patent Images
1. A MEMS device comprising:
- a substrate;
at least two support posts supported by said substrate;
at least two electrically isolated electrodes supported by said substrate and positioned between said support posts;
a moveable electrode supported above said substrate by said support posts; and
at least two switch terminals that are selectably connectable depending on the position of the moveable electrode.
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Abstract
Abstract of the Disclosure
A MEMS device is electrically actuated with a voltage placed across a first electrode (702) and a moveable material (714). The device may be maintained in an actuated state by latch electrodes (730a, 730b) that are separate from the first electrode.
221 Citations
24 Claims
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1. A MEMS device comprising:
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a substrate; at least two support posts supported by said substrate; at least two electrically isolated electrodes supported by said substrate and positioned between said support posts; a moveable electrode supported above said substrate by said support posts; and at least two switch terminals that are selectably connectable depending on the position of the moveable electrode. - View Dependent Claims (2, 3, 4, 5, 6, 7)
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8. A display system comprising:
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an array of MEMS display elements; one or more MEMS switches coupled to said array, wherein at least one of said MEMS switches comprises; a substrate; at least two support posts supported by said substrate; at least two electrically isolated electrodes supported by said substrate and positioned between said support posts; a moveable electrode supported above said substrate by said support posts; and at least two switch terminals that are selectably connectable depending on the position of the moveable electrode. - View Dependent Claims (9, 10, 11, 12, 13, 14, 15)
a processor that is in electrical communication with said display, said processor being configured to process image data; and a memory device in electrical communication with said processor.
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11. The device of Claim 9, wherein said driver circuit is configured to send at least one signal to said display.
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12. The device of Claim 11, further comprising:
a controller configured to send at least a portion of said image data to said driver circuit.
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13. The device of Claim 10, further comprising:
an image source module configured to send said image data to said processor.
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14. The device of Claim 13, wherein said image source module comprises at least one of a receiver, transceiver, and transmitter.
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15. The device of Claim 10, further comprising:
an input device configured to receive input data and to communicate said input data to said processor.
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16. A method of operating a MEMS switch comprising:
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controlling switch actuation by moving a moveable element from a first position to a second position by applying a first voltage across a first electrode and second electrode; and maintaining said moveable element in said second position by applying a second voltage across said first electrode and a third electrode. - View Dependent Claims (17)
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18. A MEMS switch comprising:
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a first electrode moveable between first and second positions; switch terminals selectably connectable based on a position of said first electrode; means for moving said moveable electrode from said first position to said second position; and means for maintaining said moveable electrode in said second position, said means for maintaining being separately controllable from said means for moving. - View Dependent Claims (19, 20)
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21. A method of making a MEMS switch comprising:
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forming at least first and second electrically isolated electrodes between a pair of support posts on a substrate; forming switch terminals; and forming a moveable electrode on said support posts. - View Dependent Claims (22, 23, 24)
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Specification