Real time monitoring system of semiconductor manufacturing information

• US 20060070014A1
• Filed: 09/27/2004
• Published: 03/30/2006
• Est. Priority Date: 09/27/2004
• Status: Active Grant

• Current Assignee: Taiwan Semiconductor Manufacturing Company Limited
• Original Assignee: Taiwan Semiconductor Manufacturing Company Limited
• Inventors: Ho, Chen-Hsien, Liu, Chih-Pang
• Granted Patent: US 7,286,897 B2
• Time in Patent Office: Days
• US Class Current: 438/14
• CPC Class Codes: G05B 19/41875 characterised by quality surveillance of production
• CPC Class Codes: G05B 2219/31455 Monitor process status
• CPC Class Codes: G05B 2219/31466 Display position of different workpieces, tools in system
• CPC Class Codes: G05B 2219/31474 Icon display for quick access of detailed information
• CPC Class Codes: G05B 2219/32191 Real time statistical process monitoring
• CPC Class Codes: G05B 2219/45031 Manufacturing semiconductor wafers
• CPC Class Codes: G05B 23/0267 Fault communication, e.g. human machine interface [HMI]
• CPC Class Codes: Y02P 90/02 Total factory control, e.g. smart factories, flexible manufacturing systems [FMS] or integrated manufacturing systems [IMS]
• CPC Class Codes: Y10S 707/99945 Object-oriented database structure processing
• CPC Class Codes: Y10S 707/99948 Application of database or data structure, e.g. distributed, multimedia, or image

Abstract

The present disclosure provides a system for monitoring semiconductor manufacturing in real time which includes an icon module with a database for storing a plurality of icons to provide stored icons that use vector data to represent respective pieces of equipment employed in semiconductor manufacture, a layout module which includes a database for storing information on a layout of a semiconductor manufacturing facility to provide stored information on the layout, and a joiner module, which is receptive to the icon module and the layout module, for using vector data to merge stored icons received from the icon module with stored information on the layout received from the layout module to produce a merged graphical layout of the semiconductor manufacturing facility. Upon merging, the icons are accessible in the merged graphical display to display real time information relating to semiconductor manufacture.

Claims

1. A system for monitoring semiconductor manufacturing in real time comprising:

an icon module that includes a database for storing a plurality of icons to provide stored icons that use vector data to represent respective pieces of equipment employed in semiconductor manufacture;

a layout module that includes a database for storing information on a layout of a semiconductor manufacturing facility to provide stored information on the layout; and

a joiner module, receptive to the icon module and the layout module, for using vector data to merge stored icons received from the icon module with stored information on the layout received from the layout module to produce a merged graphical layout of the semiconductor manufacturing facility, whereby upon merging, the icons are accessible to display real time information relating to semiconductor manufacture.

2. The system of claim 1 wherein the icon module is used for creating icons that use vector data to represent respective pieces of equipment employed in semiconductor manufacture.

3. The system of claim 1 wherein the icon module is used for modifying icons that use vector data to represent respective pieces of equipment employed in semiconductor manufacture.

4. The system of claim 1 wherein the stored information on the layout of a semiconductor manufacturing facility, includes icon positioning within the layout.

5. The system of claim 1 wherein the layout module is used for creating and modifying information on a layout of a semiconductor manufacturing facility.

6. The system of claim 1 wherein the information on the layout of the semiconductor manufacturing facility includes information regarding connections between icons that represent respective pieces of equipment employed in semiconductor manufacture.

7. The system of claim 1 wherein the joiner module provides scalar data for icon vector data before merging stored icons with stored information on the layout.

8. The system of claim 1 wherein the real time information related to semiconductor manufacture which is accessible from the icons includes the status of the respective piece of equipment that the icon represents.

9. The system of claim 1 wherein the real time information related to semiconductor manufacture which is accessible from the icons includes maintenance information regarding the respective piece of equipment that the icon represents.

10. The system of claim 1 wherein the real time information relating to semiconductor manufacture which is accessible from the icons includes dynamic registers that show process variables in real time.

11. The system of claim 1 wherein the real time information relating to semiconductor manufacture which is accessible from the icons includes operational specifications of the respective piece of equipment that the icon represents.

12. The system of claim 1 wherein the real time information about the semiconductor manufacture which is accessible from the icons includes process recipes.

13. The system of claim 1 further comprising:

a fabrication monitoring tool for monitoring the semiconductor manufacturing facility through the merged graphical layout produced by the joiner module.

14. The system of claim 13 wherein the fabrication monitoring tool is used to control the semiconductor manufacturing facility through the merged graphical layout produced by the joiner module.

15. The system of claim 1 further comprising:

a virtual integrated circuit fabrication system coupled to the system for monitoring semiconductor manufacturing in real time.

16. A system for monitoring semiconductor manufacturing in real time comprising:

a maintenance package to create and edit icons that use vector data to represent respective pieces of equipment employed in semiconductor manufacture and to create and edit information on a layout of a semiconductor manufacturing facility;

a storage and settings component including a plurality of databases for providing stored icons that use vector data to represent respective pieces of equipment employed in semiconductor manufacture and for providing stored information on a layout for a semiconductor manufacturing facility;

a layout joiner, receptive to the storage and settings component, for using vector data to merge stored icons with stored information on the layout to produce a merged graphical layout of the semiconductor manufacturing facility, whereby upon merging, the icons are accessible to display real time information relating to semiconductor manufacture; and

a fabrication monitoring tool for monitoring the semiconductor manufacturing facility through the merged graphical layout produced by the layout joiner.

17. The system of claim 16 wherein the stored information on the layout includes icon positioning within the layout.

18. The system of claim 16 wherein the stored information on the layout includes information regarding connections between icons that represent respective pieces of equipment employed in semiconductor manufacture.

19. The system of claim 16 wherein the layout joiner provides scalar data for icon vector data before merging stored icons with stored layouts.

20. The system of claim 16 wherein the real time information related to semiconductor manufacture which is accessible from the icons includes the status of the respective piece of equipment that the icon represents.

21. The system of claim 16 wherein the real time information related to semiconductor manufacture which is accessible from the icons includes maintenance information on the respective piece of equipment that the icon represents.

22. The system of claim 16 wherein the real time information related to semiconductor manufacture which is accessible from the icons includes dynamic registers that show process variables in real time.

23. The system of claim 16 wherein the real time information related to semiconductor manufacture which is accessible from the icons includes operational specifications of the respective piece of equipment that the icon represents.

24. The system of claim 16 wherein the real time information about the semiconductor manufacture which is accessible from the icons includes process recipes.

25. The system of claim 16 wherein the fabrication monitoring tool is used to control the semiconductor manufacturing facility through the merged graphical layout produced by the joiner module.

26. The system of claim 16 further comprising:

a virtual integrated circuit fabrication system coupled to the system for monitoring semiconductor manufacturing in real time.

27. A method for monitoring semiconductor manufacturing in real time comprising:

storing a plurality of icons in a database to provide stored icons that use vector data to represent respective pieces of equipment employed in semiconductor manufacture;

storing information on a layout of a semiconductor manufacturing facility in a database to provide stored information on the layout, the information on the layout including icon positioning within the layout;

merging the stored icons with the stored information on the layout using vector data to produce a merged graphical layout of the semiconductor manufacturing facility; and

accessing the icons to display real time information relating to semiconductor manufacture.

28. The method of claim 27 further comprising:

creating at least one icon to represent a respective piece of equipment employed in semiconductor manufacture and storing it in a database.

29. The method of claim 27 further comprising:

editing at least one icon to represent a respective piece of equipment employed in semiconductor manufacture and storing it in a database.

30. The method of claim 29 wherein the stored information on the layout includes icon positioning within the layout.

31. The method of claim 27 further comprising:

creating information on a layout of a semiconductor manufacturing facility and storing it in a database.

32. The method of claim 27 further comprising:

editing information on a layout of a semiconductor manufacturing facility and storing it in a database.

33. The method of claim 27 further comprising:

monitoring the semiconductor manufacturing facility through the merged graphical layout.

34. The method of claim 28 further comprising:

controlling the semiconductor manufacturing facility through the merged graphical layout.